2/29/2012	7:39:43 AM	Main Vac valve closed
2/29/2012	7:40:01 AM	Main Vac valve opened
2/29/2012	7:40:37 AM	Recipe started at 7:40 AM
2/29/2012	7:40:37 AM	Helium valve closed
2/29/2012	7:40:37 AM	H2 valve closed
2/29/2012	7:40:37 AM	BCl3 valve closed
2/29/2012	7:40:37 AM	PH3 valve closed
2/29/2012	7:40:37 AM	SiCl4 pre valve closed
2/29/2012	7:40:37 AM	SiCl4 post valve closed
2/29/2012	7:40:37 AM	Main Vac valve closed
2/29/2012	7:40:37 AM	Bypass valve closed
2/29/2012	7:40:37 AM	Bubbler valve closed
2/29/2012	7:40:37 AM	Helium MFC set to  0.000000
2/29/2012	7:40:37 AM	H2 MFC set to  0.000000
2/29/2012	7:40:37 AM	BCl3 MFC set to  0.000000
2/29/2012	7:40:37 AM	PH3 MFC set to  0.000000
2/29/2012	7:40:37 AM	SiCl4 MFC set to  0.000000
2/29/2012	7:40:37 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	7:40:37 AM	Tube furnace set to 0
2/29/2012	7:40:40 AM	Helium valve closed
2/29/2012	7:40:40 AM	BCl3 valve closed
2/29/2012	7:40:40 AM	PH3 valve closed
2/29/2012	7:40:40 AM	SiCl4 pre valve closed
2/29/2012	7:40:40 AM	SiCl4 post valve closed
2/29/2012	7:40:40 AM	Main Vac valve closed
2/29/2012	7:40:40 AM	Bypass valve closed
2/29/2012	7:40:40 AM	Bubbler valve closed
2/29/2012	7:40:40 AM	H2 valve opened
2/29/2012	7:40:40 AM	Helium MFC set to  0.000000
2/29/2012	7:40:40 AM	H2 MFC set to  500.000000
2/29/2012	7:40:40 AM	BCl3 MFC set to  0.000000
2/29/2012	7:40:40 AM	PH3 MFC set to  0.000000
2/29/2012	7:40:40 AM	SiCl4 MFC set to  0.000000
2/29/2012	7:40:40 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	7:40:40 AM	Tube furnace set to 0
2/29/2012	7:41:49 AM	Helium valve closed
2/29/2012	7:41:49 AM	BCl3 valve closed
2/29/2012	7:41:49 AM	PH3 valve closed
2/29/2012	7:41:49 AM	SiCl4 pre valve closed
2/29/2012	7:41:49 AM	SiCl4 post valve closed
2/29/2012	7:41:49 AM	Main Vac valve closed
2/29/2012	7:41:49 AM	Bypass valve closed
2/29/2012	7:41:49 AM	H2 valve opened
2/29/2012	7:41:49 AM	Bubbler valve opened
2/29/2012	7:41:49 AM	Helium MFC set to  0.000000
2/29/2012	7:41:49 AM	H2 MFC set to  500.000000
2/29/2012	7:41:49 AM	BCl3 MFC set to  0.000000
2/29/2012	7:41:49 AM	PH3 MFC set to  0.000000
2/29/2012	7:41:49 AM	SiCl4 MFC set to  0.000000
2/29/2012	7:41:49 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	7:41:49 AM	Tube furnace set to 0
2/29/2012	7:41:50 AM	Helium valve closed
2/29/2012	7:41:50 AM	BCl3 valve closed
2/29/2012	7:41:50 AM	PH3 valve closed
2/29/2012	7:41:50 AM	SiCl4 pre valve closed
2/29/2012	7:41:50 AM	SiCl4 post valve closed
2/29/2012	7:41:50 AM	Main Vac valve closed
2/29/2012	7:41:50 AM	Bypass valve closed
2/29/2012	7:41:50 AM	H2 valve opened
2/29/2012	7:41:50 AM	Bubbler valve opened
2/29/2012	7:41:50 AM	Helium MFC set to  0.000000
2/29/2012	7:41:50 AM	H2 MFC set to  500.000000
2/29/2012	7:41:50 AM	BCl3 MFC set to  0.000000
2/29/2012	7:41:50 AM	PH3 MFC set to  0.000000
2/29/2012	7:41:50 AM	SiCl4 MFC set to  0.000000
2/29/2012	7:41:50 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	7:41:50 AM	Tube furnace set to 1000
2/29/2012	8:01:50 AM	Helium valve closed
2/29/2012	8:01:50 AM	BCl3 valve closed
2/29/2012	8:01:50 AM	Main Vac valve closed
2/29/2012	8:01:50 AM	Bypass valve closed
2/29/2012	8:01:50 AM	H2 valve opened
2/29/2012	8:01:50 AM	PH3 valve opened
2/29/2012	8:01:50 AM	SiCl4 pre valve opened
2/29/2012	8:01:50 AM	SiCl4 post valve opened
2/29/2012	8:01:50 AM	Bubbler valve opened
2/29/2012	8:01:50 AM	Helium MFC set to  0.000000
2/29/2012	8:01:50 AM	H2 MFC set to  500.000000
2/29/2012	8:01:51 AM	BCl3 MFC set to  0.000000
2/29/2012	8:01:51 AM	PH3 MFC set to  0.300000
2/29/2012	8:01:51 AM	SiCl4 MFC set to  25.000000
2/29/2012	8:01:51 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:01:51 AM	Tube furnace set to 1000
2/29/2012	8:09:51 AM	Helium valve closed
2/29/2012	8:09:51 AM	BCl3 valve closed
2/29/2012	8:09:51 AM	PH3 valve closed
2/29/2012	8:09:51 AM	SiCl4 pre valve closed
2/29/2012	8:09:51 AM	SiCl4 post valve closed
2/29/2012	8:09:51 AM	Main Vac valve closed
2/29/2012	8:09:51 AM	Bypass valve closed
2/29/2012	8:09:51 AM	H2 valve opened
2/29/2012	8:09:51 AM	Bubbler valve opened
2/29/2012	8:09:51 AM	Helium MFC set to  0.000000
2/29/2012	8:09:51 AM	H2 MFC set to  500.000000
2/29/2012	8:09:51 AM	BCl3 MFC set to  0.000000
2/29/2012	8:09:51 AM	PH3 MFC set to  0.000000
2/29/2012	8:09:51 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:09:51 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:09:51 AM	Tube furnace set to 750
2/29/2012	8:14:51 AM	H2 valve closed
2/29/2012	8:14:51 AM	BCl3 valve closed
2/29/2012	8:14:51 AM	PH3 valve closed
2/29/2012	8:14:51 AM	SiCl4 pre valve closed
2/29/2012	8:14:51 AM	SiCl4 post valve closed
2/29/2012	8:14:51 AM	Main Vac valve closed
2/29/2012	8:14:51 AM	Bypass valve closed
2/29/2012	8:14:51 AM	Helium valve opened
2/29/2012	8:14:51 AM	Bubbler valve opened
2/29/2012	8:14:51 AM	Helium MFC set to  500.000000
2/29/2012	8:14:51 AM	H2 MFC set to  0.000000
2/29/2012	8:14:51 AM	BCl3 MFC set to  0.000000
2/29/2012	8:14:51 AM	PH3 MFC set to  0.000000
2/29/2012	8:14:51 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:14:51 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:14:51 AM	Tube furnace set to 0
2/29/2012	8:26:42 AM	Helium valve closed
2/29/2012	8:26:42 AM	H2 valve closed
2/29/2012	8:26:42 AM	BCl3 valve closed
2/29/2012	8:26:42 AM	PH3 valve closed
2/29/2012	8:26:42 AM	SiCl4 pre valve closed
2/29/2012	8:26:42 AM	SiCl4 post valve closed
2/29/2012	8:26:42 AM	Main Vac valve closed
2/29/2012	8:26:42 AM	Bypass valve closed
2/29/2012	8:26:42 AM	Bubbler valve closed
2/29/2012	8:26:42 AM	Helium MFC set to  0.000000
2/29/2012	8:26:42 AM	H2 MFC set to  0.000000
2/29/2012	8:26:42 AM	BCl3 MFC set to  0.000000
2/29/2012	8:26:42 AM	PH3 MFC set to  0.000000
2/29/2012	8:26:42 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:26:42 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:26:43 AM	Tube furnace set to 0
2/29/2012	8:26:44 AM	Run finished at 8:26 AM
2/29/2012	8:28:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/29/2012	8:28:57 AM	Recipe started at 8:28 AM
2/29/2012	8:28:57 AM	Helium valve closed
2/29/2012	8:28:57 AM	H2 valve closed
2/29/2012	8:28:57 AM	BCl3 valve closed
2/29/2012	8:28:57 AM	PH3 valve closed
2/29/2012	8:28:57 AM	SiCl4 pre valve closed
2/29/2012	8:28:57 AM	SiCl4 post valve closed
2/29/2012	8:28:57 AM	Main Vac valve closed
2/29/2012	8:28:57 AM	Bubbler valve closed
2/29/2012	8:28:57 AM	Bypass valve opened
2/29/2012	8:28:57 AM	Helium MFC set to  0.000000
2/29/2012	8:28:57 AM	H2 MFC set to  0.000000
2/29/2012	8:28:57 AM	BCl3 MFC set to  0.000000
2/29/2012	8:28:57 AM	PH3 MFC set to  0.000000
2/29/2012	8:28:57 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:28:57 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:28:57 AM	Tube furnace set to 0
2/29/2012	8:29:54 AM	Helium valve closed
2/29/2012	8:29:54 AM	H2 valve closed
2/29/2012	8:29:54 AM	BCl3 valve closed
2/29/2012	8:29:54 AM	PH3 valve closed
2/29/2012	8:29:54 AM	SiCl4 pre valve closed
2/29/2012	8:29:54 AM	SiCl4 post valve closed
2/29/2012	8:29:54 AM	Main Vac valve closed
2/29/2012	8:29:54 AM	Bubbler valve closed
2/29/2012	8:29:54 AM	Bypass valve opened
2/29/2012	8:29:54 AM	Helium MFC set to  0.000000
2/29/2012	8:29:54 AM	H2 MFC set to  0.000000
2/29/2012	8:29:54 AM	BCl3 MFC set to  0.000000
2/29/2012	8:29:54 AM	PH3 MFC set to  0.000000
2/29/2012	8:29:54 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:29:54 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:29:55 AM	Tube furnace set to 0
2/29/2012	8:30:55 AM	Helium valve closed
2/29/2012	8:30:55 AM	H2 valve closed
2/29/2012	8:30:55 AM	BCl3 valve closed
2/29/2012	8:30:55 AM	PH3 valve closed
2/29/2012	8:30:55 AM	SiCl4 pre valve closed
2/29/2012	8:30:55 AM	SiCl4 post valve closed
2/29/2012	8:30:55 AM	Bypass valve closed
2/29/2012	8:30:55 AM	Bubbler valve closed
2/29/2012	8:30:55 AM	Main Vac valve opened
2/29/2012	8:30:55 AM	Helium MFC set to  0.000000
2/29/2012	8:30:55 AM	H2 MFC set to  0.000000
2/29/2012	8:30:55 AM	BCl3 MFC set to  0.000000
2/29/2012	8:30:55 AM	PH3 MFC set to  0.000000
2/29/2012	8:30:55 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:30:55 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:30:55 AM	Tube furnace set to 0
2/29/2012	8:30:56 AM	Run finished at 8:30 AM
2/29/2012	8:30:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/29/2012	8:37:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/29/2012	8:38:06 AM	Recipe started at 8:37 AM
2/29/2012	8:38:06 AM	Helium valve closed
2/29/2012	8:38:06 AM	H2 valve closed
2/29/2012	8:38:06 AM	BCl3 valve closed
2/29/2012	8:38:06 AM	PH3 valve closed
2/29/2012	8:38:06 AM	SiCl4 pre valve closed
2/29/2012	8:38:06 AM	SiCl4 post valve closed
2/29/2012	8:38:06 AM	Main Vac valve closed
2/29/2012	8:38:06 AM	Bubbler valve closed
2/29/2012	8:38:06 AM	Bypass valve opened
2/29/2012	8:38:06 AM	Helium MFC set to  0.000000
2/29/2012	8:38:06 AM	H2 MFC set to  0.000000
2/29/2012	8:38:06 AM	BCl3 MFC set to  0.000000
2/29/2012	8:38:06 AM	PH3 MFC set to  0.000000
2/29/2012	8:38:06 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:38:06 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:38:06 AM	Tube furnace set to 0
2/29/2012	8:38:06 AM	Helium valve closed
2/29/2012	8:38:06 AM	H2 valve closed
2/29/2012	8:38:06 AM	BCl3 valve closed
2/29/2012	8:38:06 AM	PH3 valve closed
2/29/2012	8:38:06 AM	SiCl4 pre valve closed
2/29/2012	8:38:06 AM	SiCl4 post valve closed
2/29/2012	8:38:06 AM	Main Vac valve closed
2/29/2012	8:38:06 AM	Bubbler valve closed
2/29/2012	8:38:06 AM	Bypass valve opened
2/29/2012	8:38:06 AM	Helium MFC set to  0.000000
2/29/2012	8:38:06 AM	H2 MFC set to  0.000000
2/29/2012	8:38:06 AM	BCl3 MFC set to  0.000000
2/29/2012	8:38:06 AM	PH3 MFC set to  0.000000
2/29/2012	8:38:06 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:38:06 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:38:06 AM	Tube furnace set to 0
2/29/2012	8:38:07 AM	Helium valve closed
2/29/2012	8:38:07 AM	H2 valve closed
2/29/2012	8:38:07 AM	BCl3 valve closed
2/29/2012	8:38:07 AM	PH3 valve closed
2/29/2012	8:38:07 AM	SiCl4 pre valve closed
2/29/2012	8:38:07 AM	SiCl4 post valve closed
2/29/2012	8:38:07 AM	Bypass valve closed
2/29/2012	8:38:07 AM	Bubbler valve closed
2/29/2012	8:38:07 AM	Main Vac valve opened
2/29/2012	8:38:07 AM	Helium MFC set to  0.000000
2/29/2012	8:38:07 AM	H2 MFC set to  0.000000
2/29/2012	8:38:07 AM	BCl3 MFC set to  0.000000
2/29/2012	8:38:07 AM	PH3 MFC set to  0.000000
2/29/2012	8:38:07 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:38:07 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:38:07 AM	Tube furnace set to 0
2/29/2012	8:38:37 AM	H2 valve closed
2/29/2012	8:38:37 AM	BCl3 valve closed
2/29/2012	8:38:37 AM	PH3 valve closed
2/29/2012	8:38:37 AM	SiCl4 pre valve closed
2/29/2012	8:38:37 AM	SiCl4 post valve closed
2/29/2012	8:38:37 AM	Bypass valve closed
2/29/2012	8:38:37 AM	Bubbler valve closed
2/29/2012	8:38:37 AM	Helium valve opened
2/29/2012	8:38:37 AM	Main Vac valve opened
2/29/2012	8:38:37 AM	Helium MFC set to  20.000000
2/29/2012	8:38:37 AM	H2 MFC set to  0.000000
2/29/2012	8:38:37 AM	BCl3 MFC set to  0.000000
2/29/2012	8:38:37 AM	PH3 MFC set to  0.000000
2/29/2012	8:38:37 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:38:37 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:38:37 AM	Tube furnace set to 0
2/29/2012	8:39:07 AM	Helium valve closed
2/29/2012	8:39:07 AM	H2 valve closed
2/29/2012	8:39:07 AM	BCl3 valve closed
2/29/2012	8:39:07 AM	PH3 valve closed
2/29/2012	8:39:07 AM	SiCl4 pre valve closed
2/29/2012	8:39:07 AM	SiCl4 post valve closed
2/29/2012	8:39:07 AM	Bypass valve closed
2/29/2012	8:39:07 AM	Bubbler valve closed
2/29/2012	8:39:07 AM	Main Vac valve opened
2/29/2012	8:39:07 AM	Helium MFC set to  0.000000
2/29/2012	8:39:07 AM	H2 MFC set to  0.000000
2/29/2012	8:39:07 AM	BCl3 MFC set to  0.000000
2/29/2012	8:39:07 AM	PH3 MFC set to  0.000000
2/29/2012	8:39:07 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:39:07 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:39:07 AM	Tube furnace set to 0
2/29/2012	8:39:37 AM	H2 valve closed
2/29/2012	8:39:37 AM	BCl3 valve closed
2/29/2012	8:39:37 AM	PH3 valve closed
2/29/2012	8:39:37 AM	SiCl4 pre valve closed
2/29/2012	8:39:37 AM	SiCl4 post valve closed
2/29/2012	8:39:37 AM	Bypass valve closed
2/29/2012	8:39:37 AM	Bubbler valve closed
2/29/2012	8:39:37 AM	Helium valve opened
2/29/2012	8:39:37 AM	Main Vac valve opened
2/29/2012	8:39:37 AM	Helium MFC set to  20.000000
2/29/2012	8:39:37 AM	H2 MFC set to  0.000000
2/29/2012	8:39:37 AM	BCl3 MFC set to  0.000000
2/29/2012	8:39:37 AM	PH3 MFC set to  0.000000
2/29/2012	8:39:37 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:39:37 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:39:37 AM	Tube furnace set to 0
2/29/2012	8:40:07 AM	Helium valve closed
2/29/2012	8:40:07 AM	H2 valve closed
2/29/2012	8:40:07 AM	BCl3 valve closed
2/29/2012	8:40:07 AM	PH3 valve closed
2/29/2012	8:40:07 AM	SiCl4 pre valve closed
2/29/2012	8:40:07 AM	SiCl4 post valve closed
2/29/2012	8:40:07 AM	Bypass valve closed
2/29/2012	8:40:07 AM	Bubbler valve closed
2/29/2012	8:40:07 AM	Main Vac valve opened
2/29/2012	8:40:07 AM	Helium MFC set to  0.000000
2/29/2012	8:40:07 AM	H2 MFC set to  0.000000
2/29/2012	8:40:07 AM	BCl3 MFC set to  0.000000
2/29/2012	8:40:07 AM	PH3 MFC set to  0.000000
2/29/2012	8:40:07 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:40:07 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:40:08 AM	Tube furnace set to 0
2/29/2012	8:40:38 AM	H2 valve closed
2/29/2012	8:40:38 AM	BCl3 valve closed
2/29/2012	8:40:38 AM	PH3 valve closed
2/29/2012	8:40:38 AM	SiCl4 pre valve closed
2/29/2012	8:40:38 AM	SiCl4 post valve closed
2/29/2012	8:40:38 AM	Bypass valve closed
2/29/2012	8:40:38 AM	Bubbler valve closed
2/29/2012	8:40:38 AM	Helium valve opened
2/29/2012	8:40:38 AM	Main Vac valve opened
2/29/2012	8:40:38 AM	Helium MFC set to  20.000000
2/29/2012	8:40:38 AM	H2 MFC set to  0.000000
2/29/2012	8:40:38 AM	BCl3 MFC set to  0.000000
2/29/2012	8:40:38 AM	PH3 MFC set to  0.000000
2/29/2012	8:40:38 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:40:38 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:40:38 AM	Tube furnace set to 0
2/29/2012	8:41:08 AM	Helium valve closed
2/29/2012	8:41:08 AM	H2 valve closed
2/29/2012	8:41:08 AM	BCl3 valve closed
2/29/2012	8:41:08 AM	PH3 valve closed
2/29/2012	8:41:08 AM	SiCl4 pre valve closed
2/29/2012	8:41:08 AM	SiCl4 post valve closed
2/29/2012	8:41:08 AM	Bypass valve closed
2/29/2012	8:41:08 AM	Bubbler valve closed
2/29/2012	8:41:08 AM	Main Vac valve opened
2/29/2012	8:41:08 AM	Helium MFC set to  0.000000
2/29/2012	8:41:08 AM	H2 MFC set to  0.000000
2/29/2012	8:41:08 AM	BCl3 MFC set to  0.000000
2/29/2012	8:41:08 AM	PH3 MFC set to  0.000000
2/29/2012	8:41:08 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:41:08 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:41:08 AM	Tube furnace set to 0
2/29/2012	8:41:38 AM	H2 valve closed
2/29/2012	8:41:38 AM	BCl3 valve closed
2/29/2012	8:41:38 AM	PH3 valve closed
2/29/2012	8:41:38 AM	SiCl4 pre valve closed
2/29/2012	8:41:38 AM	SiCl4 post valve closed
2/29/2012	8:41:38 AM	Bypass valve closed
2/29/2012	8:41:38 AM	Bubbler valve closed
2/29/2012	8:41:38 AM	Helium valve opened
2/29/2012	8:41:38 AM	Main Vac valve opened
2/29/2012	8:41:38 AM	Helium MFC set to  20.000000
2/29/2012	8:41:38 AM	H2 MFC set to  0.000000
2/29/2012	8:41:38 AM	BCl3 MFC set to  0.000000
2/29/2012	8:41:38 AM	PH3 MFC set to  0.000000
2/29/2012	8:41:38 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:41:38 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:41:38 AM	Tube furnace set to 0
2/29/2012	8:42:08 AM	Helium valve closed
2/29/2012	8:42:08 AM	H2 valve closed
2/29/2012	8:42:08 AM	BCl3 valve closed
2/29/2012	8:42:08 AM	PH3 valve closed
2/29/2012	8:42:08 AM	SiCl4 pre valve closed
2/29/2012	8:42:08 AM	SiCl4 post valve closed
2/29/2012	8:42:08 AM	Bypass valve closed
2/29/2012	8:42:08 AM	Bubbler valve closed
2/29/2012	8:42:08 AM	Main Vac valve opened
2/29/2012	8:42:08 AM	Helium MFC set to  0.000000
2/29/2012	8:42:08 AM	H2 MFC set to  0.000000
2/29/2012	8:42:08 AM	BCl3 MFC set to  0.000000
2/29/2012	8:42:08 AM	PH3 MFC set to  0.000000
2/29/2012	8:42:08 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:42:08 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:42:08 AM	Tube furnace set to 0
2/29/2012	8:42:38 AM	H2 valve closed
2/29/2012	8:42:38 AM	BCl3 valve closed
2/29/2012	8:42:38 AM	PH3 valve closed
2/29/2012	8:42:38 AM	SiCl4 pre valve closed
2/29/2012	8:42:38 AM	SiCl4 post valve closed
2/29/2012	8:42:38 AM	Bypass valve closed
2/29/2012	8:42:38 AM	Bubbler valve closed
2/29/2012	8:42:38 AM	Helium valve opened
2/29/2012	8:42:38 AM	Main Vac valve opened
2/29/2012	8:42:38 AM	Helium MFC set to  20.000000
2/29/2012	8:42:38 AM	H2 MFC set to  0.000000
2/29/2012	8:42:38 AM	BCl3 MFC set to  0.000000
2/29/2012	8:42:38 AM	PH3 MFC set to  0.000000
2/29/2012	8:42:38 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:42:38 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:42:39 AM	Tube furnace set to 0
2/29/2012	8:43:09 AM	Helium valve closed
2/29/2012	8:43:09 AM	H2 valve closed
2/29/2012	8:43:09 AM	BCl3 valve closed
2/29/2012	8:43:09 AM	PH3 valve closed
2/29/2012	8:43:09 AM	SiCl4 pre valve closed
2/29/2012	8:43:09 AM	SiCl4 post valve closed
2/29/2012	8:43:09 AM	Bypass valve closed
2/29/2012	8:43:09 AM	Bubbler valve closed
2/29/2012	8:43:09 AM	Main Vac valve opened
2/29/2012	8:43:09 AM	Helium MFC set to  0.000000
2/29/2012	8:43:09 AM	H2 MFC set to  0.000000
2/29/2012	8:43:09 AM	BCl3 MFC set to  0.000000
2/29/2012	8:43:09 AM	PH3 MFC set to  0.000000
2/29/2012	8:43:09 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:43:09 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:43:09 AM	Tube furnace set to 0
2/29/2012	8:43:39 AM	H2 valve closed
2/29/2012	8:43:39 AM	BCl3 valve closed
2/29/2012	8:43:39 AM	PH3 valve closed
2/29/2012	8:43:39 AM	SiCl4 pre valve closed
2/29/2012	8:43:39 AM	SiCl4 post valve closed
2/29/2012	8:43:39 AM	Bypass valve closed
2/29/2012	8:43:39 AM	Bubbler valve closed
2/29/2012	8:43:39 AM	Helium valve opened
2/29/2012	8:43:39 AM	Main Vac valve opened
2/29/2012	8:43:39 AM	Helium MFC set to  20.000000
2/29/2012	8:43:39 AM	H2 MFC set to  0.000000
2/29/2012	8:43:39 AM	BCl3 MFC set to  0.000000
2/29/2012	8:43:39 AM	PH3 MFC set to  0.000000
2/29/2012	8:43:39 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:43:39 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:43:39 AM	Tube furnace set to 0
2/29/2012	8:44:09 AM	Helium valve closed
2/29/2012	8:44:09 AM	H2 valve closed
2/29/2012	8:44:09 AM	BCl3 valve closed
2/29/2012	8:44:09 AM	PH3 valve closed
2/29/2012	8:44:09 AM	SiCl4 pre valve closed
2/29/2012	8:44:09 AM	SiCl4 post valve closed
2/29/2012	8:44:09 AM	Bypass valve closed
2/29/2012	8:44:09 AM	Bubbler valve closed
2/29/2012	8:44:09 AM	Main Vac valve opened
2/29/2012	8:44:09 AM	Helium MFC set to  0.000000
2/29/2012	8:44:09 AM	H2 MFC set to  0.000000
2/29/2012	8:44:09 AM	BCl3 MFC set to  0.000000
2/29/2012	8:44:09 AM	PH3 MFC set to  0.000000
2/29/2012	8:44:09 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:44:09 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:44:09 AM	Tube furnace set to 0
2/29/2012	8:44:39 AM	H2 valve closed
2/29/2012	8:44:39 AM	BCl3 valve closed
2/29/2012	8:44:39 AM	PH3 valve closed
2/29/2012	8:44:39 AM	SiCl4 pre valve closed
2/29/2012	8:44:39 AM	SiCl4 post valve closed
2/29/2012	8:44:39 AM	Bypass valve closed
2/29/2012	8:44:39 AM	Bubbler valve closed
2/29/2012	8:44:39 AM	Helium valve opened
2/29/2012	8:44:39 AM	Main Vac valve opened
2/29/2012	8:44:39 AM	Helium MFC set to  20.000000
2/29/2012	8:44:39 AM	H2 MFC set to  0.000000
2/29/2012	8:44:39 AM	BCl3 MFC set to  0.000000
2/29/2012	8:44:39 AM	PH3 MFC set to  0.000000
2/29/2012	8:44:39 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:44:39 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:44:39 AM	Tube furnace set to 0
2/29/2012	8:45:09 AM	Helium valve closed
2/29/2012	8:45:09 AM	H2 valve closed
2/29/2012	8:45:09 AM	BCl3 valve closed
2/29/2012	8:45:09 AM	PH3 valve closed
2/29/2012	8:45:09 AM	SiCl4 pre valve closed
2/29/2012	8:45:09 AM	SiCl4 post valve closed
2/29/2012	8:45:09 AM	Bypass valve closed
2/29/2012	8:45:09 AM	Bubbler valve closed
2/29/2012	8:45:09 AM	Main Vac valve opened
2/29/2012	8:45:09 AM	Helium MFC set to  0.000000
2/29/2012	8:45:09 AM	H2 MFC set to  0.000000
2/29/2012	8:45:09 AM	BCl3 MFC set to  0.000000
2/29/2012	8:45:09 AM	PH3 MFC set to  0.000000
2/29/2012	8:45:09 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:45:09 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:45:10 AM	Tube furnace set to 0
2/29/2012	8:45:40 AM	H2 valve closed
2/29/2012	8:45:40 AM	BCl3 valve closed
2/29/2012	8:45:40 AM	PH3 valve closed
2/29/2012	8:45:40 AM	SiCl4 pre valve closed
2/29/2012	8:45:40 AM	SiCl4 post valve closed
2/29/2012	8:45:40 AM	Bypass valve closed
2/29/2012	8:45:40 AM	Bubbler valve closed
2/29/2012	8:45:40 AM	Helium valve opened
2/29/2012	8:45:40 AM	Main Vac valve opened
2/29/2012	8:45:40 AM	Helium MFC set to  20.000000
2/29/2012	8:45:40 AM	H2 MFC set to  0.000000
2/29/2012	8:45:40 AM	BCl3 MFC set to  0.000000
2/29/2012	8:45:40 AM	PH3 MFC set to  0.000000
2/29/2012	8:45:40 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:45:40 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:45:40 AM	Tube furnace set to 0
2/29/2012	8:46:10 AM	Helium valve closed
2/29/2012	8:46:10 AM	H2 valve closed
2/29/2012	8:46:10 AM	BCl3 valve closed
2/29/2012	8:46:10 AM	PH3 valve closed
2/29/2012	8:46:10 AM	SiCl4 pre valve closed
2/29/2012	8:46:10 AM	SiCl4 post valve closed
2/29/2012	8:46:10 AM	Bypass valve closed
2/29/2012	8:46:10 AM	Bubbler valve closed
2/29/2012	8:46:10 AM	Main Vac valve opened
2/29/2012	8:46:10 AM	Helium MFC set to  0.000000
2/29/2012	8:46:10 AM	H2 MFC set to  0.000000
2/29/2012	8:46:10 AM	BCl3 MFC set to  0.000000
2/29/2012	8:46:10 AM	PH3 MFC set to  0.000000
2/29/2012	8:46:10 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:46:10 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:46:10 AM	Tube furnace set to 0
2/29/2012	8:46:40 AM	H2 valve closed
2/29/2012	8:46:40 AM	BCl3 valve closed
2/29/2012	8:46:40 AM	PH3 valve closed
2/29/2012	8:46:40 AM	SiCl4 pre valve closed
2/29/2012	8:46:40 AM	SiCl4 post valve closed
2/29/2012	8:46:40 AM	Bypass valve closed
2/29/2012	8:46:40 AM	Bubbler valve closed
2/29/2012	8:46:40 AM	Helium valve opened
2/29/2012	8:46:40 AM	Main Vac valve opened
2/29/2012	8:46:40 AM	Helium MFC set to  20.000000
2/29/2012	8:46:40 AM	H2 MFC set to  0.000000
2/29/2012	8:46:40 AM	BCl3 MFC set to  0.000000
2/29/2012	8:46:40 AM	PH3 MFC set to  0.000000
2/29/2012	8:46:40 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:46:40 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:46:40 AM	Tube furnace set to 0
2/29/2012	8:47:10 AM	Helium valve closed
2/29/2012	8:47:10 AM	H2 valve closed
2/29/2012	8:47:10 AM	BCl3 valve closed
2/29/2012	8:47:10 AM	PH3 valve closed
2/29/2012	8:47:10 AM	SiCl4 pre valve closed
2/29/2012	8:47:10 AM	SiCl4 post valve closed
2/29/2012	8:47:10 AM	Bypass valve closed
2/29/2012	8:47:10 AM	Bubbler valve closed
2/29/2012	8:47:10 AM	Main Vac valve opened
2/29/2012	8:47:10 AM	Helium MFC set to  0.000000
2/29/2012	8:47:10 AM	H2 MFC set to  0.000000
2/29/2012	8:47:10 AM	BCl3 MFC set to  0.000000
2/29/2012	8:47:10 AM	PH3 MFC set to  0.000000
2/29/2012	8:47:10 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:47:10 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:47:10 AM	Tube furnace set to 0
2/29/2012	8:47:40 AM	H2 valve closed
2/29/2012	8:47:40 AM	BCl3 valve closed
2/29/2012	8:47:40 AM	PH3 valve closed
2/29/2012	8:47:40 AM	SiCl4 pre valve closed
2/29/2012	8:47:40 AM	SiCl4 post valve closed
2/29/2012	8:47:40 AM	Bypass valve closed
2/29/2012	8:47:40 AM	Bubbler valve closed
2/29/2012	8:47:40 AM	Helium valve opened
2/29/2012	8:47:40 AM	Main Vac valve opened
2/29/2012	8:47:40 AM	Helium MFC set to  20.000000
2/29/2012	8:47:40 AM	H2 MFC set to  0.000000
2/29/2012	8:47:40 AM	BCl3 MFC set to  0.000000
2/29/2012	8:47:41 AM	PH3 MFC set to  0.000000
2/29/2012	8:47:41 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:47:41 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:47:41 AM	Tube furnace set to 0
2/29/2012	8:48:11 AM	Helium valve closed
2/29/2012	8:48:11 AM	H2 valve closed
2/29/2012	8:48:11 AM	BCl3 valve closed
2/29/2012	8:48:11 AM	PH3 valve closed
2/29/2012	8:48:11 AM	SiCl4 pre valve closed
2/29/2012	8:48:11 AM	SiCl4 post valve closed
2/29/2012	8:48:11 AM	Bypass valve closed
2/29/2012	8:48:11 AM	Bubbler valve closed
2/29/2012	8:48:11 AM	Main Vac valve opened
2/29/2012	8:48:11 AM	Helium MFC set to  0.000000
2/29/2012	8:48:11 AM	H2 MFC set to  0.000000
2/29/2012	8:48:11 AM	BCl3 MFC set to  0.000000
2/29/2012	8:48:11 AM	PH3 MFC set to  0.000000
2/29/2012	8:48:11 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:48:11 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:48:11 AM	Tube furnace set to 0
2/29/2012	8:48:12 AM	Run finished at 8:48 AM
2/29/2012	8:48:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/29/2012	8:49:03 AM	Main Vac valve closed
2/29/2012	8:49:14 AM	Main Vac valve opened
2/29/2012	8:49:20 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/29/2012	8:49:33 AM	Recipe started at 8:49 AM
2/29/2012	8:49:33 AM	Helium valve closed
2/29/2012	8:49:33 AM	H2 valve closed
2/29/2012	8:49:33 AM	BCl3 valve closed
2/29/2012	8:49:33 AM	PH3 valve closed
2/29/2012	8:49:33 AM	SiCl4 pre valve closed
2/29/2012	8:49:33 AM	SiCl4 post valve closed
2/29/2012	8:49:33 AM	Main Vac valve closed
2/29/2012	8:49:33 AM	Bubbler valve closed
2/29/2012	8:49:33 AM	Bypass valve opened
2/29/2012	8:49:33 AM	Helium MFC set to  0.000000
2/29/2012	8:49:33 AM	H2 MFC set to  0.000000
2/29/2012	8:49:33 AM	BCl3 MFC set to  0.000000
2/29/2012	8:49:33 AM	PH3 MFC set to  0.000000
2/29/2012	8:49:33 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:49:33 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:49:33 AM	Tube furnace set to 0
2/29/2012	8:49:34 AM	Helium valve closed
2/29/2012	8:49:34 AM	H2 valve closed
2/29/2012	8:49:34 AM	BCl3 valve closed
2/29/2012	8:49:34 AM	PH3 valve closed
2/29/2012	8:49:34 AM	SiCl4 pre valve closed
2/29/2012	8:49:34 AM	SiCl4 post valve closed
2/29/2012	8:49:34 AM	Main Vac valve closed
2/29/2012	8:49:34 AM	Bubbler valve closed
2/29/2012	8:49:34 AM	Bypass valve opened
2/29/2012	8:49:34 AM	Helium MFC set to  0.000000
2/29/2012	8:49:34 AM	H2 MFC set to  0.000000
2/29/2012	8:49:34 AM	BCl3 MFC set to  0.000000
2/29/2012	8:49:34 AM	PH3 MFC set to  0.000000
2/29/2012	8:49:34 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:49:34 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:49:34 AM	Tube furnace set to 0
2/29/2012	8:49:35 AM	Helium valve closed
2/29/2012	8:49:35 AM	H2 valve closed
2/29/2012	8:49:35 AM	BCl3 valve closed
2/29/2012	8:49:35 AM	PH3 valve closed
2/29/2012	8:49:35 AM	SiCl4 pre valve closed
2/29/2012	8:49:35 AM	SiCl4 post valve closed
2/29/2012	8:49:35 AM	Bypass valve closed
2/29/2012	8:49:35 AM	Bubbler valve closed
2/29/2012	8:49:35 AM	Main Vac valve opened
2/29/2012	8:49:35 AM	Helium MFC set to  0.000000
2/29/2012	8:49:35 AM	H2 MFC set to  0.000000
2/29/2012	8:49:35 AM	BCl3 MFC set to  0.000000
2/29/2012	8:49:35 AM	PH3 MFC set to  0.000000
2/29/2012	8:49:35 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:49:35 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:49:35 AM	Tube furnace set to 0
2/29/2012	8:50:05 AM	H2 valve closed
2/29/2012	8:50:05 AM	BCl3 valve closed
2/29/2012	8:50:05 AM	PH3 valve closed
2/29/2012	8:50:05 AM	SiCl4 pre valve closed
2/29/2012	8:50:05 AM	SiCl4 post valve closed
2/29/2012	8:50:05 AM	Bypass valve closed
2/29/2012	8:50:05 AM	Bubbler valve closed
2/29/2012	8:50:05 AM	Helium valve opened
2/29/2012	8:50:05 AM	Main Vac valve opened
2/29/2012	8:50:05 AM	Helium MFC set to  20.000000
2/29/2012	8:50:05 AM	H2 MFC set to  0.000000
2/29/2012	8:50:05 AM	BCl3 MFC set to  0.000000
2/29/2012	8:50:05 AM	PH3 MFC set to  0.000000
2/29/2012	8:50:05 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:50:05 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:50:05 AM	Tube furnace set to 0
2/29/2012	8:50:35 AM	Helium valve closed
2/29/2012	8:50:35 AM	H2 valve closed
2/29/2012	8:50:35 AM	BCl3 valve closed
2/29/2012	8:50:35 AM	PH3 valve closed
2/29/2012	8:50:35 AM	SiCl4 pre valve closed
2/29/2012	8:50:35 AM	SiCl4 post valve closed
2/29/2012	8:50:35 AM	Bypass valve closed
2/29/2012	8:50:35 AM	Bubbler valve closed
2/29/2012	8:50:35 AM	Main Vac valve opened
2/29/2012	8:50:35 AM	Helium MFC set to  0.000000
2/29/2012	8:50:35 AM	H2 MFC set to  0.000000
2/29/2012	8:50:35 AM	BCl3 MFC set to  0.000000
2/29/2012	8:50:35 AM	PH3 MFC set to  0.000000
2/29/2012	8:50:35 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:50:35 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:50:35 AM	Tube furnace set to 0
2/29/2012	8:51:05 AM	H2 valve closed
2/29/2012	8:51:05 AM	BCl3 valve closed
2/29/2012	8:51:05 AM	PH3 valve closed
2/29/2012	8:51:05 AM	SiCl4 pre valve closed
2/29/2012	8:51:05 AM	SiCl4 post valve closed
2/29/2012	8:51:05 AM	Bypass valve closed
2/29/2012	8:51:05 AM	Bubbler valve closed
2/29/2012	8:51:05 AM	Helium valve opened
2/29/2012	8:51:05 AM	Main Vac valve opened
2/29/2012	8:51:05 AM	Helium MFC set to  20.000000
2/29/2012	8:51:05 AM	H2 MFC set to  0.000000
2/29/2012	8:51:05 AM	BCl3 MFC set to  0.000000
2/29/2012	8:51:05 AM	PH3 MFC set to  0.000000
2/29/2012	8:51:05 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:51:05 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:51:05 AM	Tube furnace set to 0
2/29/2012	8:51:35 AM	Helium valve closed
2/29/2012	8:51:35 AM	H2 valve closed
2/29/2012	8:51:35 AM	BCl3 valve closed
2/29/2012	8:51:35 AM	PH3 valve closed
2/29/2012	8:51:35 AM	SiCl4 pre valve closed
2/29/2012	8:51:35 AM	SiCl4 post valve closed
2/29/2012	8:51:35 AM	Bypass valve closed
2/29/2012	8:51:35 AM	Bubbler valve closed
2/29/2012	8:51:35 AM	Main Vac valve opened
2/29/2012	8:51:35 AM	Helium MFC set to  0.000000
2/29/2012	8:51:35 AM	H2 MFC set to  0.000000
2/29/2012	8:51:35 AM	BCl3 MFC set to  0.000000
2/29/2012	8:51:35 AM	PH3 MFC set to  0.000000
2/29/2012	8:51:35 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:51:35 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:51:36 AM	Tube furnace set to 0
2/29/2012	8:52:06 AM	H2 valve closed
2/29/2012	8:52:06 AM	BCl3 valve closed
2/29/2012	8:52:06 AM	PH3 valve closed
2/29/2012	8:52:06 AM	SiCl4 pre valve closed
2/29/2012	8:52:06 AM	SiCl4 post valve closed
2/29/2012	8:52:06 AM	Bypass valve closed
2/29/2012	8:52:06 AM	Bubbler valve closed
2/29/2012	8:52:06 AM	Helium valve opened
2/29/2012	8:52:06 AM	Main Vac valve opened
2/29/2012	8:52:06 AM	Helium MFC set to  20.000000
2/29/2012	8:52:06 AM	H2 MFC set to  0.000000
2/29/2012	8:52:06 AM	BCl3 MFC set to  0.000000
2/29/2012	8:52:06 AM	PH3 MFC set to  0.000000
2/29/2012	8:52:06 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:52:06 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:52:06 AM	Tube furnace set to 0
2/29/2012	8:52:36 AM	Helium valve closed
2/29/2012	8:52:36 AM	H2 valve closed
2/29/2012	8:52:36 AM	BCl3 valve closed
2/29/2012	8:52:36 AM	PH3 valve closed
2/29/2012	8:52:36 AM	SiCl4 pre valve closed
2/29/2012	8:52:36 AM	SiCl4 post valve closed
2/29/2012	8:52:36 AM	Bypass valve closed
2/29/2012	8:52:36 AM	Bubbler valve closed
2/29/2012	8:52:36 AM	Main Vac valve opened
2/29/2012	8:52:36 AM	Helium MFC set to  0.000000
2/29/2012	8:52:36 AM	H2 MFC set to  0.000000
2/29/2012	8:52:36 AM	BCl3 MFC set to  0.000000
2/29/2012	8:52:36 AM	PH3 MFC set to  0.000000
2/29/2012	8:52:36 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:52:36 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:52:36 AM	Tube furnace set to 0
2/29/2012	8:53:06 AM	H2 valve closed
2/29/2012	8:53:06 AM	BCl3 valve closed
2/29/2012	8:53:06 AM	PH3 valve closed
2/29/2012	8:53:06 AM	SiCl4 pre valve closed
2/29/2012	8:53:06 AM	SiCl4 post valve closed
2/29/2012	8:53:06 AM	Bypass valve closed
2/29/2012	8:53:06 AM	Bubbler valve closed
2/29/2012	8:53:06 AM	Helium valve opened
2/29/2012	8:53:06 AM	Main Vac valve opened
2/29/2012	8:53:06 AM	Helium MFC set to  20.000000
2/29/2012	8:53:06 AM	H2 MFC set to  0.000000
2/29/2012	8:53:06 AM	BCl3 MFC set to  0.000000
2/29/2012	8:53:06 AM	PH3 MFC set to  0.000000
2/29/2012	8:53:06 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:53:06 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:53:06 AM	Tube furnace set to 0
2/29/2012	8:53:36 AM	Helium valve closed
2/29/2012	8:53:36 AM	H2 valve closed
2/29/2012	8:53:36 AM	BCl3 valve closed
2/29/2012	8:53:36 AM	PH3 valve closed
2/29/2012	8:53:36 AM	SiCl4 pre valve closed
2/29/2012	8:53:36 AM	SiCl4 post valve closed
2/29/2012	8:53:36 AM	Bypass valve closed
2/29/2012	8:53:36 AM	Bubbler valve closed
2/29/2012	8:53:36 AM	Main Vac valve opened
2/29/2012	8:53:36 AM	Helium MFC set to  0.000000
2/29/2012	8:53:36 AM	H2 MFC set to  0.000000
2/29/2012	8:53:36 AM	BCl3 MFC set to  0.000000
2/29/2012	8:53:36 AM	PH3 MFC set to  0.000000
2/29/2012	8:53:36 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:53:36 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:53:36 AM	Tube furnace set to 0
2/29/2012	8:54:06 AM	H2 valve closed
2/29/2012	8:54:06 AM	BCl3 valve closed
2/29/2012	8:54:06 AM	PH3 valve closed
2/29/2012	8:54:06 AM	SiCl4 pre valve closed
2/29/2012	8:54:06 AM	SiCl4 post valve closed
2/29/2012	8:54:06 AM	Bypass valve closed
2/29/2012	8:54:06 AM	Bubbler valve closed
2/29/2012	8:54:06 AM	Helium valve opened
2/29/2012	8:54:06 AM	Main Vac valve opened
2/29/2012	8:54:06 AM	Helium MFC set to  20.000000
2/29/2012	8:54:06 AM	H2 MFC set to  0.000000
2/29/2012	8:54:06 AM	BCl3 MFC set to  0.000000
2/29/2012	8:54:06 AM	PH3 MFC set to  0.000000
2/29/2012	8:54:06 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:54:06 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:54:07 AM	Tube furnace set to 0
2/29/2012	8:54:37 AM	Helium valve closed
2/29/2012	8:54:37 AM	H2 valve closed
2/29/2012	8:54:37 AM	BCl3 valve closed
2/29/2012	8:54:37 AM	PH3 valve closed
2/29/2012	8:54:37 AM	SiCl4 pre valve closed
2/29/2012	8:54:37 AM	SiCl4 post valve closed
2/29/2012	8:54:37 AM	Bypass valve closed
2/29/2012	8:54:37 AM	Bubbler valve closed
2/29/2012	8:54:37 AM	Main Vac valve opened
2/29/2012	8:54:37 AM	Helium MFC set to  0.000000
2/29/2012	8:54:37 AM	H2 MFC set to  0.000000
2/29/2012	8:54:37 AM	BCl3 MFC set to  0.000000
2/29/2012	8:54:37 AM	PH3 MFC set to  0.000000
2/29/2012	8:54:37 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:54:37 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:54:37 AM	Tube furnace set to 0
2/29/2012	8:55:07 AM	H2 valve closed
2/29/2012	8:55:07 AM	BCl3 valve closed
2/29/2012	8:55:07 AM	PH3 valve closed
2/29/2012	8:55:07 AM	SiCl4 pre valve closed
2/29/2012	8:55:07 AM	SiCl4 post valve closed
2/29/2012	8:55:07 AM	Bypass valve closed
2/29/2012	8:55:07 AM	Bubbler valve closed
2/29/2012	8:55:07 AM	Helium valve opened
2/29/2012	8:55:07 AM	Main Vac valve opened
2/29/2012	8:55:07 AM	Helium MFC set to  20.000000
2/29/2012	8:55:07 AM	H2 MFC set to  0.000000
2/29/2012	8:55:07 AM	BCl3 MFC set to  0.000000
2/29/2012	8:55:07 AM	PH3 MFC set to  0.000000
2/29/2012	8:55:07 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:55:07 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:55:07 AM	Tube furnace set to 0
2/29/2012	8:55:37 AM	Helium valve closed
2/29/2012	8:55:37 AM	H2 valve closed
2/29/2012	8:55:37 AM	BCl3 valve closed
2/29/2012	8:55:37 AM	PH3 valve closed
2/29/2012	8:55:37 AM	SiCl4 pre valve closed
2/29/2012	8:55:37 AM	SiCl4 post valve closed
2/29/2012	8:55:37 AM	Bypass valve closed
2/29/2012	8:55:37 AM	Bubbler valve closed
2/29/2012	8:55:37 AM	Main Vac valve opened
2/29/2012	8:55:37 AM	Helium MFC set to  0.000000
2/29/2012	8:55:37 AM	H2 MFC set to  0.000000
2/29/2012	8:55:37 AM	BCl3 MFC set to  0.000000
2/29/2012	8:55:37 AM	PH3 MFC set to  0.000000
2/29/2012	8:55:37 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:55:37 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:55:37 AM	Tube furnace set to 0
2/29/2012	8:56:07 AM	H2 valve closed
2/29/2012	8:56:07 AM	BCl3 valve closed
2/29/2012	8:56:07 AM	PH3 valve closed
2/29/2012	8:56:07 AM	SiCl4 pre valve closed
2/29/2012	8:56:07 AM	SiCl4 post valve closed
2/29/2012	8:56:07 AM	Bypass valve closed
2/29/2012	8:56:07 AM	Bubbler valve closed
2/29/2012	8:56:07 AM	Helium valve opened
2/29/2012	8:56:07 AM	Main Vac valve opened
2/29/2012	8:56:07 AM	Helium MFC set to  20.000000
2/29/2012	8:56:07 AM	H2 MFC set to  0.000000
2/29/2012	8:56:07 AM	BCl3 MFC set to  0.000000
2/29/2012	8:56:07 AM	PH3 MFC set to  0.000000
2/29/2012	8:56:07 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:56:07 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:56:07 AM	Tube furnace set to 0
2/29/2012	8:56:37 AM	Helium valve closed
2/29/2012	8:56:37 AM	H2 valve closed
2/29/2012	8:56:37 AM	BCl3 valve closed
2/29/2012	8:56:37 AM	PH3 valve closed
2/29/2012	8:56:37 AM	SiCl4 pre valve closed
2/29/2012	8:56:37 AM	SiCl4 post valve closed
2/29/2012	8:56:37 AM	Bypass valve closed
2/29/2012	8:56:37 AM	Bubbler valve closed
2/29/2012	8:56:37 AM	Main Vac valve opened
2/29/2012	8:56:37 AM	Helium MFC set to  0.000000
2/29/2012	8:56:37 AM	H2 MFC set to  0.000000
2/29/2012	8:56:37 AM	BCl3 MFC set to  0.000000
2/29/2012	8:56:37 AM	PH3 MFC set to  0.000000
2/29/2012	8:56:37 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:56:38 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:56:38 AM	Tube furnace set to 0
2/29/2012	8:57:08 AM	H2 valve closed
2/29/2012	8:57:08 AM	BCl3 valve closed
2/29/2012	8:57:08 AM	PH3 valve closed
2/29/2012	8:57:08 AM	SiCl4 pre valve closed
2/29/2012	8:57:08 AM	SiCl4 post valve closed
2/29/2012	8:57:08 AM	Bypass valve closed
2/29/2012	8:57:08 AM	Bubbler valve closed
2/29/2012	8:57:08 AM	Helium valve opened
2/29/2012	8:57:08 AM	Main Vac valve opened
2/29/2012	8:57:08 AM	Helium MFC set to  20.000000
2/29/2012	8:57:08 AM	H2 MFC set to  0.000000
2/29/2012	8:57:08 AM	BCl3 MFC set to  0.000000
2/29/2012	8:57:08 AM	PH3 MFC set to  0.000000
2/29/2012	8:57:08 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:57:08 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:57:08 AM	Tube furnace set to 0
2/29/2012	8:57:38 AM	Helium valve closed
2/29/2012	8:57:38 AM	H2 valve closed
2/29/2012	8:57:38 AM	BCl3 valve closed
2/29/2012	8:57:38 AM	PH3 valve closed
2/29/2012	8:57:38 AM	SiCl4 pre valve closed
2/29/2012	8:57:38 AM	SiCl4 post valve closed
2/29/2012	8:57:38 AM	Bypass valve closed
2/29/2012	8:57:38 AM	Bubbler valve closed
2/29/2012	8:57:38 AM	Main Vac valve opened
2/29/2012	8:57:38 AM	Helium MFC set to  0.000000
2/29/2012	8:57:38 AM	H2 MFC set to  0.000000
2/29/2012	8:57:38 AM	BCl3 MFC set to  0.000000
2/29/2012	8:57:38 AM	PH3 MFC set to  0.000000
2/29/2012	8:57:38 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:57:38 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:57:38 AM	Tube furnace set to 0
2/29/2012	8:58:08 AM	H2 valve closed
2/29/2012	8:58:08 AM	BCl3 valve closed
2/29/2012	8:58:08 AM	PH3 valve closed
2/29/2012	8:58:08 AM	SiCl4 pre valve closed
2/29/2012	8:58:08 AM	SiCl4 post valve closed
2/29/2012	8:58:08 AM	Bypass valve closed
2/29/2012	8:58:08 AM	Bubbler valve closed
2/29/2012	8:58:08 AM	Helium valve opened
2/29/2012	8:58:08 AM	Main Vac valve opened
2/29/2012	8:58:08 AM	Helium MFC set to  20.000000
2/29/2012	8:58:08 AM	H2 MFC set to  0.000000
2/29/2012	8:58:08 AM	BCl3 MFC set to  0.000000
2/29/2012	8:58:08 AM	PH3 MFC set to  0.000000
2/29/2012	8:58:08 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:58:08 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:58:08 AM	Tube furnace set to 0
2/29/2012	8:58:38 AM	Helium valve closed
2/29/2012	8:58:38 AM	H2 valve closed
2/29/2012	8:58:38 AM	BCl3 valve closed
2/29/2012	8:58:38 AM	PH3 valve closed
2/29/2012	8:58:38 AM	SiCl4 pre valve closed
2/29/2012	8:58:38 AM	SiCl4 post valve closed
2/29/2012	8:58:38 AM	Bypass valve closed
2/29/2012	8:58:38 AM	Bubbler valve closed
2/29/2012	8:58:38 AM	Main Vac valve opened
2/29/2012	8:58:38 AM	Helium MFC set to  0.000000
2/29/2012	8:58:38 AM	H2 MFC set to  0.000000
2/29/2012	8:58:38 AM	BCl3 MFC set to  0.000000
2/29/2012	8:58:38 AM	PH3 MFC set to  0.000000
2/29/2012	8:58:38 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:58:38 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:58:38 AM	Tube furnace set to 0
2/29/2012	8:59:08 AM	H2 valve closed
2/29/2012	8:59:08 AM	BCl3 valve closed
2/29/2012	8:59:08 AM	PH3 valve closed
2/29/2012	8:59:08 AM	SiCl4 pre valve closed
2/29/2012	8:59:08 AM	SiCl4 post valve closed
2/29/2012	8:59:08 AM	Bypass valve closed
2/29/2012	8:59:09 AM	Bubbler valve closed
2/29/2012	8:59:09 AM	Helium valve opened
2/29/2012	8:59:09 AM	Main Vac valve opened
2/29/2012	8:59:09 AM	Helium MFC set to  20.000000
2/29/2012	8:59:09 AM	H2 MFC set to  0.000000
2/29/2012	8:59:09 AM	BCl3 MFC set to  0.000000
2/29/2012	8:59:09 AM	PH3 MFC set to  0.000000
2/29/2012	8:59:09 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:59:09 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:59:09 AM	Tube furnace set to 0
2/29/2012	8:59:39 AM	Helium valve closed
2/29/2012	8:59:39 AM	H2 valve closed
2/29/2012	8:59:39 AM	BCl3 valve closed
2/29/2012	8:59:39 AM	PH3 valve closed
2/29/2012	8:59:39 AM	SiCl4 pre valve closed
2/29/2012	8:59:39 AM	SiCl4 post valve closed
2/29/2012	8:59:39 AM	Bypass valve closed
2/29/2012	8:59:39 AM	Bubbler valve closed
2/29/2012	8:59:39 AM	Main Vac valve opened
2/29/2012	8:59:39 AM	Helium MFC set to  0.000000
2/29/2012	8:59:39 AM	H2 MFC set to  0.000000
2/29/2012	8:59:39 AM	BCl3 MFC set to  0.000000
2/29/2012	8:59:39 AM	PH3 MFC set to  0.000000
2/29/2012	8:59:39 AM	SiCl4 MFC set to  0.000000
2/29/2012	8:59:39 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:59:39 AM	Tube furnace set to 0
2/29/2012	8:59:40 AM	Run finished at 8:59 AM
2/29/2012	8:59:40 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/29/2012	9:06:03 AM	Main Vac valve closed
2/29/2012	9:06:19 AM	Main Vac valve opened
2/29/2012	9:07:19 AM	Recipe started at 9:07 AM
2/29/2012	9:07:19 AM	Helium valve closed
2/29/2012	9:07:19 AM	H2 valve closed
2/29/2012	9:07:19 AM	BCl3 valve closed
2/29/2012	9:07:19 AM	PH3 valve closed
2/29/2012	9:07:19 AM	SiCl4 pre valve closed
2/29/2012	9:07:19 AM	SiCl4 post valve closed
2/29/2012	9:07:19 AM	Main Vac valve closed
2/29/2012	9:07:19 AM	Bypass valve closed
2/29/2012	9:07:19 AM	Bubbler valve closed
2/29/2012	9:07:20 AM	Helium MFC set to  0.000000
2/29/2012	9:07:20 AM	H2 MFC set to  0.000000
2/29/2012	9:07:20 AM	BCl3 MFC set to  0.000000
2/29/2012	9:07:20 AM	PH3 MFC set to  0.000000
2/29/2012	9:07:20 AM	SiCl4 MFC set to  0.000000
2/29/2012	9:07:20 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	9:07:20 AM	Tube furnace set to 0
2/29/2012	9:07:23 AM	Helium valve closed
2/29/2012	9:07:23 AM	BCl3 valve closed
2/29/2012	9:07:23 AM	PH3 valve closed
2/29/2012	9:07:23 AM	SiCl4 pre valve closed
2/29/2012	9:07:23 AM	SiCl4 post valve closed
2/29/2012	9:07:23 AM	Main Vac valve closed
2/29/2012	9:07:23 AM	Bypass valve closed
2/29/2012	9:07:23 AM	Bubbler valve closed
2/29/2012	9:07:23 AM	H2 valve opened
2/29/2012	9:07:23 AM	Helium MFC set to  0.000000
2/29/2012	9:07:23 AM	H2 MFC set to  500.000000
2/29/2012	9:07:23 AM	BCl3 MFC set to  0.000000
2/29/2012	9:07:23 AM	PH3 MFC set to  0.000000
2/29/2012	9:07:23 AM	SiCl4 MFC set to  0.000000
2/29/2012	9:07:23 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	9:07:23 AM	Tube furnace set to 0
2/29/2012	9:08:28 AM	Helium valve closed
2/29/2012	9:08:28 AM	BCl3 valve closed
2/29/2012	9:08:28 AM	PH3 valve closed
2/29/2012	9:08:28 AM	SiCl4 pre valve closed
2/29/2012	9:08:28 AM	SiCl4 post valve closed
2/29/2012	9:08:28 AM	Main Vac valve closed
2/29/2012	9:08:28 AM	Bypass valve closed
2/29/2012	9:08:28 AM	H2 valve opened
2/29/2012	9:08:28 AM	Bubbler valve opened
2/29/2012	9:08:28 AM	Helium MFC set to  0.000000
2/29/2012	9:08:28 AM	H2 MFC set to  500.000000
2/29/2012	9:08:28 AM	BCl3 MFC set to  0.000000
2/29/2012	9:08:28 AM	PH3 MFC set to  0.000000
2/29/2012	9:08:28 AM	SiCl4 MFC set to  0.000000
2/29/2012	9:08:28 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	9:08:28 AM	Tube furnace set to 0
2/29/2012	9:08:29 AM	Helium valve closed
2/29/2012	9:08:29 AM	BCl3 valve closed
2/29/2012	9:08:29 AM	PH3 valve closed
2/29/2012	9:08:29 AM	SiCl4 pre valve closed
2/29/2012	9:08:29 AM	SiCl4 post valve closed
2/29/2012	9:08:29 AM	Main Vac valve closed
2/29/2012	9:08:29 AM	Bypass valve closed
2/29/2012	9:08:29 AM	H2 valve opened
2/29/2012	9:08:29 AM	Bubbler valve opened
2/29/2012	9:08:29 AM	Helium MFC set to  0.000000
2/29/2012	9:08:29 AM	H2 MFC set to  500.000000
2/29/2012	9:08:29 AM	BCl3 MFC set to  0.000000
2/29/2012	9:08:29 AM	PH3 MFC set to  0.000000
2/29/2012	9:08:29 AM	SiCl4 MFC set to  0.000000
2/29/2012	9:08:29 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	9:08:29 AM	Tube furnace set to 1000
2/29/2012	9:28:29 AM	Helium valve closed
2/29/2012	9:28:29 AM	BCl3 valve closed
2/29/2012	9:28:29 AM	Main Vac valve closed
2/29/2012	9:28:29 AM	Bypass valve closed
2/29/2012	9:28:29 AM	H2 valve opened
2/29/2012	9:28:29 AM	PH3 valve opened
2/29/2012	9:28:29 AM	SiCl4 pre valve opened
2/29/2012	9:28:29 AM	SiCl4 post valve opened
2/29/2012	9:28:29 AM	Bubbler valve opened
2/29/2012	9:28:29 AM	Helium MFC set to  0.000000
2/29/2012	9:28:29 AM	H2 MFC set to  500.000000
2/29/2012	9:28:29 AM	BCl3 MFC set to  0.000000
2/29/2012	9:28:29 AM	PH3 MFC set to  0.350000
2/29/2012	9:28:29 AM	SiCl4 MFC set to  25.000000
2/29/2012	9:28:29 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	9:28:29 AM	Tube furnace set to 1000
2/29/2012	9:37:29 AM	Helium valve closed
2/29/2012	9:37:29 AM	BCl3 valve closed
2/29/2012	9:37:29 AM	PH3 valve closed
2/29/2012	9:37:29 AM	SiCl4 pre valve closed
2/29/2012	9:37:29 AM	SiCl4 post valve closed
2/29/2012	9:37:29 AM	Main Vac valve closed
2/29/2012	9:37:29 AM	Bypass valve closed
2/29/2012	9:37:29 AM	H2 valve opened
2/29/2012	9:37:29 AM	Bubbler valve opened
2/29/2012	9:37:29 AM	Helium MFC set to  0.000000
2/29/2012	9:37:29 AM	H2 MFC set to  500.000000
2/29/2012	9:37:29 AM	BCl3 MFC set to  0.000000
2/29/2012	9:37:29 AM	PH3 MFC set to  0.000000
2/29/2012	9:37:29 AM	SiCl4 MFC set to  0.000000
2/29/2012	9:37:29 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	9:37:29 AM	Tube furnace set to 750
2/29/2012	9:42:29 AM	H2 valve closed
2/29/2012	9:42:29 AM	BCl3 valve closed
2/29/2012	9:42:29 AM	PH3 valve closed
2/29/2012	9:42:29 AM	SiCl4 pre valve closed
2/29/2012	9:42:29 AM	SiCl4 post valve closed
2/29/2012	9:42:29 AM	Main Vac valve closed
2/29/2012	9:42:29 AM	Bypass valve closed
2/29/2012	9:42:29 AM	Helium valve opened
2/29/2012	9:42:29 AM	Bubbler valve opened
2/29/2012	9:42:29 AM	Helium MFC set to  500.000000
2/29/2012	9:42:29 AM	H2 MFC set to  0.000000
2/29/2012	9:42:29 AM	BCl3 MFC set to  0.000000
2/29/2012	9:42:29 AM	PH3 MFC set to  0.000000
2/29/2012	9:42:29 AM	SiCl4 MFC set to  0.000000
2/29/2012	9:42:29 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	9:42:30 AM	Tube furnace set to 0
2/29/2012	9:54:27 AM	Helium valve closed
2/29/2012	9:54:27 AM	H2 valve closed
2/29/2012	9:54:27 AM	BCl3 valve closed
2/29/2012	9:54:27 AM	PH3 valve closed
2/29/2012	9:54:27 AM	SiCl4 pre valve closed
2/29/2012	9:54:27 AM	SiCl4 post valve closed
2/29/2012	9:54:27 AM	Main Vac valve closed
2/29/2012	9:54:27 AM	Bypass valve closed
2/29/2012	9:54:27 AM	Bubbler valve closed
2/29/2012	9:54:27 AM	Helium MFC set to  0.000000
2/29/2012	9:54:27 AM	H2 MFC set to  0.000000
2/29/2012	9:54:27 AM	BCl3 MFC set to  0.000000
2/29/2012	9:54:27 AM	PH3 MFC set to  0.000000
2/29/2012	9:54:27 AM	SiCl4 MFC set to  0.000000
2/29/2012	9:54:27 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	9:54:27 AM	Tube furnace set to 0
2/29/2012	9:54:28 AM	Run finished at 9:54 AM
2/29/2012	9:57:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/29/2012	9:57:30 AM	Recipe started at 9:57 AM
2/29/2012	9:57:30 AM	Helium valve closed
2/29/2012	9:57:30 AM	H2 valve closed
2/29/2012	9:57:30 AM	BCl3 valve closed
2/29/2012	9:57:30 AM	PH3 valve closed
2/29/2012	9:57:30 AM	SiCl4 pre valve closed
2/29/2012	9:57:30 AM	SiCl4 post valve closed
2/29/2012	9:57:30 AM	Main Vac valve closed
2/29/2012	9:57:30 AM	Bubbler valve closed
2/29/2012	9:57:30 AM	Bypass valve opened
2/29/2012	9:57:30 AM	Helium MFC set to  0.000000
2/29/2012	9:57:30 AM	H2 MFC set to  0.000000
2/29/2012	9:57:30 AM	BCl3 MFC set to  0.000000
2/29/2012	9:57:30 AM	PH3 MFC set to  0.000000
2/29/2012	9:57:30 AM	SiCl4 MFC set to  0.000000
2/29/2012	9:57:30 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	9:57:30 AM	Tube furnace set to 0
2/29/2012	9:58:30 AM	Helium valve closed
2/29/2012	9:58:30 AM	H2 valve closed
2/29/2012	9:58:30 AM	BCl3 valve closed
2/29/2012	9:58:30 AM	PH3 valve closed
2/29/2012	9:58:30 AM	SiCl4 pre valve closed
2/29/2012	9:58:30 AM	SiCl4 post valve closed
2/29/2012	9:58:30 AM	Main Vac valve closed
2/29/2012	9:58:30 AM	Bubbler valve closed
2/29/2012	9:58:30 AM	Bypass valve opened
2/29/2012	9:58:30 AM	Helium MFC set to  0.000000
2/29/2012	9:58:30 AM	H2 MFC set to  0.000000
2/29/2012	9:58:30 AM	BCl3 MFC set to  0.000000
2/29/2012	9:58:30 AM	PH3 MFC set to  0.000000
2/29/2012	9:58:30 AM	SiCl4 MFC set to  0.000000
2/29/2012	9:58:30 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	9:58:30 AM	Tube furnace set to 0
2/29/2012	9:59:30 AM	Helium valve closed
2/29/2012	9:59:30 AM	H2 valve closed
2/29/2012	9:59:30 AM	BCl3 valve closed
2/29/2012	9:59:30 AM	PH3 valve closed
2/29/2012	9:59:30 AM	SiCl4 pre valve closed
2/29/2012	9:59:30 AM	SiCl4 post valve closed
2/29/2012	9:59:30 AM	Bypass valve closed
2/29/2012	9:59:30 AM	Bubbler valve closed
2/29/2012	9:59:30 AM	Main Vac valve opened
2/29/2012	9:59:30 AM	Helium MFC set to  0.000000
2/29/2012	9:59:30 AM	H2 MFC set to  0.000000
2/29/2012	9:59:30 AM	BCl3 MFC set to  0.000000
2/29/2012	9:59:30 AM	PH3 MFC set to  0.000000
2/29/2012	9:59:30 AM	SiCl4 MFC set to  0.000000
2/29/2012	9:59:30 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	9:59:30 AM	Tube furnace set to 0
2/29/2012	9:59:31 AM	Run finished at 9:59 AM
2/29/2012	9:59:31 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/29/2012	10:09:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/29/2012	10:09:39 AM	Recipe started at 10:09 AM
2/29/2012	10:09:39 AM	Helium valve closed
2/29/2012	10:09:39 AM	H2 valve closed
2/29/2012	10:09:39 AM	BCl3 valve closed
2/29/2012	10:09:39 AM	PH3 valve closed
2/29/2012	10:09:39 AM	SiCl4 pre valve closed
2/29/2012	10:09:39 AM	SiCl4 post valve closed
2/29/2012	10:09:39 AM	Main Vac valve closed
2/29/2012	10:09:39 AM	Bubbler valve closed
2/29/2012	10:09:39 AM	Bypass valve opened
2/29/2012	10:09:39 AM	Helium MFC set to  0.000000
2/29/2012	10:09:39 AM	H2 MFC set to  0.000000
2/29/2012	10:09:39 AM	BCl3 MFC set to  0.000000
2/29/2012	10:09:39 AM	PH3 MFC set to  0.000000
2/29/2012	10:09:39 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:09:39 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:09:39 AM	Tube furnace set to 0
2/29/2012	10:09:39 AM	Helium valve closed
2/29/2012	10:09:39 AM	H2 valve closed
2/29/2012	10:09:39 AM	BCl3 valve closed
2/29/2012	10:09:39 AM	PH3 valve closed
2/29/2012	10:09:39 AM	SiCl4 pre valve closed
2/29/2012	10:09:39 AM	SiCl4 post valve closed
2/29/2012	10:09:39 AM	Main Vac valve closed
2/29/2012	10:09:39 AM	Bubbler valve closed
2/29/2012	10:09:39 AM	Bypass valve opened
2/29/2012	10:09:39 AM	Helium MFC set to  0.000000
2/29/2012	10:09:39 AM	H2 MFC set to  0.000000
2/29/2012	10:09:39 AM	BCl3 MFC set to  0.000000
2/29/2012	10:09:39 AM	PH3 MFC set to  0.000000
2/29/2012	10:09:39 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:09:39 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:09:40 AM	Tube furnace set to 0
2/29/2012	10:09:40 AM	Helium valve closed
2/29/2012	10:09:40 AM	H2 valve closed
2/29/2012	10:09:40 AM	BCl3 valve closed
2/29/2012	10:09:40 AM	PH3 valve closed
2/29/2012	10:09:40 AM	SiCl4 pre valve closed
2/29/2012	10:09:40 AM	SiCl4 post valve closed
2/29/2012	10:09:40 AM	Bypass valve closed
2/29/2012	10:09:40 AM	Bubbler valve closed
2/29/2012	10:09:40 AM	Main Vac valve opened
2/29/2012	10:09:40 AM	Helium MFC set to  0.000000
2/29/2012	10:09:40 AM	H2 MFC set to  0.000000
2/29/2012	10:09:40 AM	BCl3 MFC set to  0.000000
2/29/2012	10:09:40 AM	PH3 MFC set to  0.000000
2/29/2012	10:09:40 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:09:40 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:09:40 AM	Tube furnace set to 0
2/29/2012	10:10:10 AM	H2 valve closed
2/29/2012	10:10:10 AM	BCl3 valve closed
2/29/2012	10:10:10 AM	PH3 valve closed
2/29/2012	10:10:10 AM	SiCl4 pre valve closed
2/29/2012	10:10:10 AM	SiCl4 post valve closed
2/29/2012	10:10:10 AM	Bypass valve closed
2/29/2012	10:10:10 AM	Bubbler valve closed
2/29/2012	10:10:10 AM	Helium valve opened
2/29/2012	10:10:10 AM	Main Vac valve opened
2/29/2012	10:10:10 AM	Helium MFC set to  20.000000
2/29/2012	10:10:10 AM	H2 MFC set to  0.000000
2/29/2012	10:10:10 AM	BCl3 MFC set to  0.000000
2/29/2012	10:10:10 AM	PH3 MFC set to  0.000000
2/29/2012	10:10:10 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:10:10 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:10:10 AM	Tube furnace set to 0
2/29/2012	10:10:40 AM	Helium valve closed
2/29/2012	10:10:40 AM	H2 valve closed
2/29/2012	10:10:40 AM	BCl3 valve closed
2/29/2012	10:10:40 AM	PH3 valve closed
2/29/2012	10:10:40 AM	SiCl4 pre valve closed
2/29/2012	10:10:40 AM	SiCl4 post valve closed
2/29/2012	10:10:40 AM	Bypass valve closed
2/29/2012	10:10:40 AM	Bubbler valve closed
2/29/2012	10:10:40 AM	Main Vac valve opened
2/29/2012	10:10:40 AM	Helium MFC set to  0.000000
2/29/2012	10:10:40 AM	H2 MFC set to  0.000000
2/29/2012	10:10:40 AM	BCl3 MFC set to  0.000000
2/29/2012	10:10:40 AM	PH3 MFC set to  0.000000
2/29/2012	10:10:40 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:10:40 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:10:41 AM	Tube furnace set to 0
2/29/2012	10:11:11 AM	H2 valve closed
2/29/2012	10:11:11 AM	BCl3 valve closed
2/29/2012	10:11:11 AM	PH3 valve closed
2/29/2012	10:11:11 AM	SiCl4 pre valve closed
2/29/2012	10:11:11 AM	SiCl4 post valve closed
2/29/2012	10:11:11 AM	Bypass valve closed
2/29/2012	10:11:11 AM	Bubbler valve closed
2/29/2012	10:11:11 AM	Helium valve opened
2/29/2012	10:11:11 AM	Main Vac valve opened
2/29/2012	10:11:11 AM	Helium MFC set to  20.000000
2/29/2012	10:11:11 AM	H2 MFC set to  0.000000
2/29/2012	10:11:11 AM	BCl3 MFC set to  0.000000
2/29/2012	10:11:11 AM	PH3 MFC set to  0.000000
2/29/2012	10:11:11 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:11:11 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:11:11 AM	Tube furnace set to 0
2/29/2012	10:11:41 AM	Helium valve closed
2/29/2012	10:11:41 AM	H2 valve closed
2/29/2012	10:11:41 AM	BCl3 valve closed
2/29/2012	10:11:41 AM	PH3 valve closed
2/29/2012	10:11:41 AM	SiCl4 pre valve closed
2/29/2012	10:11:41 AM	SiCl4 post valve closed
2/29/2012	10:11:41 AM	Bypass valve closed
2/29/2012	10:11:41 AM	Bubbler valve closed
2/29/2012	10:11:41 AM	Main Vac valve opened
2/29/2012	10:11:41 AM	Helium MFC set to  0.000000
2/29/2012	10:11:41 AM	H2 MFC set to  0.000000
2/29/2012	10:11:41 AM	BCl3 MFC set to  0.000000
2/29/2012	10:11:41 AM	PH3 MFC set to  0.000000
2/29/2012	10:11:41 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:11:41 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:11:41 AM	Tube furnace set to 0
2/29/2012	10:12:11 AM	H2 valve closed
2/29/2012	10:12:11 AM	BCl3 valve closed
2/29/2012	10:12:11 AM	PH3 valve closed
2/29/2012	10:12:11 AM	SiCl4 pre valve closed
2/29/2012	10:12:11 AM	SiCl4 post valve closed
2/29/2012	10:12:11 AM	Bypass valve closed
2/29/2012	10:12:11 AM	Bubbler valve closed
2/29/2012	10:12:11 AM	Helium valve opened
2/29/2012	10:12:11 AM	Main Vac valve opened
2/29/2012	10:12:11 AM	Helium MFC set to  20.000000
2/29/2012	10:12:11 AM	H2 MFC set to  0.000000
2/29/2012	10:12:11 AM	BCl3 MFC set to  0.000000
2/29/2012	10:12:11 AM	PH3 MFC set to  0.000000
2/29/2012	10:12:11 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:12:11 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:12:11 AM	Tube furnace set to 0
2/29/2012	10:12:41 AM	Helium valve closed
2/29/2012	10:12:41 AM	H2 valve closed
2/29/2012	10:12:41 AM	BCl3 valve closed
2/29/2012	10:12:41 AM	PH3 valve closed
2/29/2012	10:12:41 AM	SiCl4 pre valve closed
2/29/2012	10:12:41 AM	SiCl4 post valve closed
2/29/2012	10:12:41 AM	Bypass valve closed
2/29/2012	10:12:41 AM	Bubbler valve closed
2/29/2012	10:12:41 AM	Main Vac valve opened
2/29/2012	10:12:41 AM	Helium MFC set to  0.000000
2/29/2012	10:12:41 AM	H2 MFC set to  0.000000
2/29/2012	10:12:41 AM	BCl3 MFC set to  0.000000
2/29/2012	10:12:41 AM	PH3 MFC set to  0.000000
2/29/2012	10:12:41 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:12:41 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:12:41 AM	Tube furnace set to 0
2/29/2012	10:13:11 AM	H2 valve closed
2/29/2012	10:13:11 AM	BCl3 valve closed
2/29/2012	10:13:11 AM	PH3 valve closed
2/29/2012	10:13:11 AM	SiCl4 pre valve closed
2/29/2012	10:13:11 AM	SiCl4 post valve closed
2/29/2012	10:13:11 AM	Bypass valve closed
2/29/2012	10:13:11 AM	Bubbler valve closed
2/29/2012	10:13:11 AM	Helium valve opened
2/29/2012	10:13:11 AM	Main Vac valve opened
2/29/2012	10:13:11 AM	Helium MFC set to  20.000000
2/29/2012	10:13:11 AM	H2 MFC set to  0.000000
2/29/2012	10:13:11 AM	BCl3 MFC set to  0.000000
2/29/2012	10:13:11 AM	PH3 MFC set to  0.000000
2/29/2012	10:13:11 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:13:11 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:13:12 AM	Tube furnace set to 0
2/29/2012	10:13:42 AM	Helium valve closed
2/29/2012	10:13:42 AM	H2 valve closed
2/29/2012	10:13:42 AM	BCl3 valve closed
2/29/2012	10:13:42 AM	PH3 valve closed
2/29/2012	10:13:42 AM	SiCl4 pre valve closed
2/29/2012	10:13:42 AM	SiCl4 post valve closed
2/29/2012	10:13:42 AM	Bypass valve closed
2/29/2012	10:13:42 AM	Bubbler valve closed
2/29/2012	10:13:42 AM	Main Vac valve opened
2/29/2012	10:13:42 AM	Helium MFC set to  0.000000
2/29/2012	10:13:42 AM	H2 MFC set to  0.000000
2/29/2012	10:13:42 AM	BCl3 MFC set to  0.000000
2/29/2012	10:13:42 AM	PH3 MFC set to  0.000000
2/29/2012	10:13:42 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:13:42 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:13:42 AM	Tube furnace set to 0
2/29/2012	10:14:12 AM	H2 valve closed
2/29/2012	10:14:12 AM	BCl3 valve closed
2/29/2012	10:14:12 AM	PH3 valve closed
2/29/2012	10:14:12 AM	SiCl4 pre valve closed
2/29/2012	10:14:12 AM	SiCl4 post valve closed
2/29/2012	10:14:12 AM	Bypass valve closed
2/29/2012	10:14:12 AM	Bubbler valve closed
2/29/2012	10:14:12 AM	Helium valve opened
2/29/2012	10:14:12 AM	Main Vac valve opened
2/29/2012	10:14:12 AM	Helium MFC set to  20.000000
2/29/2012	10:14:12 AM	H2 MFC set to  0.000000
2/29/2012	10:14:12 AM	BCl3 MFC set to  0.000000
2/29/2012	10:14:12 AM	PH3 MFC set to  0.000000
2/29/2012	10:14:12 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:14:12 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:14:12 AM	Tube furnace set to 0
2/29/2012	10:14:42 AM	Helium valve closed
2/29/2012	10:14:42 AM	H2 valve closed
2/29/2012	10:14:42 AM	BCl3 valve closed
2/29/2012	10:14:42 AM	PH3 valve closed
2/29/2012	10:14:42 AM	SiCl4 pre valve closed
2/29/2012	10:14:42 AM	SiCl4 post valve closed
2/29/2012	10:14:42 AM	Bypass valve closed
2/29/2012	10:14:42 AM	Bubbler valve closed
2/29/2012	10:14:42 AM	Main Vac valve opened
2/29/2012	10:14:42 AM	Helium MFC set to  0.000000
2/29/2012	10:14:42 AM	H2 MFC set to  0.000000
2/29/2012	10:14:42 AM	BCl3 MFC set to  0.000000
2/29/2012	10:14:42 AM	PH3 MFC set to  0.000000
2/29/2012	10:14:42 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:14:42 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:14:42 AM	Tube furnace set to 0
2/29/2012	10:15:12 AM	H2 valve closed
2/29/2012	10:15:12 AM	BCl3 valve closed
2/29/2012	10:15:12 AM	PH3 valve closed
2/29/2012	10:15:12 AM	SiCl4 pre valve closed
2/29/2012	10:15:12 AM	SiCl4 post valve closed
2/29/2012	10:15:12 AM	Bypass valve closed
2/29/2012	10:15:12 AM	Bubbler valve closed
2/29/2012	10:15:12 AM	Helium valve opened
2/29/2012	10:15:12 AM	Main Vac valve opened
2/29/2012	10:15:12 AM	Helium MFC set to  20.000000
2/29/2012	10:15:12 AM	H2 MFC set to  0.000000
2/29/2012	10:15:12 AM	BCl3 MFC set to  0.000000
2/29/2012	10:15:12 AM	PH3 MFC set to  0.000000
2/29/2012	10:15:12 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:15:12 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:15:12 AM	Tube furnace set to 0
2/29/2012	10:15:42 AM	Helium valve closed
2/29/2012	10:15:42 AM	H2 valve closed
2/29/2012	10:15:42 AM	BCl3 valve closed
2/29/2012	10:15:42 AM	PH3 valve closed
2/29/2012	10:15:42 AM	SiCl4 pre valve closed
2/29/2012	10:15:42 AM	SiCl4 post valve closed
2/29/2012	10:15:42 AM	Bypass valve closed
2/29/2012	10:15:42 AM	Bubbler valve closed
2/29/2012	10:15:42 AM	Main Vac valve opened
2/29/2012	10:15:42 AM	Helium MFC set to  0.000000
2/29/2012	10:15:42 AM	H2 MFC set to  0.000000
2/29/2012	10:15:42 AM	BCl3 MFC set to  0.000000
2/29/2012	10:15:42 AM	PH3 MFC set to  0.000000
2/29/2012	10:15:42 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:15:42 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:15:43 AM	Tube furnace set to 0
2/29/2012	10:16:13 AM	H2 valve closed
2/29/2012	10:16:13 AM	BCl3 valve closed
2/29/2012	10:16:13 AM	PH3 valve closed
2/29/2012	10:16:13 AM	SiCl4 pre valve closed
2/29/2012	10:16:13 AM	SiCl4 post valve closed
2/29/2012	10:16:13 AM	Bypass valve closed
2/29/2012	10:16:13 AM	Bubbler valve closed
2/29/2012	10:16:13 AM	Helium valve opened
2/29/2012	10:16:13 AM	Main Vac valve opened
2/29/2012	10:16:13 AM	Helium MFC set to  20.000000
2/29/2012	10:16:13 AM	H2 MFC set to  0.000000
2/29/2012	10:16:13 AM	BCl3 MFC set to  0.000000
2/29/2012	10:16:13 AM	PH3 MFC set to  0.000000
2/29/2012	10:16:13 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:16:13 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:16:13 AM	Tube furnace set to 0
2/29/2012	10:16:43 AM	Helium valve closed
2/29/2012	10:16:43 AM	H2 valve closed
2/29/2012	10:16:43 AM	BCl3 valve closed
2/29/2012	10:16:43 AM	PH3 valve closed
2/29/2012	10:16:43 AM	SiCl4 pre valve closed
2/29/2012	10:16:43 AM	SiCl4 post valve closed
2/29/2012	10:16:43 AM	Bypass valve closed
2/29/2012	10:16:43 AM	Bubbler valve closed
2/29/2012	10:16:43 AM	Main Vac valve opened
2/29/2012	10:16:43 AM	Helium MFC set to  0.000000
2/29/2012	10:16:43 AM	H2 MFC set to  0.000000
2/29/2012	10:16:43 AM	BCl3 MFC set to  0.000000
2/29/2012	10:16:43 AM	PH3 MFC set to  0.000000
2/29/2012	10:16:43 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:16:43 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:16:43 AM	Tube furnace set to 0
2/29/2012	10:17:13 AM	H2 valve closed
2/29/2012	10:17:13 AM	BCl3 valve closed
2/29/2012	10:17:13 AM	PH3 valve closed
2/29/2012	10:17:13 AM	SiCl4 pre valve closed
2/29/2012	10:17:13 AM	SiCl4 post valve closed
2/29/2012	10:17:13 AM	Bypass valve closed
2/29/2012	10:17:13 AM	Bubbler valve closed
2/29/2012	10:17:13 AM	Helium valve opened
2/29/2012	10:17:13 AM	Main Vac valve opened
2/29/2012	10:17:13 AM	Helium MFC set to  20.000000
2/29/2012	10:17:13 AM	H2 MFC set to  0.000000
2/29/2012	10:17:13 AM	BCl3 MFC set to  0.000000
2/29/2012	10:17:13 AM	PH3 MFC set to  0.000000
2/29/2012	10:17:13 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:17:13 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:17:13 AM	Tube furnace set to 0
2/29/2012	10:17:43 AM	Helium valve closed
2/29/2012	10:17:43 AM	H2 valve closed
2/29/2012	10:17:43 AM	BCl3 valve closed
2/29/2012	10:17:43 AM	PH3 valve closed
2/29/2012	10:17:43 AM	SiCl4 pre valve closed
2/29/2012	10:17:43 AM	SiCl4 post valve closed
2/29/2012	10:17:43 AM	Bypass valve closed
2/29/2012	10:17:43 AM	Bubbler valve closed
2/29/2012	10:17:43 AM	Main Vac valve opened
2/29/2012	10:17:43 AM	Helium MFC set to  0.000000
2/29/2012	10:17:43 AM	H2 MFC set to  0.000000
2/29/2012	10:17:43 AM	BCl3 MFC set to  0.000000
2/29/2012	10:17:43 AM	PH3 MFC set to  0.000000
2/29/2012	10:17:43 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:17:43 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:17:44 AM	Tube furnace set to 0
2/29/2012	10:18:14 AM	H2 valve closed
2/29/2012	10:18:14 AM	BCl3 valve closed
2/29/2012	10:18:14 AM	PH3 valve closed
2/29/2012	10:18:14 AM	SiCl4 pre valve closed
2/29/2012	10:18:14 AM	SiCl4 post valve closed
2/29/2012	10:18:14 AM	Bypass valve closed
2/29/2012	10:18:14 AM	Bubbler valve closed
2/29/2012	10:18:14 AM	Helium valve opened
2/29/2012	10:18:14 AM	Main Vac valve opened
2/29/2012	10:18:14 AM	Helium MFC set to  20.000000
2/29/2012	10:18:14 AM	H2 MFC set to  0.000000
2/29/2012	10:18:14 AM	BCl3 MFC set to  0.000000
2/29/2012	10:18:14 AM	PH3 MFC set to  0.000000
2/29/2012	10:18:14 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:18:14 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:18:14 AM	Tube furnace set to 0
2/29/2012	10:18:44 AM	Helium valve closed
2/29/2012	10:18:44 AM	H2 valve closed
2/29/2012	10:18:44 AM	BCl3 valve closed
2/29/2012	10:18:44 AM	PH3 valve closed
2/29/2012	10:18:44 AM	SiCl4 pre valve closed
2/29/2012	10:18:44 AM	SiCl4 post valve closed
2/29/2012	10:18:44 AM	Bypass valve closed
2/29/2012	10:18:44 AM	Bubbler valve closed
2/29/2012	10:18:44 AM	Main Vac valve opened
2/29/2012	10:18:44 AM	Helium MFC set to  0.000000
2/29/2012	10:18:44 AM	H2 MFC set to  0.000000
2/29/2012	10:18:44 AM	BCl3 MFC set to  0.000000
2/29/2012	10:18:44 AM	PH3 MFC set to  0.000000
2/29/2012	10:18:44 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:18:44 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:18:44 AM	Tube furnace set to 0
2/29/2012	10:19:14 AM	H2 valve closed
2/29/2012	10:19:14 AM	BCl3 valve closed
2/29/2012	10:19:14 AM	PH3 valve closed
2/29/2012	10:19:14 AM	SiCl4 pre valve closed
2/29/2012	10:19:14 AM	SiCl4 post valve closed
2/29/2012	10:19:14 AM	Bypass valve closed
2/29/2012	10:19:14 AM	Bubbler valve closed
2/29/2012	10:19:14 AM	Helium valve opened
2/29/2012	10:19:14 AM	Main Vac valve opened
2/29/2012	10:19:14 AM	Helium MFC set to  20.000000
2/29/2012	10:19:14 AM	H2 MFC set to  0.000000
2/29/2012	10:19:14 AM	BCl3 MFC set to  0.000000
2/29/2012	10:19:14 AM	PH3 MFC set to  0.000000
2/29/2012	10:19:14 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:19:14 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:19:14 AM	Tube furnace set to 0
2/29/2012	10:19:44 AM	Helium valve closed
2/29/2012	10:19:44 AM	H2 valve closed
2/29/2012	10:19:44 AM	BCl3 valve closed
2/29/2012	10:19:44 AM	PH3 valve closed
2/29/2012	10:19:44 AM	SiCl4 pre valve closed
2/29/2012	10:19:44 AM	SiCl4 post valve closed
2/29/2012	10:19:44 AM	Bypass valve closed
2/29/2012	10:19:44 AM	Bubbler valve closed
2/29/2012	10:19:44 AM	Main Vac valve opened
2/29/2012	10:19:44 AM	Helium MFC set to  0.000000
2/29/2012	10:19:44 AM	H2 MFC set to  0.000000
2/29/2012	10:19:44 AM	BCl3 MFC set to  0.000000
2/29/2012	10:19:44 AM	PH3 MFC set to  0.000000
2/29/2012	10:19:44 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:19:44 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:19:44 AM	Tube furnace set to 0
2/29/2012	10:19:45 AM	Run finished at 10:19 AM
2/29/2012	10:19:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/29/2012	10:21:42 AM	Main Vac valve closed
2/29/2012	10:21:53 AM	Main Vac valve opened
2/29/2012	10:21:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/29/2012	10:22:09 AM	Recipe started at 10:22 AM
2/29/2012	10:22:09 AM	Helium valve closed
2/29/2012	10:22:09 AM	H2 valve closed
2/29/2012	10:22:09 AM	BCl3 valve closed
2/29/2012	10:22:09 AM	PH3 valve closed
2/29/2012	10:22:09 AM	SiCl4 pre valve closed
2/29/2012	10:22:09 AM	SiCl4 post valve closed
2/29/2012	10:22:09 AM	Main Vac valve closed
2/29/2012	10:22:09 AM	Bubbler valve closed
2/29/2012	10:22:09 AM	Bypass valve opened
2/29/2012	10:22:09 AM	Helium MFC set to  0.000000
2/29/2012	10:22:09 AM	H2 MFC set to  0.000000
2/29/2012	10:22:09 AM	BCl3 MFC set to  0.000000
2/29/2012	10:22:09 AM	PH3 MFC set to  0.000000
2/29/2012	10:22:09 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:22:09 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:22:10 AM	Tube furnace set to 0
2/29/2012	10:22:10 AM	Helium valve closed
2/29/2012	10:22:10 AM	H2 valve closed
2/29/2012	10:22:10 AM	BCl3 valve closed
2/29/2012	10:22:10 AM	PH3 valve closed
2/29/2012	10:22:10 AM	SiCl4 pre valve closed
2/29/2012	10:22:10 AM	SiCl4 post valve closed
2/29/2012	10:22:10 AM	Main Vac valve closed
2/29/2012	10:22:10 AM	Bubbler valve closed
2/29/2012	10:22:10 AM	Bypass valve opened
2/29/2012	10:22:10 AM	Helium MFC set to  0.000000
2/29/2012	10:22:10 AM	H2 MFC set to  0.000000
2/29/2012	10:22:10 AM	BCl3 MFC set to  0.000000
2/29/2012	10:22:10 AM	PH3 MFC set to  0.000000
2/29/2012	10:22:10 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:22:10 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:22:10 AM	Tube furnace set to 0
2/29/2012	10:22:10 AM	Helium valve closed
2/29/2012	10:22:10 AM	H2 valve closed
2/29/2012	10:22:10 AM	BCl3 valve closed
2/29/2012	10:22:10 AM	PH3 valve closed
2/29/2012	10:22:10 AM	SiCl4 pre valve closed
2/29/2012	10:22:10 AM	SiCl4 post valve closed
2/29/2012	10:22:10 AM	Bypass valve closed
2/29/2012	10:22:10 AM	Bubbler valve closed
2/29/2012	10:22:10 AM	Main Vac valve opened
2/29/2012	10:22:10 AM	Helium MFC set to  0.000000
2/29/2012	10:22:10 AM	H2 MFC set to  0.000000
2/29/2012	10:22:10 AM	BCl3 MFC set to  0.000000
2/29/2012	10:22:10 AM	PH3 MFC set to  0.000000
2/29/2012	10:22:10 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:22:10 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:22:11 AM	Tube furnace set to 0
2/29/2012	10:22:41 AM	H2 valve closed
2/29/2012	10:22:41 AM	BCl3 valve closed
2/29/2012	10:22:41 AM	PH3 valve closed
2/29/2012	10:22:41 AM	SiCl4 pre valve closed
2/29/2012	10:22:41 AM	SiCl4 post valve closed
2/29/2012	10:22:41 AM	Bypass valve closed
2/29/2012	10:22:41 AM	Bubbler valve closed
2/29/2012	10:22:41 AM	Helium valve opened
2/29/2012	10:22:41 AM	Main Vac valve opened
2/29/2012	10:22:41 AM	Helium MFC set to  20.000000
2/29/2012	10:22:41 AM	H2 MFC set to  0.000000
2/29/2012	10:22:41 AM	BCl3 MFC set to  0.000000
2/29/2012	10:22:41 AM	PH3 MFC set to  0.000000
2/29/2012	10:22:41 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:22:41 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:22:41 AM	Tube furnace set to 0
2/29/2012	10:23:11 AM	Helium valve closed
2/29/2012	10:23:11 AM	H2 valve closed
2/29/2012	10:23:11 AM	BCl3 valve closed
2/29/2012	10:23:11 AM	PH3 valve closed
2/29/2012	10:23:11 AM	SiCl4 pre valve closed
2/29/2012	10:23:11 AM	SiCl4 post valve closed
2/29/2012	10:23:11 AM	Bypass valve closed
2/29/2012	10:23:11 AM	Bubbler valve closed
2/29/2012	10:23:11 AM	Main Vac valve opened
2/29/2012	10:23:11 AM	Helium MFC set to  0.000000
2/29/2012	10:23:11 AM	H2 MFC set to  0.000000
2/29/2012	10:23:11 AM	BCl3 MFC set to  0.000000
2/29/2012	10:23:11 AM	PH3 MFC set to  0.000000
2/29/2012	10:23:11 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:23:11 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:23:11 AM	Tube furnace set to 0
2/29/2012	10:23:41 AM	H2 valve closed
2/29/2012	10:23:41 AM	BCl3 valve closed
2/29/2012	10:23:41 AM	PH3 valve closed
2/29/2012	10:23:41 AM	SiCl4 pre valve closed
2/29/2012	10:23:41 AM	SiCl4 post valve closed
2/29/2012	10:23:41 AM	Bypass valve closed
2/29/2012	10:23:41 AM	Bubbler valve closed
2/29/2012	10:23:41 AM	Helium valve opened
2/29/2012	10:23:41 AM	Main Vac valve opened
2/29/2012	10:23:41 AM	Helium MFC set to  20.000000
2/29/2012	10:23:41 AM	H2 MFC set to  0.000000
2/29/2012	10:23:41 AM	BCl3 MFC set to  0.000000
2/29/2012	10:23:41 AM	PH3 MFC set to  0.000000
2/29/2012	10:23:41 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:23:41 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:23:41 AM	Tube furnace set to 0
2/29/2012	10:24:11 AM	Helium valve closed
2/29/2012	10:24:11 AM	H2 valve closed
2/29/2012	10:24:11 AM	BCl3 valve closed
2/29/2012	10:24:11 AM	PH3 valve closed
2/29/2012	10:24:11 AM	SiCl4 pre valve closed
2/29/2012	10:24:11 AM	SiCl4 post valve closed
2/29/2012	10:24:11 AM	Bypass valve closed
2/29/2012	10:24:11 AM	Bubbler valve closed
2/29/2012	10:24:11 AM	Main Vac valve opened
2/29/2012	10:24:11 AM	Helium MFC set to  0.000000
2/29/2012	10:24:11 AM	H2 MFC set to  0.000000
2/29/2012	10:24:11 AM	BCl3 MFC set to  0.000000
2/29/2012	10:24:11 AM	PH3 MFC set to  0.000000
2/29/2012	10:24:11 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:24:11 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:24:11 AM	Tube furnace set to 0
2/29/2012	10:24:41 AM	H2 valve closed
2/29/2012	10:24:41 AM	BCl3 valve closed
2/29/2012	10:24:41 AM	PH3 valve closed
2/29/2012	10:24:41 AM	SiCl4 pre valve closed
2/29/2012	10:24:41 AM	SiCl4 post valve closed
2/29/2012	10:24:41 AM	Bypass valve closed
2/29/2012	10:24:41 AM	Bubbler valve closed
2/29/2012	10:24:41 AM	Helium valve opened
2/29/2012	10:24:41 AM	Main Vac valve opened
2/29/2012	10:24:41 AM	Helium MFC set to  20.000000
2/29/2012	10:24:41 AM	H2 MFC set to  0.000000
2/29/2012	10:24:41 AM	BCl3 MFC set to  0.000000
2/29/2012	10:24:41 AM	PH3 MFC set to  0.000000
2/29/2012	10:24:41 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:24:41 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:24:42 AM	Tube furnace set to 0
2/29/2012	10:25:12 AM	Helium valve closed
2/29/2012	10:25:12 AM	H2 valve closed
2/29/2012	10:25:12 AM	BCl3 valve closed
2/29/2012	10:25:12 AM	PH3 valve closed
2/29/2012	10:25:12 AM	SiCl4 pre valve closed
2/29/2012	10:25:12 AM	SiCl4 post valve closed
2/29/2012	10:25:12 AM	Bypass valve closed
2/29/2012	10:25:12 AM	Bubbler valve closed
2/29/2012	10:25:12 AM	Main Vac valve opened
2/29/2012	10:25:12 AM	Helium MFC set to  0.000000
2/29/2012	10:25:12 AM	H2 MFC set to  0.000000
2/29/2012	10:25:12 AM	BCl3 MFC set to  0.000000
2/29/2012	10:25:12 AM	PH3 MFC set to  0.000000
2/29/2012	10:25:12 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:25:12 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:25:12 AM	Tube furnace set to 0
2/29/2012	10:25:42 AM	H2 valve closed
2/29/2012	10:25:42 AM	BCl3 valve closed
2/29/2012	10:25:42 AM	PH3 valve closed
2/29/2012	10:25:42 AM	SiCl4 pre valve closed
2/29/2012	10:25:42 AM	SiCl4 post valve closed
2/29/2012	10:25:42 AM	Bypass valve closed
2/29/2012	10:25:42 AM	Bubbler valve closed
2/29/2012	10:25:42 AM	Helium valve opened
2/29/2012	10:25:42 AM	Main Vac valve opened
2/29/2012	10:25:42 AM	Helium MFC set to  20.000000
2/29/2012	10:25:42 AM	H2 MFC set to  0.000000
2/29/2012	10:25:42 AM	BCl3 MFC set to  0.000000
2/29/2012	10:25:42 AM	PH3 MFC set to  0.000000
2/29/2012	10:25:42 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:25:42 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:25:42 AM	Tube furnace set to 0
2/29/2012	10:26:12 AM	Helium valve closed
2/29/2012	10:26:12 AM	H2 valve closed
2/29/2012	10:26:12 AM	BCl3 valve closed
2/29/2012	10:26:12 AM	PH3 valve closed
2/29/2012	10:26:12 AM	SiCl4 pre valve closed
2/29/2012	10:26:12 AM	SiCl4 post valve closed
2/29/2012	10:26:12 AM	Bypass valve closed
2/29/2012	10:26:12 AM	Bubbler valve closed
2/29/2012	10:26:12 AM	Main Vac valve opened
2/29/2012	10:26:12 AM	Helium MFC set to  0.000000
2/29/2012	10:26:12 AM	H2 MFC set to  0.000000
2/29/2012	10:26:12 AM	BCl3 MFC set to  0.000000
2/29/2012	10:26:12 AM	PH3 MFC set to  0.000000
2/29/2012	10:26:12 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:26:12 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:26:12 AM	Tube furnace set to 0
2/29/2012	10:26:42 AM	H2 valve closed
2/29/2012	10:26:42 AM	BCl3 valve closed
2/29/2012	10:26:42 AM	PH3 valve closed
2/29/2012	10:26:42 AM	SiCl4 pre valve closed
2/29/2012	10:26:42 AM	SiCl4 post valve closed
2/29/2012	10:26:42 AM	Bypass valve closed
2/29/2012	10:26:42 AM	Bubbler valve closed
2/29/2012	10:26:42 AM	Helium valve opened
2/29/2012	10:26:42 AM	Main Vac valve opened
2/29/2012	10:26:42 AM	Helium MFC set to  20.000000
2/29/2012	10:26:42 AM	H2 MFC set to  0.000000
2/29/2012	10:26:42 AM	BCl3 MFC set to  0.000000
2/29/2012	10:26:42 AM	PH3 MFC set to  0.000000
2/29/2012	10:26:42 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:26:42 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:26:42 AM	Tube furnace set to 0
2/29/2012	10:27:12 AM	Helium valve closed
2/29/2012	10:27:12 AM	H2 valve closed
2/29/2012	10:27:12 AM	BCl3 valve closed
2/29/2012	10:27:12 AM	PH3 valve closed
2/29/2012	10:27:12 AM	SiCl4 pre valve closed
2/29/2012	10:27:12 AM	SiCl4 post valve closed
2/29/2012	10:27:12 AM	Bypass valve closed
2/29/2012	10:27:12 AM	Bubbler valve closed
2/29/2012	10:27:12 AM	Main Vac valve opened
2/29/2012	10:27:12 AM	Helium MFC set to  0.000000
2/29/2012	10:27:12 AM	H2 MFC set to  0.000000
2/29/2012	10:27:12 AM	BCl3 MFC set to  0.000000
2/29/2012	10:27:12 AM	PH3 MFC set to  0.000000
2/29/2012	10:27:12 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:27:12 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:27:13 AM	Tube furnace set to 0
2/29/2012	10:27:43 AM	H2 valve closed
2/29/2012	10:27:43 AM	BCl3 valve closed
2/29/2012	10:27:43 AM	PH3 valve closed
2/29/2012	10:27:43 AM	SiCl4 pre valve closed
2/29/2012	10:27:43 AM	SiCl4 post valve closed
2/29/2012	10:27:43 AM	Bypass valve closed
2/29/2012	10:27:43 AM	Bubbler valve closed
2/29/2012	10:27:43 AM	Helium valve opened
2/29/2012	10:27:43 AM	Main Vac valve opened
2/29/2012	10:27:43 AM	Helium MFC set to  20.000000
2/29/2012	10:27:43 AM	H2 MFC set to  0.000000
2/29/2012	10:27:43 AM	BCl3 MFC set to  0.000000
2/29/2012	10:27:43 AM	PH3 MFC set to  0.000000
2/29/2012	10:27:43 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:27:43 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:27:43 AM	Tube furnace set to 0
2/29/2012	10:28:13 AM	Helium valve closed
2/29/2012	10:28:13 AM	H2 valve closed
2/29/2012	10:28:13 AM	BCl3 valve closed
2/29/2012	10:28:13 AM	PH3 valve closed
2/29/2012	10:28:13 AM	SiCl4 pre valve closed
2/29/2012	10:28:13 AM	SiCl4 post valve closed
2/29/2012	10:28:13 AM	Bypass valve closed
2/29/2012	10:28:13 AM	Bubbler valve closed
2/29/2012	10:28:13 AM	Main Vac valve opened
2/29/2012	10:28:13 AM	Helium MFC set to  0.000000
2/29/2012	10:28:13 AM	H2 MFC set to  0.000000
2/29/2012	10:28:13 AM	BCl3 MFC set to  0.000000
2/29/2012	10:28:13 AM	PH3 MFC set to  0.000000
2/29/2012	10:28:13 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:28:13 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:28:13 AM	Tube furnace set to 0
2/29/2012	10:28:43 AM	H2 valve closed
2/29/2012	10:28:43 AM	BCl3 valve closed
2/29/2012	10:28:43 AM	PH3 valve closed
2/29/2012	10:28:43 AM	SiCl4 pre valve closed
2/29/2012	10:28:43 AM	SiCl4 post valve closed
2/29/2012	10:28:43 AM	Bypass valve closed
2/29/2012	10:28:43 AM	Bubbler valve closed
2/29/2012	10:28:43 AM	Helium valve opened
2/29/2012	10:28:43 AM	Main Vac valve opened
2/29/2012	10:28:43 AM	Helium MFC set to  20.000000
2/29/2012	10:28:43 AM	H2 MFC set to  0.000000
2/29/2012	10:28:43 AM	BCl3 MFC set to  0.000000
2/29/2012	10:28:43 AM	PH3 MFC set to  0.000000
2/29/2012	10:28:43 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:28:43 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:28:43 AM	Tube furnace set to 0
2/29/2012	10:29:13 AM	Helium valve closed
2/29/2012	10:29:13 AM	H2 valve closed
2/29/2012	10:29:13 AM	BCl3 valve closed
2/29/2012	10:29:13 AM	PH3 valve closed
2/29/2012	10:29:13 AM	SiCl4 pre valve closed
2/29/2012	10:29:13 AM	SiCl4 post valve closed
2/29/2012	10:29:13 AM	Bypass valve closed
2/29/2012	10:29:13 AM	Bubbler valve closed
2/29/2012	10:29:13 AM	Main Vac valve opened
2/29/2012	10:29:13 AM	Helium MFC set to  0.000000
2/29/2012	10:29:13 AM	H2 MFC set to  0.000000
2/29/2012	10:29:13 AM	BCl3 MFC set to  0.000000
2/29/2012	10:29:13 AM	PH3 MFC set to  0.000000
2/29/2012	10:29:13 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:29:13 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:29:13 AM	Tube furnace set to 0
2/29/2012	10:29:43 AM	H2 valve closed
2/29/2012	10:29:44 AM	BCl3 valve closed
2/29/2012	10:29:44 AM	PH3 valve closed
2/29/2012	10:29:44 AM	SiCl4 pre valve closed
2/29/2012	10:29:44 AM	SiCl4 post valve closed
2/29/2012	10:29:44 AM	Bypass valve closed
2/29/2012	10:29:44 AM	Bubbler valve closed
2/29/2012	10:29:44 AM	Helium valve opened
2/29/2012	10:29:44 AM	Main Vac valve opened
2/29/2012	10:29:44 AM	Helium MFC set to  20.000000
2/29/2012	10:29:44 AM	H2 MFC set to  0.000000
2/29/2012	10:29:44 AM	BCl3 MFC set to  0.000000
2/29/2012	10:29:44 AM	PH3 MFC set to  0.000000
2/29/2012	10:29:44 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:29:44 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:29:44 AM	Tube furnace set to 0
2/29/2012	10:30:14 AM	Helium valve closed
2/29/2012	10:30:14 AM	H2 valve closed
2/29/2012	10:30:14 AM	BCl3 valve closed
2/29/2012	10:30:14 AM	PH3 valve closed
2/29/2012	10:30:14 AM	SiCl4 pre valve closed
2/29/2012	10:30:14 AM	SiCl4 post valve closed
2/29/2012	10:30:14 AM	Bypass valve closed
2/29/2012	10:30:14 AM	Bubbler valve closed
2/29/2012	10:30:14 AM	Main Vac valve opened
2/29/2012	10:30:14 AM	Helium MFC set to  0.000000
2/29/2012	10:30:14 AM	H2 MFC set to  0.000000
2/29/2012	10:30:14 AM	BCl3 MFC set to  0.000000
2/29/2012	10:30:14 AM	PH3 MFC set to  0.000000
2/29/2012	10:30:14 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:30:14 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:30:14 AM	Tube furnace set to 0
2/29/2012	10:30:44 AM	H2 valve closed
2/29/2012	10:30:44 AM	BCl3 valve closed
2/29/2012	10:30:44 AM	PH3 valve closed
2/29/2012	10:30:44 AM	SiCl4 pre valve closed
2/29/2012	10:30:44 AM	SiCl4 post valve closed
2/29/2012	10:30:44 AM	Bypass valve closed
2/29/2012	10:30:44 AM	Bubbler valve closed
2/29/2012	10:30:44 AM	Helium valve opened
2/29/2012	10:30:44 AM	Main Vac valve opened
2/29/2012	10:30:44 AM	Helium MFC set to  20.000000
2/29/2012	10:30:44 AM	H2 MFC set to  0.000000
2/29/2012	10:30:44 AM	BCl3 MFC set to  0.000000
2/29/2012	10:30:44 AM	PH3 MFC set to  0.000000
2/29/2012	10:30:44 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:30:44 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:30:44 AM	Tube furnace set to 0
2/29/2012	10:31:14 AM	Helium valve closed
2/29/2012	10:31:14 AM	H2 valve closed
2/29/2012	10:31:14 AM	BCl3 valve closed
2/29/2012	10:31:14 AM	PH3 valve closed
2/29/2012	10:31:14 AM	SiCl4 pre valve closed
2/29/2012	10:31:14 AM	SiCl4 post valve closed
2/29/2012	10:31:14 AM	Bypass valve closed
2/29/2012	10:31:14 AM	Bubbler valve closed
2/29/2012	10:31:14 AM	Main Vac valve opened
2/29/2012	10:31:14 AM	Helium MFC set to  0.000000
2/29/2012	10:31:14 AM	H2 MFC set to  0.000000
2/29/2012	10:31:14 AM	BCl3 MFC set to  0.000000
2/29/2012	10:31:14 AM	PH3 MFC set to  0.000000
2/29/2012	10:31:14 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:31:14 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:31:14 AM	Tube furnace set to 0
2/29/2012	10:31:44 AM	H2 valve closed
2/29/2012	10:31:44 AM	BCl3 valve closed
2/29/2012	10:31:44 AM	PH3 valve closed
2/29/2012	10:31:44 AM	SiCl4 pre valve closed
2/29/2012	10:31:44 AM	SiCl4 post valve closed
2/29/2012	10:31:44 AM	Bypass valve closed
2/29/2012	10:31:44 AM	Bubbler valve closed
2/29/2012	10:31:44 AM	Helium valve opened
2/29/2012	10:31:44 AM	Main Vac valve opened
2/29/2012	10:31:44 AM	Helium MFC set to  20.000000
2/29/2012	10:31:44 AM	H2 MFC set to  0.000000
2/29/2012	10:31:44 AM	BCl3 MFC set to  0.000000
2/29/2012	10:31:44 AM	PH3 MFC set to  0.000000
2/29/2012	10:31:44 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:31:44 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:31:45 AM	Tube furnace set to 0
2/29/2012	10:32:15 AM	Helium valve closed
2/29/2012	10:32:15 AM	H2 valve closed
2/29/2012	10:32:15 AM	BCl3 valve closed
2/29/2012	10:32:15 AM	PH3 valve closed
2/29/2012	10:32:15 AM	SiCl4 pre valve closed
2/29/2012	10:32:15 AM	SiCl4 post valve closed
2/29/2012	10:32:15 AM	Bypass valve closed
2/29/2012	10:32:15 AM	Bubbler valve closed
2/29/2012	10:32:15 AM	Main Vac valve opened
2/29/2012	10:32:15 AM	Helium MFC set to  0.000000
2/29/2012	10:32:15 AM	H2 MFC set to  0.000000
2/29/2012	10:32:15 AM	BCl3 MFC set to  0.000000
2/29/2012	10:32:15 AM	PH3 MFC set to  0.000000
2/29/2012	10:32:15 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:32:15 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:32:15 AM	Tube furnace set to 0
2/29/2012	10:32:16 AM	Run finished at 10:32 AM
2/29/2012	10:32:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/29/2012	10:42:07 AM	Main Vac valve closed
2/29/2012	10:42:26 AM	Main Vac valve opened
2/29/2012	10:43:36 AM	Recipe started at 10:43 AM
2/29/2012	10:43:36 AM	Helium valve closed
2/29/2012	10:43:36 AM	H2 valve closed
2/29/2012	10:43:36 AM	BCl3 valve closed
2/29/2012	10:43:36 AM	PH3 valve closed
2/29/2012	10:43:36 AM	SiCl4 pre valve closed
2/29/2012	10:43:36 AM	SiCl4 post valve closed
2/29/2012	10:43:36 AM	Main Vac valve closed
2/29/2012	10:43:36 AM	Bypass valve closed
2/29/2012	10:43:36 AM	Bubbler valve closed
2/29/2012	10:43:36 AM	Helium MFC set to  0.000000
2/29/2012	10:43:36 AM	H2 MFC set to  0.000000
2/29/2012	10:43:36 AM	BCl3 MFC set to  0.000000
2/29/2012	10:43:36 AM	PH3 MFC set to  0.000000
2/29/2012	10:43:36 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:43:36 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:43:37 AM	Tube furnace set to 0
2/29/2012	10:43:40 AM	Helium valve closed
2/29/2012	10:43:40 AM	BCl3 valve closed
2/29/2012	10:43:40 AM	PH3 valve closed
2/29/2012	10:43:40 AM	SiCl4 pre valve closed
2/29/2012	10:43:40 AM	SiCl4 post valve closed
2/29/2012	10:43:40 AM	Main Vac valve closed
2/29/2012	10:43:40 AM	Bypass valve closed
2/29/2012	10:43:40 AM	Bubbler valve closed
2/29/2012	10:43:40 AM	H2 valve opened
2/29/2012	10:43:40 AM	Helium MFC set to  0.000000
2/29/2012	10:43:40 AM	H2 MFC set to  500.000000
2/29/2012	10:43:40 AM	BCl3 MFC set to  0.000000
2/29/2012	10:43:40 AM	PH3 MFC set to  0.000000
2/29/2012	10:43:40 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:43:40 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:43:40 AM	Tube furnace set to 0
2/29/2012	10:44:44 AM	Helium valve closed
2/29/2012	10:44:44 AM	BCl3 valve closed
2/29/2012	10:44:44 AM	PH3 valve closed
2/29/2012	10:44:44 AM	SiCl4 pre valve closed
2/29/2012	10:44:44 AM	SiCl4 post valve closed
2/29/2012	10:44:44 AM	Main Vac valve closed
2/29/2012	10:44:44 AM	Bypass valve closed
2/29/2012	10:44:44 AM	H2 valve opened
2/29/2012	10:44:44 AM	Bubbler valve opened
2/29/2012	10:44:44 AM	Helium MFC set to  0.000000
2/29/2012	10:44:44 AM	H2 MFC set to  500.000000
2/29/2012	10:44:44 AM	BCl3 MFC set to  0.000000
2/29/2012	10:44:44 AM	PH3 MFC set to  0.000000
2/29/2012	10:44:44 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:44:44 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:44:44 AM	Tube furnace set to 0
2/29/2012	10:44:45 AM	Helium valve closed
2/29/2012	10:44:45 AM	BCl3 valve closed
2/29/2012	10:44:45 AM	PH3 valve closed
2/29/2012	10:44:45 AM	SiCl4 pre valve closed
2/29/2012	10:44:45 AM	SiCl4 post valve closed
2/29/2012	10:44:45 AM	Main Vac valve closed
2/29/2012	10:44:45 AM	Bypass valve closed
2/29/2012	10:44:45 AM	H2 valve opened
2/29/2012	10:44:45 AM	Bubbler valve opened
2/29/2012	10:44:45 AM	Helium MFC set to  0.000000
2/29/2012	10:44:45 AM	H2 MFC set to  500.000000
2/29/2012	10:44:45 AM	BCl3 MFC set to  0.000000
2/29/2012	10:44:45 AM	PH3 MFC set to  0.000000
2/29/2012	10:44:45 AM	SiCl4 MFC set to  0.000000
2/29/2012	10:44:45 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	10:44:45 AM	Tube furnace set to 1000
2/29/2012	11:09:45 AM	Helium valve closed
2/29/2012	11:09:45 AM	BCl3 valve closed
2/29/2012	11:09:45 AM	Main Vac valve closed
2/29/2012	11:09:45 AM	Bypass valve closed
2/29/2012	11:09:45 AM	H2 valve opened
2/29/2012	11:09:45 AM	PH3 valve opened
2/29/2012	11:09:45 AM	SiCl4 pre valve opened
2/29/2012	11:09:45 AM	SiCl4 post valve opened
2/29/2012	11:09:45 AM	Bubbler valve opened
2/29/2012	11:09:45 AM	Helium MFC set to  0.000000
2/29/2012	11:09:46 AM	H2 MFC set to  500.000000
2/29/2012	11:09:46 AM	BCl3 MFC set to  0.000000
2/29/2012	11:09:46 AM	PH3 MFC set to  0.350000
2/29/2012	11:09:46 AM	SiCl4 MFC set to  25.000000
2/29/2012	11:09:46 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	11:09:46 AM	Tube furnace set to 1000
2/29/2012	11:18:46 AM	Helium valve closed
2/29/2012	11:18:46 AM	BCl3 valve closed
2/29/2012	11:18:46 AM	PH3 valve closed
2/29/2012	11:18:46 AM	SiCl4 pre valve closed
2/29/2012	11:18:46 AM	SiCl4 post valve closed
2/29/2012	11:18:46 AM	Main Vac valve closed
2/29/2012	11:18:46 AM	Bypass valve closed
2/29/2012	11:18:46 AM	H2 valve opened
2/29/2012	11:18:46 AM	Bubbler valve opened
2/29/2012	11:18:46 AM	Helium MFC set to  0.000000
2/29/2012	11:18:46 AM	H2 MFC set to  500.000000
2/29/2012	11:18:46 AM	BCl3 MFC set to  0.000000
2/29/2012	11:18:46 AM	PH3 MFC set to  0.000000
2/29/2012	11:18:46 AM	SiCl4 MFC set to  0.000000
2/29/2012	11:18:46 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	11:18:46 AM	Tube furnace set to 750
2/29/2012	11:23:46 AM	H2 valve closed
2/29/2012	11:23:46 AM	BCl3 valve closed
2/29/2012	11:23:46 AM	PH3 valve closed
2/29/2012	11:23:46 AM	SiCl4 pre valve closed
2/29/2012	11:23:46 AM	SiCl4 post valve closed
2/29/2012	11:23:46 AM	Main Vac valve closed
2/29/2012	11:23:46 AM	Bypass valve closed
2/29/2012	11:23:46 AM	Helium valve opened
2/29/2012	11:23:46 AM	Bubbler valve opened
2/29/2012	11:23:46 AM	Helium MFC set to  500.000000
2/29/2012	11:23:46 AM	H2 MFC set to  0.000000
2/29/2012	11:23:46 AM	BCl3 MFC set to  0.000000
2/29/2012	11:23:46 AM	PH3 MFC set to  0.000000
2/29/2012	11:23:46 AM	SiCl4 MFC set to  0.000000
2/29/2012	11:23:46 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	11:23:46 AM	Tube furnace set to 0
2/29/2012	11:36:24 AM	Helium valve closed
2/29/2012	11:36:24 AM	H2 valve closed
2/29/2012	11:36:24 AM	BCl3 valve closed
2/29/2012	11:36:24 AM	PH3 valve closed
2/29/2012	11:36:24 AM	SiCl4 pre valve closed
2/29/2012	11:36:24 AM	SiCl4 post valve closed
2/29/2012	11:36:24 AM	Main Vac valve closed
2/29/2012	11:36:24 AM	Bypass valve closed
2/29/2012	11:36:24 AM	Bubbler valve closed
2/29/2012	11:36:24 AM	Helium MFC set to  0.000000
2/29/2012	11:36:24 AM	H2 MFC set to  0.000000
2/29/2012	11:36:24 AM	BCl3 MFC set to  0.000000
2/29/2012	11:36:24 AM	PH3 MFC set to  0.000000
2/29/2012	11:36:24 AM	SiCl4 MFC set to  0.000000
2/29/2012	11:36:24 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	11:36:24 AM	Tube furnace set to 0
2/29/2012	11:36:25 AM	Run finished at 11:36 AM
2/29/2012	11:41:04 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/29/2012	11:41:05 AM	Recipe started at 11:41 AM
2/29/2012	11:41:05 AM	Helium valve closed
2/29/2012	11:41:05 AM	H2 valve closed
2/29/2012	11:41:05 AM	BCl3 valve closed
2/29/2012	11:41:05 AM	PH3 valve closed
2/29/2012	11:41:05 AM	SiCl4 pre valve closed
2/29/2012	11:41:05 AM	SiCl4 post valve closed
2/29/2012	11:41:05 AM	Main Vac valve closed
2/29/2012	11:41:05 AM	Bubbler valve closed
2/29/2012	11:41:05 AM	Bypass valve opened
2/29/2012	11:41:05 AM	Helium MFC set to  0.000000
2/29/2012	11:41:05 AM	H2 MFC set to  0.000000
2/29/2012	11:41:05 AM	BCl3 MFC set to  0.000000
2/29/2012	11:41:05 AM	PH3 MFC set to  0.000000
2/29/2012	11:41:05 AM	SiCl4 MFC set to  0.000000
2/29/2012	11:41:05 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	11:41:05 AM	Tube furnace set to 0
2/29/2012	11:42:06 AM	Helium valve closed
2/29/2012	11:42:06 AM	H2 valve closed
2/29/2012	11:42:06 AM	BCl3 valve closed
2/29/2012	11:42:06 AM	PH3 valve closed
2/29/2012	11:42:06 AM	SiCl4 pre valve closed
2/29/2012	11:42:06 AM	SiCl4 post valve closed
2/29/2012	11:42:06 AM	Main Vac valve closed
2/29/2012	11:42:06 AM	Bubbler valve closed
2/29/2012	11:42:06 AM	Bypass valve opened
2/29/2012	11:42:06 AM	Helium MFC set to  0.000000
2/29/2012	11:42:06 AM	H2 MFC set to  0.000000
2/29/2012	11:42:06 AM	BCl3 MFC set to  0.000000
2/29/2012	11:42:06 AM	PH3 MFC set to  0.000000
2/29/2012	11:42:06 AM	SiCl4 MFC set to  0.000000
2/29/2012	11:42:06 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	11:42:06 AM	Tube furnace set to 0
2/29/2012	11:43:06 AM	Helium valve closed
2/29/2012	11:43:06 AM	H2 valve closed
2/29/2012	11:43:06 AM	BCl3 valve closed
2/29/2012	11:43:06 AM	PH3 valve closed
2/29/2012	11:43:06 AM	SiCl4 pre valve closed
2/29/2012	11:43:06 AM	SiCl4 post valve closed
2/29/2012	11:43:06 AM	Bypass valve closed
2/29/2012	11:43:06 AM	Bubbler valve closed
2/29/2012	11:43:06 AM	Main Vac valve opened
2/29/2012	11:43:06 AM	Helium MFC set to  0.000000
2/29/2012	11:43:06 AM	H2 MFC set to  0.000000
2/29/2012	11:43:06 AM	BCl3 MFC set to  0.000000
2/29/2012	11:43:06 AM	PH3 MFC set to  0.000000
2/29/2012	11:43:06 AM	SiCl4 MFC set to  0.000000
2/29/2012	11:43:06 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	11:43:06 AM	Tube furnace set to 0
2/29/2012	11:43:07 AM	Run finished at 11:43 AM
2/29/2012	11:43:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/29/2012	11:46:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/29/2012	11:46:54 AM	Recipe started at 11:46 AM
2/29/2012	11:46:54 AM	Helium valve closed
2/29/2012	11:46:54 AM	H2 valve closed
2/29/2012	11:46:54 AM	BCl3 valve closed
2/29/2012	11:46:54 AM	PH3 valve closed
2/29/2012	11:46:54 AM	SiCl4 pre valve closed
2/29/2012	11:46:54 AM	SiCl4 post valve closed
2/29/2012	11:46:54 AM	Main Vac valve closed
2/29/2012	11:46:54 AM	Bubbler valve closed
2/29/2012	11:46:54 AM	Bypass valve opened
2/29/2012	11:46:54 AM	Helium MFC set to  0.000000
2/29/2012	11:46:54 AM	H2 MFC set to  0.000000
2/29/2012	11:46:54 AM	BCl3 MFC set to  0.000000
2/29/2012	11:46:54 AM	PH3 MFC set to  0.000000
2/29/2012	11:46:54 AM	SiCl4 MFC set to  0.000000
2/29/2012	11:46:54 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	11:46:54 AM	Tube furnace set to 0
2/29/2012	11:46:54 AM	Helium valve closed
2/29/2012	11:46:54 AM	H2 valve closed
2/29/2012	11:46:54 AM	BCl3 valve closed
2/29/2012	11:46:54 AM	PH3 valve closed
2/29/2012	11:46:54 AM	SiCl4 pre valve closed
2/29/2012	11:46:54 AM	SiCl4 post valve closed
2/29/2012	11:46:54 AM	Main Vac valve closed
2/29/2012	11:46:54 AM	Bubbler valve closed
2/29/2012	11:46:54 AM	Bypass valve opened
2/29/2012	11:46:54 AM	Helium MFC set to  0.000000
2/29/2012	11:46:54 AM	H2 MFC set to  0.000000
2/29/2012	11:46:54 AM	BCl3 MFC set to  0.000000
2/29/2012	11:46:54 AM	PH3 MFC set to  0.000000
2/29/2012	11:46:54 AM	SiCl4 MFC set to  0.000000
2/29/2012	11:46:54 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	11:46:55 AM	Tube furnace set to 0
2/29/2012	11:46:55 AM	Helium valve closed
2/29/2012	11:46:55 AM	H2 valve closed
2/29/2012	11:46:55 AM	BCl3 valve closed
2/29/2012	11:46:55 AM	PH3 valve closed
2/29/2012	11:46:55 AM	SiCl4 pre valve closed
2/29/2012	11:46:55 AM	SiCl4 post valve closed
2/29/2012	11:46:55 AM	Bypass valve closed
2/29/2012	11:46:55 AM	Bubbler valve closed
2/29/2012	11:46:55 AM	Main Vac valve opened
2/29/2012	11:46:55 AM	Helium MFC set to  0.000000
2/29/2012	11:46:55 AM	H2 MFC set to  0.000000
2/29/2012	11:46:55 AM	BCl3 MFC set to  0.000000
2/29/2012	11:46:55 AM	PH3 MFC set to  0.000000
2/29/2012	11:46:55 AM	SiCl4 MFC set to  0.000000
2/29/2012	11:46:55 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	11:46:55 AM	Tube furnace set to 0
2/29/2012	11:47:25 AM	H2 valve closed
2/29/2012	11:47:25 AM	BCl3 valve closed
2/29/2012	11:47:25 AM	PH3 valve closed
2/29/2012	11:47:25 AM	SiCl4 pre valve closed
2/29/2012	11:47:25 AM	SiCl4 post valve closed
2/29/2012	11:47:25 AM	Bypass valve closed
2/29/2012	11:47:25 AM	Bubbler valve closed
2/29/2012	11:47:25 AM	Helium valve opened
2/29/2012	11:47:25 AM	Main Vac valve opened
2/29/2012	11:47:25 AM	Helium MFC set to  20.000000
2/29/2012	11:47:25 AM	H2 MFC set to  0.000000
2/29/2012	11:47:25 AM	BCl3 MFC set to  0.000000
2/29/2012	11:47:25 AM	PH3 MFC set to  0.000000
2/29/2012	11:47:25 AM	SiCl4 MFC set to  0.000000
2/29/2012	11:47:25 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	11:47:26 AM	Tube furnace set to 0
2/29/2012	11:47:56 AM	Helium valve closed
2/29/2012	11:47:56 AM	H2 valve closed
2/29/2012	11:47:56 AM	BCl3 valve closed
2/29/2012	11:47:56 AM	PH3 valve closed
2/29/2012	11:47:56 AM	SiCl4 pre valve closed
2/29/2012	11:47:56 AM	SiCl4 post valve closed
2/29/2012	11:47:56 AM	Bypass valve closed
2/29/2012	11:47:56 AM	Bubbler valve closed
2/29/2012	11:47:56 AM	Main Vac valve opened
2/29/2012	11:47:56 AM	Helium MFC set to  0.000000
2/29/2012	11:47:56 AM	H2 MFC set to  0.000000
2/29/2012	11:47:56 AM	BCl3 MFC set to  0.000000
2/29/2012	11:47:56 AM	PH3 MFC set to  0.000000
2/29/2012	11:47:56 AM	SiCl4 MFC set to  0.000000
2/29/2012	11:47:56 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	11:47:56 AM	Tube furnace set to 0
2/29/2012	11:48:26 AM	H2 valve closed
2/29/2012	11:48:26 AM	BCl3 valve closed
2/29/2012	11:48:26 AM	PH3 valve closed
2/29/2012	11:48:26 AM	SiCl4 pre valve closed
2/29/2012	11:48:26 AM	SiCl4 post valve closed
2/29/2012	11:48:26 AM	Bypass valve closed
2/29/2012	11:48:26 AM	Bubbler valve closed
2/29/2012	11:48:26 AM	Helium valve opened
2/29/2012	11:48:26 AM	Main Vac valve opened
2/29/2012	11:48:26 AM	Helium MFC set to  20.000000
2/29/2012	11:48:26 AM	H2 MFC set to  0.000000
2/29/2012	11:48:26 AM	BCl3 MFC set to  0.000000
2/29/2012	11:48:26 AM	PH3 MFC set to  0.000000
2/29/2012	11:48:26 AM	SiCl4 MFC set to  0.000000
2/29/2012	11:48:26 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	11:48:26 AM	Tube furnace set to 0
2/29/2012	11:48:56 AM	Helium valve closed
2/29/2012	11:48:56 AM	H2 valve closed
2/29/2012	11:48:56 AM	BCl3 valve closed
2/29/2012	11:48:56 AM	PH3 valve closed
2/29/2012	11:48:56 AM	SiCl4 pre valve closed
2/29/2012	11:48:56 AM	SiCl4 post valve closed
2/29/2012	11:48:56 AM	Bypass valve closed
2/29/2012	11:48:56 AM	Bubbler valve closed
2/29/2012	11:48:56 AM	Main Vac valve opened
2/29/2012	11:48:56 AM	Helium MFC set to  0.000000
2/29/2012	11:48:56 AM	H2 MFC set to  0.000000
2/29/2012	11:48:56 AM	BCl3 MFC set to  0.000000
2/29/2012	11:48:56 AM	PH3 MFC set to  0.000000
2/29/2012	11:48:56 AM	SiCl4 MFC set to  0.000000
2/29/2012	11:48:56 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	11:48:56 AM	Tube furnace set to 0
2/29/2012	11:49:26 AM	H2 valve closed
2/29/2012	11:49:26 AM	BCl3 valve closed
2/29/2012	11:49:26 AM	PH3 valve closed
2/29/2012	11:49:26 AM	SiCl4 pre valve closed
2/29/2012	11:49:26 AM	SiCl4 post valve closed
2/29/2012	11:49:26 AM	Bypass valve closed
2/29/2012	11:49:26 AM	Bubbler valve closed
2/29/2012	11:49:26 AM	Helium valve opened
2/29/2012	11:49:26 AM	Main Vac valve opened
2/29/2012	11:49:26 AM	Helium MFC set to  20.000000
2/29/2012	11:49:26 AM	H2 MFC set to  0.000000
2/29/2012	11:49:26 AM	BCl3 MFC set to  0.000000
2/29/2012	11:49:26 AM	PH3 MFC set to  0.000000
2/29/2012	11:49:26 AM	SiCl4 MFC set to  0.000000
2/29/2012	11:49:26 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	11:49:26 AM	Tube furnace set to 0
2/29/2012	11:49:56 AM	Helium valve closed
2/29/2012	11:49:56 AM	H2 valve closed
2/29/2012	11:49:56 AM	BCl3 valve closed
2/29/2012	11:49:56 AM	PH3 valve closed
2/29/2012	11:49:56 AM	SiCl4 pre valve closed
2/29/2012	11:49:56 AM	SiCl4 post valve closed
2/29/2012	11:49:56 AM	Bypass valve closed
2/29/2012	11:49:56 AM	Bubbler valve closed
2/29/2012	11:49:56 AM	Main Vac valve opened
2/29/2012	11:49:56 AM	Helium MFC set to  0.000000
2/29/2012	11:49:56 AM	H2 MFC set to  0.000000
2/29/2012	11:49:56 AM	BCl3 MFC set to  0.000000
2/29/2012	11:49:56 AM	PH3 MFC set to  0.000000
2/29/2012	11:49:56 AM	SiCl4 MFC set to  0.000000
2/29/2012	11:49:56 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	11:49:57 AM	Tube furnace set to 0
2/29/2012	11:50:27 AM	H2 valve closed
2/29/2012	11:50:27 AM	BCl3 valve closed
2/29/2012	11:50:27 AM	PH3 valve closed
2/29/2012	11:50:27 AM	SiCl4 pre valve closed
2/29/2012	11:50:27 AM	SiCl4 post valve closed
2/29/2012	11:50:27 AM	Bypass valve closed
2/29/2012	11:50:27 AM	Bubbler valve closed
2/29/2012	11:50:27 AM	Helium valve opened
2/29/2012	11:50:27 AM	Main Vac valve opened
2/29/2012	11:50:27 AM	Helium MFC set to  20.000000
2/29/2012	11:50:27 AM	H2 MFC set to  0.000000
2/29/2012	11:50:27 AM	BCl3 MFC set to  0.000000
2/29/2012	11:50:27 AM	PH3 MFC set to  0.000000
2/29/2012	11:50:27 AM	SiCl4 MFC set to  0.000000
2/29/2012	11:50:27 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	11:50:27 AM	Tube furnace set to 0
2/29/2012	11:50:57 AM	Helium valve closed
2/29/2012	11:50:57 AM	H2 valve closed
2/29/2012	11:50:57 AM	BCl3 valve closed
2/29/2012	11:50:57 AM	PH3 valve closed
2/29/2012	11:50:57 AM	SiCl4 pre valve closed
2/29/2012	11:50:57 AM	SiCl4 post valve closed
2/29/2012	11:50:57 AM	Bypass valve closed
2/29/2012	11:50:57 AM	Bubbler valve closed
2/29/2012	11:50:57 AM	Main Vac valve opened
2/29/2012	11:50:57 AM	Helium MFC set to  0.000000
2/29/2012	11:50:57 AM	H2 MFC set to  0.000000
2/29/2012	11:50:57 AM	BCl3 MFC set to  0.000000
2/29/2012	11:50:57 AM	PH3 MFC set to  0.000000
2/29/2012	11:50:57 AM	SiCl4 MFC set to  0.000000
2/29/2012	11:50:57 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	11:50:57 AM	Tube furnace set to 0
2/29/2012	11:51:27 AM	H2 valve closed
2/29/2012	11:51:27 AM	BCl3 valve closed
2/29/2012	11:51:27 AM	PH3 valve closed
2/29/2012	11:51:27 AM	SiCl4 pre valve closed
2/29/2012	11:51:27 AM	SiCl4 post valve closed
2/29/2012	11:51:27 AM	Bypass valve closed
2/29/2012	11:51:27 AM	Bubbler valve closed
2/29/2012	11:51:27 AM	Helium valve opened
2/29/2012	11:51:27 AM	Main Vac valve opened
2/29/2012	11:51:27 AM	Helium MFC set to  20.000000
2/29/2012	11:51:27 AM	H2 MFC set to  0.000000
2/29/2012	11:51:27 AM	BCl3 MFC set to  0.000000
2/29/2012	11:51:27 AM	PH3 MFC set to  0.000000
2/29/2012	11:51:27 AM	SiCl4 MFC set to  0.000000
2/29/2012	11:51:27 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	11:51:27 AM	Tube furnace set to 0
2/29/2012	11:51:57 AM	Helium valve closed
2/29/2012	11:51:57 AM	H2 valve closed
2/29/2012	11:51:57 AM	BCl3 valve closed
2/29/2012	11:51:57 AM	PH3 valve closed
2/29/2012	11:51:57 AM	SiCl4 pre valve closed
2/29/2012	11:51:57 AM	SiCl4 post valve closed
2/29/2012	11:51:57 AM	Bypass valve closed
2/29/2012	11:51:57 AM	Bubbler valve closed
2/29/2012	11:51:57 AM	Main Vac valve opened
2/29/2012	11:51:57 AM	Helium MFC set to  0.000000
2/29/2012	11:51:57 AM	H2 MFC set to  0.000000
2/29/2012	11:51:57 AM	BCl3 MFC set to  0.000000
2/29/2012	11:51:57 AM	PH3 MFC set to  0.000000
2/29/2012	11:51:57 AM	SiCl4 MFC set to  0.000000
2/29/2012	11:51:57 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	11:51:57 AM	Tube furnace set to 0
2/29/2012	11:52:27 AM	H2 valve closed
2/29/2012	11:52:27 AM	BCl3 valve closed
2/29/2012	11:52:27 AM	PH3 valve closed
2/29/2012	11:52:27 AM	SiCl4 pre valve closed
2/29/2012	11:52:27 AM	SiCl4 post valve closed
2/29/2012	11:52:27 AM	Bypass valve closed
2/29/2012	11:52:27 AM	Bubbler valve closed
2/29/2012	11:52:27 AM	Helium valve opened
2/29/2012	11:52:27 AM	Main Vac valve opened
2/29/2012	11:52:27 AM	Helium MFC set to  20.000000
2/29/2012	11:52:27 AM	H2 MFC set to  0.000000
2/29/2012	11:52:27 AM	BCl3 MFC set to  0.000000
2/29/2012	11:52:27 AM	PH3 MFC set to  0.000000
2/29/2012	11:52:27 AM	SiCl4 MFC set to  0.000000
2/29/2012	11:52:27 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	11:52:28 AM	Tube furnace set to 0
2/29/2012	11:52:58 AM	Helium valve closed
2/29/2012	11:52:58 AM	H2 valve closed
2/29/2012	11:52:58 AM	BCl3 valve closed
2/29/2012	11:52:58 AM	PH3 valve closed
2/29/2012	11:52:58 AM	SiCl4 pre valve closed
2/29/2012	11:52:58 AM	SiCl4 post valve closed
2/29/2012	11:52:58 AM	Bypass valve closed
2/29/2012	11:52:58 AM	Bubbler valve closed
2/29/2012	11:52:58 AM	Main Vac valve opened
2/29/2012	11:52:58 AM	Helium MFC set to  0.000000
2/29/2012	11:52:58 AM	H2 MFC set to  0.000000
2/29/2012	11:52:58 AM	BCl3 MFC set to  0.000000
2/29/2012	11:52:58 AM	PH3 MFC set to  0.000000
2/29/2012	11:52:58 AM	SiCl4 MFC set to  0.000000
2/29/2012	11:52:58 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	11:52:58 AM	Tube furnace set to 0
2/29/2012	11:53:28 AM	H2 valve closed
2/29/2012	11:53:28 AM	BCl3 valve closed
2/29/2012	11:53:28 AM	PH3 valve closed
2/29/2012	11:53:28 AM	SiCl4 pre valve closed
2/29/2012	11:53:28 AM	SiCl4 post valve closed
2/29/2012	11:53:28 AM	Bypass valve closed
2/29/2012	11:53:28 AM	Bubbler valve closed
2/29/2012	11:53:28 AM	Helium valve opened
2/29/2012	11:53:28 AM	Main Vac valve opened
2/29/2012	11:53:28 AM	Helium MFC set to  20.000000
2/29/2012	11:53:28 AM	H2 MFC set to  0.000000
2/29/2012	11:53:28 AM	BCl3 MFC set to  0.000000
2/29/2012	11:53:28 AM	PH3 MFC set to  0.000000
2/29/2012	11:53:28 AM	SiCl4 MFC set to  0.000000
2/29/2012	11:53:28 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	11:53:28 AM	Tube furnace set to 0
2/29/2012	11:53:58 AM	Helium valve closed
2/29/2012	11:53:58 AM	H2 valve closed
2/29/2012	11:53:58 AM	BCl3 valve closed
2/29/2012	11:53:58 AM	PH3 valve closed
2/29/2012	11:53:58 AM	SiCl4 pre valve closed
2/29/2012	11:53:58 AM	SiCl4 post valve closed
2/29/2012	11:53:58 AM	Bypass valve closed
2/29/2012	11:53:58 AM	Bubbler valve closed
2/29/2012	11:53:58 AM	Main Vac valve opened
2/29/2012	11:53:58 AM	Helium MFC set to  0.000000
2/29/2012	11:53:58 AM	H2 MFC set to  0.000000
2/29/2012	11:53:58 AM	BCl3 MFC set to  0.000000
2/29/2012	11:53:58 AM	PH3 MFC set to  0.000000
2/29/2012	11:53:58 AM	SiCl4 MFC set to  0.000000
2/29/2012	11:53:58 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	11:53:58 AM	Tube furnace set to 0
2/29/2012	11:54:28 AM	H2 valve closed
2/29/2012	11:54:28 AM	BCl3 valve closed
2/29/2012	11:54:28 AM	PH3 valve closed
2/29/2012	11:54:28 AM	SiCl4 pre valve closed
2/29/2012	11:54:28 AM	SiCl4 post valve closed
2/29/2012	11:54:28 AM	Bypass valve closed
2/29/2012	11:54:28 AM	Bubbler valve closed
2/29/2012	11:54:28 AM	Helium valve opened
2/29/2012	11:54:28 AM	Main Vac valve opened
2/29/2012	11:54:28 AM	Helium MFC set to  20.000000
2/29/2012	11:54:28 AM	H2 MFC set to  0.000000
2/29/2012	11:54:28 AM	BCl3 MFC set to  0.000000
2/29/2012	11:54:28 AM	PH3 MFC set to  0.000000
2/29/2012	11:54:28 AM	SiCl4 MFC set to  0.000000
2/29/2012	11:54:28 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	11:54:28 AM	Tube furnace set to 0
2/29/2012	11:54:58 AM	Helium valve closed
2/29/2012	11:54:58 AM	H2 valve closed
2/29/2012	11:54:58 AM	BCl3 valve closed
2/29/2012	11:54:58 AM	PH3 valve closed
2/29/2012	11:54:58 AM	SiCl4 pre valve closed
2/29/2012	11:54:58 AM	SiCl4 post valve closed
2/29/2012	11:54:58 AM	Bypass valve closed
2/29/2012	11:54:58 AM	Bubbler valve closed
2/29/2012	11:54:58 AM	Main Vac valve opened
2/29/2012	11:54:58 AM	Helium MFC set to  0.000000
2/29/2012	11:54:58 AM	H2 MFC set to  0.000000
2/29/2012	11:54:58 AM	BCl3 MFC set to  0.000000
2/29/2012	11:54:58 AM	PH3 MFC set to  0.000000
2/29/2012	11:54:58 AM	SiCl4 MFC set to  0.000000
2/29/2012	11:54:58 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	11:54:59 AM	Tube furnace set to 0
2/29/2012	11:55:29 AM	H2 valve closed
2/29/2012	11:55:29 AM	BCl3 valve closed
2/29/2012	11:55:29 AM	PH3 valve closed
2/29/2012	11:55:29 AM	SiCl4 pre valve closed
2/29/2012	11:55:29 AM	SiCl4 post valve closed
2/29/2012	11:55:29 AM	Bypass valve closed
2/29/2012	11:55:29 AM	Bubbler valve closed
2/29/2012	11:55:29 AM	Helium valve opened
2/29/2012	11:55:29 AM	Main Vac valve opened
2/29/2012	11:55:29 AM	Helium MFC set to  20.000000
2/29/2012	11:55:29 AM	H2 MFC set to  0.000000
2/29/2012	11:55:29 AM	BCl3 MFC set to  0.000000
2/29/2012	11:55:29 AM	PH3 MFC set to  0.000000
2/29/2012	11:55:29 AM	SiCl4 MFC set to  0.000000
2/29/2012	11:55:29 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	11:55:29 AM	Tube furnace set to 0
2/29/2012	11:55:59 AM	Helium valve closed
2/29/2012	11:55:59 AM	H2 valve closed
2/29/2012	11:55:59 AM	BCl3 valve closed
2/29/2012	11:55:59 AM	PH3 valve closed
2/29/2012	11:55:59 AM	SiCl4 pre valve closed
2/29/2012	11:55:59 AM	SiCl4 post valve closed
2/29/2012	11:55:59 AM	Bypass valve closed
2/29/2012	11:55:59 AM	Bubbler valve closed
2/29/2012	11:55:59 AM	Main Vac valve opened
2/29/2012	11:55:59 AM	Helium MFC set to  0.000000
2/29/2012	11:55:59 AM	H2 MFC set to  0.000000
2/29/2012	11:55:59 AM	BCl3 MFC set to  0.000000
2/29/2012	11:55:59 AM	PH3 MFC set to  0.000000
2/29/2012	11:55:59 AM	SiCl4 MFC set to  0.000000
2/29/2012	11:55:59 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	11:55:59 AM	Tube furnace set to 0
2/29/2012	11:56:29 AM	H2 valve closed
2/29/2012	11:56:29 AM	BCl3 valve closed
2/29/2012	11:56:29 AM	PH3 valve closed
2/29/2012	11:56:29 AM	SiCl4 pre valve closed
2/29/2012	11:56:29 AM	SiCl4 post valve closed
2/29/2012	11:56:29 AM	Bypass valve closed
2/29/2012	11:56:29 AM	Bubbler valve closed
2/29/2012	11:56:29 AM	Helium valve opened
2/29/2012	11:56:29 AM	Main Vac valve opened
2/29/2012	11:56:29 AM	Helium MFC set to  20.000000
2/29/2012	11:56:29 AM	H2 MFC set to  0.000000
2/29/2012	11:56:29 AM	BCl3 MFC set to  0.000000
2/29/2012	11:56:29 AM	PH3 MFC set to  0.000000
2/29/2012	11:56:29 AM	SiCl4 MFC set to  0.000000
2/29/2012	11:56:29 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	11:56:29 AM	Tube furnace set to 0
2/29/2012	11:56:59 AM	Helium valve closed
2/29/2012	11:56:59 AM	H2 valve closed
2/29/2012	11:56:59 AM	BCl3 valve closed
2/29/2012	11:56:59 AM	PH3 valve closed
2/29/2012	11:56:59 AM	SiCl4 pre valve closed
2/29/2012	11:56:59 AM	SiCl4 post valve closed
2/29/2012	11:56:59 AM	Bypass valve closed
2/29/2012	11:56:59 AM	Bubbler valve closed
2/29/2012	11:56:59 AM	Main Vac valve opened
2/29/2012	11:56:59 AM	Helium MFC set to  0.000000
2/29/2012	11:56:59 AM	H2 MFC set to  0.000000
2/29/2012	11:56:59 AM	BCl3 MFC set to  0.000000
2/29/2012	11:56:59 AM	PH3 MFC set to  0.000000
2/29/2012	11:56:59 AM	SiCl4 MFC set to  0.000000
2/29/2012	11:56:59 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	11:56:59 AM	Tube furnace set to 0
2/29/2012	11:57:00 AM	Run finished at 11:57 AM
2/29/2012	11:57:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/29/2012	11:57:52 AM	Main Vac valve closed
2/29/2012	11:58:04 AM	Main Vac valve opened
2/29/2012	11:58:07 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/29/2012	11:58:21 AM	Recipe started at 11:58 AM
2/29/2012	11:58:21 AM	Helium valve closed
2/29/2012	11:58:21 AM	H2 valve closed
2/29/2012	11:58:21 AM	BCl3 valve closed
2/29/2012	11:58:21 AM	PH3 valve closed
2/29/2012	11:58:21 AM	SiCl4 pre valve closed
2/29/2012	11:58:21 AM	SiCl4 post valve closed
2/29/2012	11:58:21 AM	Main Vac valve closed
2/29/2012	11:58:21 AM	Bubbler valve closed
2/29/2012	11:58:21 AM	Bypass valve opened
2/29/2012	11:58:21 AM	Helium MFC set to  0.000000
2/29/2012	11:58:21 AM	H2 MFC set to  0.000000
2/29/2012	11:58:21 AM	BCl3 MFC set to  0.000000
2/29/2012	11:58:21 AM	PH3 MFC set to  0.000000
2/29/2012	11:58:21 AM	SiCl4 MFC set to  0.000000
2/29/2012	11:58:21 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	11:58:21 AM	Tube furnace set to 0
2/29/2012	11:58:21 AM	Helium valve closed
2/29/2012	11:58:21 AM	H2 valve closed
2/29/2012	11:58:21 AM	BCl3 valve closed
2/29/2012	11:58:21 AM	PH3 valve closed
2/29/2012	11:58:21 AM	SiCl4 pre valve closed
2/29/2012	11:58:21 AM	SiCl4 post valve closed
2/29/2012	11:58:21 AM	Main Vac valve closed
2/29/2012	11:58:21 AM	Bubbler valve closed
2/29/2012	11:58:21 AM	Bypass valve opened
2/29/2012	11:58:21 AM	Helium MFC set to  0.000000
2/29/2012	11:58:21 AM	H2 MFC set to  0.000000
2/29/2012	11:58:21 AM	BCl3 MFC set to  0.000000
2/29/2012	11:58:21 AM	PH3 MFC set to  0.000000
2/29/2012	11:58:21 AM	SiCl4 MFC set to  0.000000
2/29/2012	11:58:21 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	11:58:21 AM	Tube furnace set to 0
2/29/2012	11:58:21 AM	Helium valve closed
2/29/2012	11:58:21 AM	H2 valve closed
2/29/2012	11:58:21 AM	BCl3 valve closed
2/29/2012	11:58:21 AM	PH3 valve closed
2/29/2012	11:58:21 AM	SiCl4 pre valve closed
2/29/2012	11:58:21 AM	SiCl4 post valve closed
2/29/2012	11:58:21 AM	Bypass valve closed
2/29/2012	11:58:21 AM	Bubbler valve closed
2/29/2012	11:58:21 AM	Main Vac valve opened
2/29/2012	11:58:21 AM	Helium MFC set to  0.000000
2/29/2012	11:58:21 AM	H2 MFC set to  0.000000
2/29/2012	11:58:21 AM	BCl3 MFC set to  0.000000
2/29/2012	11:58:21 AM	PH3 MFC set to  0.000000
2/29/2012	11:58:21 AM	SiCl4 MFC set to  0.000000
2/29/2012	11:58:21 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	11:58:22 AM	Tube furnace set to 0
2/29/2012	11:58:52 AM	H2 valve closed
2/29/2012	11:58:52 AM	BCl3 valve closed
2/29/2012	11:58:52 AM	PH3 valve closed
2/29/2012	11:58:52 AM	SiCl4 pre valve closed
2/29/2012	11:58:52 AM	SiCl4 post valve closed
2/29/2012	11:58:52 AM	Bypass valve closed
2/29/2012	11:58:52 AM	Bubbler valve closed
2/29/2012	11:58:52 AM	Helium valve opened
2/29/2012	11:58:52 AM	Main Vac valve opened
2/29/2012	11:58:52 AM	Helium MFC set to  20.000000
2/29/2012	11:58:52 AM	H2 MFC set to  0.000000
2/29/2012	11:58:52 AM	BCl3 MFC set to  0.000000
2/29/2012	11:58:52 AM	PH3 MFC set to  0.000000
2/29/2012	11:58:52 AM	SiCl4 MFC set to  0.000000
2/29/2012	11:58:52 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	11:58:52 AM	Tube furnace set to 0
2/29/2012	11:59:22 AM	Helium valve closed
2/29/2012	11:59:22 AM	H2 valve closed
2/29/2012	11:59:22 AM	BCl3 valve closed
2/29/2012	11:59:22 AM	PH3 valve closed
2/29/2012	11:59:22 AM	SiCl4 pre valve closed
2/29/2012	11:59:22 AM	SiCl4 post valve closed
2/29/2012	11:59:22 AM	Bypass valve closed
2/29/2012	11:59:22 AM	Bubbler valve closed
2/29/2012	11:59:22 AM	Main Vac valve opened
2/29/2012	11:59:22 AM	Helium MFC set to  0.000000
2/29/2012	11:59:22 AM	H2 MFC set to  0.000000
2/29/2012	11:59:22 AM	BCl3 MFC set to  0.000000
2/29/2012	11:59:22 AM	PH3 MFC set to  0.000000
2/29/2012	11:59:22 AM	SiCl4 MFC set to  0.000000
2/29/2012	11:59:22 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	11:59:22 AM	Tube furnace set to 0
2/29/2012	11:59:52 AM	H2 valve closed
2/29/2012	11:59:52 AM	BCl3 valve closed
2/29/2012	11:59:52 AM	PH3 valve closed
2/29/2012	11:59:52 AM	SiCl4 pre valve closed
2/29/2012	11:59:52 AM	SiCl4 post valve closed
2/29/2012	11:59:52 AM	Bypass valve closed
2/29/2012	11:59:52 AM	Bubbler valve closed
2/29/2012	11:59:52 AM	Helium valve opened
2/29/2012	11:59:52 AM	Main Vac valve opened
2/29/2012	11:59:52 AM	Helium MFC set to  20.000000
2/29/2012	11:59:52 AM	H2 MFC set to  0.000000
2/29/2012	11:59:52 AM	BCl3 MFC set to  0.000000
2/29/2012	11:59:52 AM	PH3 MFC set to  0.000000
2/29/2012	11:59:52 AM	SiCl4 MFC set to  0.000000
2/29/2012	11:59:52 AM	Bypass solenoid MFC set to  0.000000
2/29/2012	11:59:52 AM	Tube furnace set to 0
2/29/2012	12:00:22 PM	Helium valve closed
2/29/2012	12:00:22 PM	H2 valve closed
2/29/2012	12:00:22 PM	BCl3 valve closed
2/29/2012	12:00:22 PM	PH3 valve closed
2/29/2012	12:00:22 PM	SiCl4 pre valve closed
2/29/2012	12:00:22 PM	SiCl4 post valve closed
2/29/2012	12:00:22 PM	Bypass valve closed
2/29/2012	12:00:22 PM	Bubbler valve closed
2/29/2012	12:00:22 PM	Main Vac valve opened
2/29/2012	12:00:22 PM	Helium MFC set to  0.000000
2/29/2012	12:00:22 PM	H2 MFC set to  0.000000
2/29/2012	12:00:22 PM	BCl3 MFC set to  0.000000
2/29/2012	12:00:22 PM	PH3 MFC set to  0.000000
2/29/2012	12:00:22 PM	SiCl4 MFC set to  0.000000
2/29/2012	12:00:22 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	12:00:22 PM	Tube furnace set to 0
2/29/2012	12:00:52 PM	H2 valve closed
2/29/2012	12:00:52 PM	BCl3 valve closed
2/29/2012	12:00:52 PM	PH3 valve closed
2/29/2012	12:00:52 PM	SiCl4 pre valve closed
2/29/2012	12:00:52 PM	SiCl4 post valve closed
2/29/2012	12:00:52 PM	Bypass valve closed
2/29/2012	12:00:52 PM	Bubbler valve closed
2/29/2012	12:00:52 PM	Helium valve opened
2/29/2012	12:00:52 PM	Main Vac valve opened
2/29/2012	12:00:52 PM	Helium MFC set to  20.000000
2/29/2012	12:00:52 PM	H2 MFC set to  0.000000
2/29/2012	12:00:53 PM	BCl3 MFC set to  0.000000
2/29/2012	12:00:53 PM	PH3 MFC set to  0.000000
2/29/2012	12:00:53 PM	SiCl4 MFC set to  0.000000
2/29/2012	12:00:53 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	12:00:53 PM	Tube furnace set to 0
2/29/2012	12:01:23 PM	Helium valve closed
2/29/2012	12:01:23 PM	H2 valve closed
2/29/2012	12:01:23 PM	BCl3 valve closed
2/29/2012	12:01:23 PM	PH3 valve closed
2/29/2012	12:01:23 PM	SiCl4 pre valve closed
2/29/2012	12:01:23 PM	SiCl4 post valve closed
2/29/2012	12:01:23 PM	Bypass valve closed
2/29/2012	12:01:23 PM	Bubbler valve closed
2/29/2012	12:01:23 PM	Main Vac valve opened
2/29/2012	12:01:23 PM	Helium MFC set to  0.000000
2/29/2012	12:01:23 PM	H2 MFC set to  0.000000
2/29/2012	12:01:23 PM	BCl3 MFC set to  0.000000
2/29/2012	12:01:23 PM	PH3 MFC set to  0.000000
2/29/2012	12:01:23 PM	SiCl4 MFC set to  0.000000
2/29/2012	12:01:23 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	12:01:23 PM	Tube furnace set to 0
2/29/2012	12:01:53 PM	H2 valve closed
2/29/2012	12:01:53 PM	BCl3 valve closed
2/29/2012	12:01:53 PM	PH3 valve closed
2/29/2012	12:01:53 PM	SiCl4 pre valve closed
2/29/2012	12:01:53 PM	SiCl4 post valve closed
2/29/2012	12:01:53 PM	Bypass valve closed
2/29/2012	12:01:53 PM	Bubbler valve closed
2/29/2012	12:01:53 PM	Helium valve opened
2/29/2012	12:01:53 PM	Main Vac valve opened
2/29/2012	12:01:53 PM	Helium MFC set to  20.000000
2/29/2012	12:01:53 PM	H2 MFC set to  0.000000
2/29/2012	12:01:53 PM	BCl3 MFC set to  0.000000
2/29/2012	12:01:53 PM	PH3 MFC set to  0.000000
2/29/2012	12:01:53 PM	SiCl4 MFC set to  0.000000
2/29/2012	12:01:53 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	12:01:53 PM	Tube furnace set to 0
2/29/2012	12:02:23 PM	Helium valve closed
2/29/2012	12:02:23 PM	H2 valve closed
2/29/2012	12:02:23 PM	BCl3 valve closed
2/29/2012	12:02:23 PM	PH3 valve closed
2/29/2012	12:02:23 PM	SiCl4 pre valve closed
2/29/2012	12:02:23 PM	SiCl4 post valve closed
2/29/2012	12:02:23 PM	Bypass valve closed
2/29/2012	12:02:23 PM	Bubbler valve closed
2/29/2012	12:02:23 PM	Main Vac valve opened
2/29/2012	12:02:23 PM	Helium MFC set to  0.000000
2/29/2012	12:02:23 PM	H2 MFC set to  0.000000
2/29/2012	12:02:23 PM	BCl3 MFC set to  0.000000
2/29/2012	12:02:23 PM	PH3 MFC set to  0.000000
2/29/2012	12:02:23 PM	SiCl4 MFC set to  0.000000
2/29/2012	12:02:23 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	12:02:23 PM	Tube furnace set to 0
2/29/2012	12:02:53 PM	H2 valve closed
2/29/2012	12:02:53 PM	BCl3 valve closed
2/29/2012	12:02:53 PM	PH3 valve closed
2/29/2012	12:02:53 PM	SiCl4 pre valve closed
2/29/2012	12:02:53 PM	SiCl4 post valve closed
2/29/2012	12:02:53 PM	Bypass valve closed
2/29/2012	12:02:53 PM	Bubbler valve closed
2/29/2012	12:02:53 PM	Helium valve opened
2/29/2012	12:02:53 PM	Main Vac valve opened
2/29/2012	12:02:53 PM	Helium MFC set to  20.000000
2/29/2012	12:02:53 PM	H2 MFC set to  0.000000
2/29/2012	12:02:53 PM	BCl3 MFC set to  0.000000
2/29/2012	12:02:53 PM	PH3 MFC set to  0.000000
2/29/2012	12:02:53 PM	SiCl4 MFC set to  0.000000
2/29/2012	12:02:53 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	12:02:53 PM	Tube furnace set to 0
2/29/2012	12:03:23 PM	Helium valve closed
2/29/2012	12:03:24 PM	H2 valve closed
2/29/2012	12:03:24 PM	BCl3 valve closed
2/29/2012	12:03:24 PM	PH3 valve closed
2/29/2012	12:03:24 PM	SiCl4 pre valve closed
2/29/2012	12:03:24 PM	SiCl4 post valve closed
2/29/2012	12:03:24 PM	Bypass valve closed
2/29/2012	12:03:24 PM	Bubbler valve closed
2/29/2012	12:03:24 PM	Main Vac valve opened
2/29/2012	12:03:24 PM	Helium MFC set to  0.000000
2/29/2012	12:03:24 PM	H2 MFC set to  0.000000
2/29/2012	12:03:24 PM	BCl3 MFC set to  0.000000
2/29/2012	12:03:24 PM	PH3 MFC set to  0.000000
2/29/2012	12:03:24 PM	SiCl4 MFC set to  0.000000
2/29/2012	12:03:24 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	12:03:24 PM	Tube furnace set to 0
2/29/2012	12:03:54 PM	H2 valve closed
2/29/2012	12:03:54 PM	BCl3 valve closed
2/29/2012	12:03:54 PM	PH3 valve closed
2/29/2012	12:03:54 PM	SiCl4 pre valve closed
2/29/2012	12:03:54 PM	SiCl4 post valve closed
2/29/2012	12:03:54 PM	Bypass valve closed
2/29/2012	12:03:54 PM	Bubbler valve closed
2/29/2012	12:03:54 PM	Helium valve opened
2/29/2012	12:03:54 PM	Main Vac valve opened
2/29/2012	12:03:54 PM	Helium MFC set to  20.000000
2/29/2012	12:03:54 PM	H2 MFC set to  0.000000
2/29/2012	12:03:54 PM	BCl3 MFC set to  0.000000
2/29/2012	12:03:54 PM	PH3 MFC set to  0.000000
2/29/2012	12:03:54 PM	SiCl4 MFC set to  0.000000
2/29/2012	12:03:54 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	12:03:54 PM	Tube furnace set to 0
2/29/2012	12:04:24 PM	Helium valve closed
2/29/2012	12:04:24 PM	H2 valve closed
2/29/2012	12:04:24 PM	BCl3 valve closed
2/29/2012	12:04:24 PM	PH3 valve closed
2/29/2012	12:04:24 PM	SiCl4 pre valve closed
2/29/2012	12:04:24 PM	SiCl4 post valve closed
2/29/2012	12:04:24 PM	Bypass valve closed
2/29/2012	12:04:24 PM	Bubbler valve closed
2/29/2012	12:04:24 PM	Main Vac valve opened
2/29/2012	12:04:24 PM	Helium MFC set to  0.000000
2/29/2012	12:04:24 PM	H2 MFC set to  0.000000
2/29/2012	12:04:24 PM	BCl3 MFC set to  0.000000
2/29/2012	12:04:24 PM	PH3 MFC set to  0.000000
2/29/2012	12:04:24 PM	SiCl4 MFC set to  0.000000
2/29/2012	12:04:24 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	12:04:24 PM	Tube furnace set to 0
2/29/2012	12:04:54 PM	H2 valve closed
2/29/2012	12:04:54 PM	BCl3 valve closed
2/29/2012	12:04:54 PM	PH3 valve closed
2/29/2012	12:04:54 PM	SiCl4 pre valve closed
2/29/2012	12:04:54 PM	SiCl4 post valve closed
2/29/2012	12:04:54 PM	Bypass valve closed
2/29/2012	12:04:54 PM	Bubbler valve closed
2/29/2012	12:04:54 PM	Helium valve opened
2/29/2012	12:04:54 PM	Main Vac valve opened
2/29/2012	12:04:54 PM	Helium MFC set to  20.000000
2/29/2012	12:04:54 PM	H2 MFC set to  0.000000
2/29/2012	12:04:54 PM	BCl3 MFC set to  0.000000
2/29/2012	12:04:54 PM	PH3 MFC set to  0.000000
2/29/2012	12:04:54 PM	SiCl4 MFC set to  0.000000
2/29/2012	12:04:54 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	12:04:54 PM	Tube furnace set to 0
2/29/2012	12:05:24 PM	Helium valve closed
2/29/2012	12:05:24 PM	H2 valve closed
2/29/2012	12:05:24 PM	BCl3 valve closed
2/29/2012	12:05:24 PM	PH3 valve closed
2/29/2012	12:05:24 PM	SiCl4 pre valve closed
2/29/2012	12:05:24 PM	SiCl4 post valve closed
2/29/2012	12:05:24 PM	Bypass valve closed
2/29/2012	12:05:24 PM	Bubbler valve closed
2/29/2012	12:05:24 PM	Main Vac valve opened
2/29/2012	12:05:24 PM	Helium MFC set to  0.000000
2/29/2012	12:05:24 PM	H2 MFC set to  0.000000
2/29/2012	12:05:24 PM	BCl3 MFC set to  0.000000
2/29/2012	12:05:24 PM	PH3 MFC set to  0.000000
2/29/2012	12:05:24 PM	SiCl4 MFC set to  0.000000
2/29/2012	12:05:24 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	12:05:24 PM	Tube furnace set to 0
2/29/2012	12:05:55 PM	H2 valve closed
2/29/2012	12:05:55 PM	BCl3 valve closed
2/29/2012	12:05:55 PM	PH3 valve closed
2/29/2012	12:05:55 PM	SiCl4 pre valve closed
2/29/2012	12:05:55 PM	SiCl4 post valve closed
2/29/2012	12:05:55 PM	Bypass valve closed
2/29/2012	12:05:55 PM	Bubbler valve closed
2/29/2012	12:05:55 PM	Helium valve opened
2/29/2012	12:05:55 PM	Main Vac valve opened
2/29/2012	12:05:55 PM	Helium MFC set to  20.000000
2/29/2012	12:05:55 PM	H2 MFC set to  0.000000
2/29/2012	12:05:55 PM	BCl3 MFC set to  0.000000
2/29/2012	12:05:55 PM	PH3 MFC set to  0.000000
2/29/2012	12:05:55 PM	SiCl4 MFC set to  0.000000
2/29/2012	12:05:55 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	12:05:55 PM	Tube furnace set to 0
2/29/2012	12:06:25 PM	Helium valve closed
2/29/2012	12:06:25 PM	H2 valve closed
2/29/2012	12:06:25 PM	BCl3 valve closed
2/29/2012	12:06:25 PM	PH3 valve closed
2/29/2012	12:06:25 PM	SiCl4 pre valve closed
2/29/2012	12:06:25 PM	SiCl4 post valve closed
2/29/2012	12:06:25 PM	Bypass valve closed
2/29/2012	12:06:25 PM	Bubbler valve closed
2/29/2012	12:06:25 PM	Main Vac valve opened
2/29/2012	12:06:25 PM	Helium MFC set to  0.000000
2/29/2012	12:06:25 PM	H2 MFC set to  0.000000
2/29/2012	12:06:25 PM	BCl3 MFC set to  0.000000
2/29/2012	12:06:25 PM	PH3 MFC set to  0.000000
2/29/2012	12:06:25 PM	SiCl4 MFC set to  0.000000
2/29/2012	12:06:25 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	12:06:25 PM	Tube furnace set to 0
2/29/2012	12:06:55 PM	H2 valve closed
2/29/2012	12:06:55 PM	BCl3 valve closed
2/29/2012	12:06:55 PM	PH3 valve closed
2/29/2012	12:06:55 PM	SiCl4 pre valve closed
2/29/2012	12:06:55 PM	SiCl4 post valve closed
2/29/2012	12:06:55 PM	Bypass valve closed
2/29/2012	12:06:55 PM	Bubbler valve closed
2/29/2012	12:06:55 PM	Helium valve opened
2/29/2012	12:06:55 PM	Main Vac valve opened
2/29/2012	12:06:55 PM	Helium MFC set to  20.000000
2/29/2012	12:06:55 PM	H2 MFC set to  0.000000
2/29/2012	12:06:55 PM	BCl3 MFC set to  0.000000
2/29/2012	12:06:55 PM	PH3 MFC set to  0.000000
2/29/2012	12:06:55 PM	SiCl4 MFC set to  0.000000
2/29/2012	12:06:55 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	12:06:55 PM	Tube furnace set to 0
2/29/2012	12:07:25 PM	Helium valve closed
2/29/2012	12:07:25 PM	H2 valve closed
2/29/2012	12:07:25 PM	BCl3 valve closed
2/29/2012	12:07:25 PM	PH3 valve closed
2/29/2012	12:07:25 PM	SiCl4 pre valve closed
2/29/2012	12:07:25 PM	SiCl4 post valve closed
2/29/2012	12:07:25 PM	Bypass valve closed
2/29/2012	12:07:25 PM	Bubbler valve closed
2/29/2012	12:07:25 PM	Main Vac valve opened
2/29/2012	12:07:25 PM	Helium MFC set to  0.000000
2/29/2012	12:07:25 PM	H2 MFC set to  0.000000
2/29/2012	12:07:25 PM	BCl3 MFC set to  0.000000
2/29/2012	12:07:25 PM	PH3 MFC set to  0.000000
2/29/2012	12:07:25 PM	SiCl4 MFC set to  0.000000
2/29/2012	12:07:25 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	12:07:25 PM	Tube furnace set to 0
2/29/2012	12:07:55 PM	H2 valve closed
2/29/2012	12:07:55 PM	BCl3 valve closed
2/29/2012	12:07:55 PM	PH3 valve closed
2/29/2012	12:07:55 PM	SiCl4 pre valve closed
2/29/2012	12:07:55 PM	SiCl4 post valve closed
2/29/2012	12:07:55 PM	Bypass valve closed
2/29/2012	12:07:55 PM	Bubbler valve closed
2/29/2012	12:07:55 PM	Helium valve opened
2/29/2012	12:07:55 PM	Main Vac valve opened
2/29/2012	12:07:55 PM	Helium MFC set to  20.000000
2/29/2012	12:07:55 PM	H2 MFC set to  0.000000
2/29/2012	12:07:55 PM	BCl3 MFC set to  0.000000
2/29/2012	12:07:55 PM	PH3 MFC set to  0.000000
2/29/2012	12:07:55 PM	SiCl4 MFC set to  0.000000
2/29/2012	12:07:55 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	12:07:56 PM	Tube furnace set to 0
2/29/2012	12:08:26 PM	Helium valve closed
2/29/2012	12:08:26 PM	H2 valve closed
2/29/2012	12:08:26 PM	BCl3 valve closed
2/29/2012	12:08:26 PM	PH3 valve closed
2/29/2012	12:08:26 PM	SiCl4 pre valve closed
2/29/2012	12:08:26 PM	SiCl4 post valve closed
2/29/2012	12:08:26 PM	Bypass valve closed
2/29/2012	12:08:26 PM	Bubbler valve closed
2/29/2012	12:08:26 PM	Main Vac valve opened
2/29/2012	12:08:26 PM	Helium MFC set to  0.000000
2/29/2012	12:08:26 PM	H2 MFC set to  0.000000
2/29/2012	12:08:26 PM	BCl3 MFC set to  0.000000
2/29/2012	12:08:26 PM	PH3 MFC set to  0.000000
2/29/2012	12:08:26 PM	SiCl4 MFC set to  0.000000
2/29/2012	12:08:26 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	12:08:26 PM	Tube furnace set to 0
2/29/2012	12:08:27 PM	Run finished at 12:08 PM
2/29/2012	12:08:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/29/2012	12:10:37 PM	Main Vac valve closed
2/29/2012	12:10:51 PM	Main Vac valve opened
2/29/2012	12:14:30 PM	Recipe started at 12:14 PM
2/29/2012	12:14:30 PM	Helium valve closed
2/29/2012	12:14:30 PM	H2 valve closed
2/29/2012	12:14:30 PM	BCl3 valve closed
2/29/2012	12:14:30 PM	PH3 valve closed
2/29/2012	12:14:30 PM	SiCl4 pre valve closed
2/29/2012	12:14:30 PM	SiCl4 post valve closed
2/29/2012	12:14:30 PM	Main Vac valve closed
2/29/2012	12:14:30 PM	Bypass valve closed
2/29/2012	12:14:30 PM	Bubbler valve closed
2/29/2012	12:14:30 PM	Helium MFC set to  0.000000
2/29/2012	12:14:30 PM	H2 MFC set to  0.000000
2/29/2012	12:14:30 PM	BCl3 MFC set to  0.000000
2/29/2012	12:14:30 PM	PH3 MFC set to  0.000000
2/29/2012	12:14:30 PM	SiCl4 MFC set to  0.000000
2/29/2012	12:14:30 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	12:14:30 PM	Tube furnace set to 0
2/29/2012	12:14:33 PM	Helium valve closed
2/29/2012	12:14:33 PM	BCl3 valve closed
2/29/2012	12:14:33 PM	PH3 valve closed
2/29/2012	12:14:33 PM	SiCl4 pre valve closed
2/29/2012	12:14:33 PM	SiCl4 post valve closed
2/29/2012	12:14:33 PM	Main Vac valve closed
2/29/2012	12:14:33 PM	Bypass valve closed
2/29/2012	12:14:33 PM	Bubbler valve closed
2/29/2012	12:14:33 PM	H2 valve opened
2/29/2012	12:14:33 PM	Helium MFC set to  0.000000
2/29/2012	12:14:33 PM	H2 MFC set to  500.000000
2/29/2012	12:14:33 PM	BCl3 MFC set to  0.000000
2/29/2012	12:14:33 PM	PH3 MFC set to  0.000000
2/29/2012	12:14:33 PM	SiCl4 MFC set to  0.000000
2/29/2012	12:14:33 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	12:14:33 PM	Tube furnace set to 0
2/29/2012	12:15:36 PM	Helium valve closed
2/29/2012	12:15:36 PM	BCl3 valve closed
2/29/2012	12:15:36 PM	PH3 valve closed
2/29/2012	12:15:36 PM	SiCl4 pre valve closed
2/29/2012	12:15:36 PM	SiCl4 post valve closed
2/29/2012	12:15:36 PM	Main Vac valve closed
2/29/2012	12:15:36 PM	Bypass valve closed
2/29/2012	12:15:36 PM	H2 valve opened
2/29/2012	12:15:36 PM	Bubbler valve opened
2/29/2012	12:15:36 PM	Helium MFC set to  0.000000
2/29/2012	12:15:36 PM	H2 MFC set to  500.000000
2/29/2012	12:15:36 PM	BCl3 MFC set to  0.000000
2/29/2012	12:15:36 PM	PH3 MFC set to  0.000000
2/29/2012	12:15:36 PM	SiCl4 MFC set to  0.000000
2/29/2012	12:15:36 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	12:15:36 PM	Tube furnace set to 0
2/29/2012	12:15:37 PM	Helium valve closed
2/29/2012	12:15:37 PM	BCl3 valve closed
2/29/2012	12:15:37 PM	PH3 valve closed
2/29/2012	12:15:37 PM	SiCl4 pre valve closed
2/29/2012	12:15:37 PM	SiCl4 post valve closed
2/29/2012	12:15:37 PM	Main Vac valve closed
2/29/2012	12:15:37 PM	Bypass valve closed
2/29/2012	12:15:37 PM	H2 valve opened
2/29/2012	12:15:37 PM	Bubbler valve opened
2/29/2012	12:15:37 PM	Helium MFC set to  0.000000
2/29/2012	12:15:37 PM	H2 MFC set to  500.000000
2/29/2012	12:15:37 PM	BCl3 MFC set to  0.000000
2/29/2012	12:15:37 PM	PH3 MFC set to  0.000000
2/29/2012	12:15:37 PM	SiCl4 MFC set to  0.000000
2/29/2012	12:15:37 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	12:15:38 PM	Tube furnace set to 1000
2/29/2012	12:55:38 PM	Helium valve closed
2/29/2012	12:55:38 PM	PH3 valve closed
2/29/2012	12:55:38 PM	Main Vac valve closed
2/29/2012	12:55:38 PM	Bypass valve closed
2/29/2012	12:55:38 PM	H2 valve opened
2/29/2012	12:55:38 PM	BCl3 valve opened
2/29/2012	12:55:38 PM	SiCl4 pre valve opened
2/29/2012	12:55:38 PM	SiCl4 post valve opened
2/29/2012	12:55:38 PM	Bubbler valve opened
2/29/2012	12:55:38 PM	Helium MFC set to  0.000000
2/29/2012	12:55:38 PM	H2 MFC set to  500.000000
2/29/2012	12:55:38 PM	BCl3 MFC set to  1.500000
2/29/2012	12:55:38 PM	PH3 MFC set to  0.000000
2/29/2012	12:55:38 PM	SiCl4 MFC set to  50.000000
2/29/2012	12:55:38 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	12:55:38 PM	Tube furnace set to 1000
2/29/2012	1:13:38 PM	Helium valve closed
2/29/2012	1:13:38 PM	BCl3 valve closed
2/29/2012	1:13:38 PM	PH3 valve closed
2/29/2012	1:13:38 PM	SiCl4 pre valve closed
2/29/2012	1:13:38 PM	SiCl4 post valve closed
2/29/2012	1:13:38 PM	Main Vac valve closed
2/29/2012	1:13:38 PM	Bypass valve closed
2/29/2012	1:13:38 PM	H2 valve opened
2/29/2012	1:13:38 PM	Bubbler valve opened
2/29/2012	1:13:38 PM	Helium MFC set to  0.000000
2/29/2012	1:13:38 PM	H2 MFC set to  500.000000
2/29/2012	1:13:38 PM	BCl3 MFC set to  0.000000
2/29/2012	1:13:38 PM	PH3 MFC set to  0.000000
2/29/2012	1:13:38 PM	SiCl4 MFC set to  0.000000
2/29/2012	1:13:38 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	1:13:38 PM	Tube furnace set to 750
2/29/2012	1:18:38 PM	H2 valve closed
2/29/2012	1:18:38 PM	BCl3 valve closed
2/29/2012	1:18:38 PM	PH3 valve closed
2/29/2012	1:18:38 PM	SiCl4 pre valve closed
2/29/2012	1:18:38 PM	SiCl4 post valve closed
2/29/2012	1:18:38 PM	Main Vac valve closed
2/29/2012	1:18:38 PM	Bypass valve closed
2/29/2012	1:18:38 PM	Helium valve opened
2/29/2012	1:18:38 PM	Bubbler valve opened
2/29/2012	1:18:38 PM	Helium MFC set to  500.000000
2/29/2012	1:18:38 PM	H2 MFC set to  0.000000
2/29/2012	1:18:38 PM	BCl3 MFC set to  0.000000
2/29/2012	1:18:38 PM	PH3 MFC set to  0.000000
2/29/2012	1:18:38 PM	SiCl4 MFC set to  0.000000
2/29/2012	1:18:38 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	1:18:38 PM	Tube furnace set to 0
2/29/2012	1:33:06 PM	Helium valve closed
2/29/2012	1:33:06 PM	H2 valve closed
2/29/2012	1:33:06 PM	BCl3 valve closed
2/29/2012	1:33:06 PM	PH3 valve closed
2/29/2012	1:33:06 PM	SiCl4 pre valve closed
2/29/2012	1:33:06 PM	SiCl4 post valve closed
2/29/2012	1:33:06 PM	Main Vac valve closed
2/29/2012	1:33:06 PM	Bypass valve closed
2/29/2012	1:33:06 PM	Bubbler valve closed
2/29/2012	1:33:06 PM	Helium MFC set to  0.000000
2/29/2012	1:33:06 PM	H2 MFC set to  0.000000
2/29/2012	1:33:06 PM	BCl3 MFC set to  0.000000
2/29/2012	1:33:06 PM	PH3 MFC set to  0.000000
2/29/2012	1:33:06 PM	SiCl4 MFC set to  0.000000
2/29/2012	1:33:06 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	1:33:06 PM	Tube furnace set to 0
2/29/2012	1:33:07 PM	Run finished at 1:33 PM
2/29/2012	1:35:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/29/2012	1:35:50 PM	Recipe started at 1:35 PM
2/29/2012	1:35:50 PM	Helium valve closed
2/29/2012	1:35:50 PM	H2 valve closed
2/29/2012	1:35:50 PM	BCl3 valve closed
2/29/2012	1:35:50 PM	PH3 valve closed
2/29/2012	1:35:50 PM	SiCl4 pre valve closed
2/29/2012	1:35:50 PM	SiCl4 post valve closed
2/29/2012	1:35:50 PM	Main Vac valve closed
2/29/2012	1:35:50 PM	Bubbler valve closed
2/29/2012	1:35:50 PM	Bypass valve opened
2/29/2012	1:35:50 PM	Helium MFC set to  0.000000
2/29/2012	1:35:50 PM	H2 MFC set to  0.000000
2/29/2012	1:35:50 PM	BCl3 MFC set to  0.000000
2/29/2012	1:35:50 PM	PH3 MFC set to  0.000000
2/29/2012	1:35:50 PM	SiCl4 MFC set to  0.000000
2/29/2012	1:35:50 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	1:35:50 PM	Tube furnace set to 0
2/29/2012	1:36:48 PM	Helium valve closed
2/29/2012	1:36:48 PM	H2 valve closed
2/29/2012	1:36:48 PM	BCl3 valve closed
2/29/2012	1:36:48 PM	PH3 valve closed
2/29/2012	1:36:48 PM	SiCl4 pre valve closed
2/29/2012	1:36:48 PM	SiCl4 post valve closed
2/29/2012	1:36:48 PM	Main Vac valve closed
2/29/2012	1:36:48 PM	Bubbler valve closed
2/29/2012	1:36:48 PM	Bypass valve opened
2/29/2012	1:36:48 PM	Helium MFC set to  0.000000
2/29/2012	1:36:48 PM	H2 MFC set to  0.000000
2/29/2012	1:36:48 PM	BCl3 MFC set to  0.000000
2/29/2012	1:36:48 PM	PH3 MFC set to  0.000000
2/29/2012	1:36:48 PM	SiCl4 MFC set to  0.000000
2/29/2012	1:36:48 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	1:36:48 PM	Tube furnace set to 0
2/29/2012	1:37:48 PM	Helium valve closed
2/29/2012	1:37:48 PM	H2 valve closed
2/29/2012	1:37:48 PM	BCl3 valve closed
2/29/2012	1:37:48 PM	PH3 valve closed
2/29/2012	1:37:48 PM	SiCl4 pre valve closed
2/29/2012	1:37:48 PM	SiCl4 post valve closed
2/29/2012	1:37:48 PM	Bypass valve closed
2/29/2012	1:37:48 PM	Bubbler valve closed
2/29/2012	1:37:48 PM	Main Vac valve opened
2/29/2012	1:37:48 PM	Helium MFC set to  0.000000
2/29/2012	1:37:48 PM	H2 MFC set to  0.000000
2/29/2012	1:37:48 PM	BCl3 MFC set to  0.000000
2/29/2012	1:37:48 PM	PH3 MFC set to  0.000000
2/29/2012	1:37:48 PM	SiCl4 MFC set to  0.000000
2/29/2012	1:37:48 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	1:37:48 PM	Tube furnace set to 0
2/29/2012	1:37:49 PM	Run finished at 1:37 PM
2/29/2012	1:37:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/29/2012	1:45:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/29/2012	1:45:50 PM	Recipe started at 1:45 PM
2/29/2012	1:45:50 PM	Helium valve closed
2/29/2012	1:45:50 PM	H2 valve closed
2/29/2012	1:45:50 PM	BCl3 valve closed
2/29/2012	1:45:51 PM	PH3 valve closed
2/29/2012	1:45:51 PM	SiCl4 pre valve closed
2/29/2012	1:45:51 PM	SiCl4 post valve closed
2/29/2012	1:45:51 PM	Main Vac valve closed
2/29/2012	1:45:51 PM	Bubbler valve closed
2/29/2012	1:45:51 PM	Bypass valve opened
2/29/2012	1:45:51 PM	Helium MFC set to  0.000000
2/29/2012	1:45:51 PM	H2 MFC set to  0.000000
2/29/2012	1:45:51 PM	BCl3 MFC set to  0.000000
2/29/2012	1:45:51 PM	PH3 MFC set to  0.000000
2/29/2012	1:45:51 PM	SiCl4 MFC set to  0.000000
2/29/2012	1:45:51 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	1:45:51 PM	Tube furnace set to 0
2/29/2012	1:45:51 PM	Helium valve closed
2/29/2012	1:45:51 PM	H2 valve closed
2/29/2012	1:45:51 PM	BCl3 valve closed
2/29/2012	1:45:51 PM	PH3 valve closed
2/29/2012	1:45:51 PM	SiCl4 pre valve closed
2/29/2012	1:45:51 PM	SiCl4 post valve closed
2/29/2012	1:45:51 PM	Main Vac valve closed
2/29/2012	1:45:51 PM	Bubbler valve closed
2/29/2012	1:45:51 PM	Bypass valve opened
2/29/2012	1:45:51 PM	Helium MFC set to  0.000000
2/29/2012	1:45:51 PM	H2 MFC set to  0.000000
2/29/2012	1:45:51 PM	BCl3 MFC set to  0.000000
2/29/2012	1:45:51 PM	PH3 MFC set to  0.000000
2/29/2012	1:45:51 PM	SiCl4 MFC set to  0.000000
2/29/2012	1:45:51 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	1:45:51 PM	Tube furnace set to 0
2/29/2012	1:45:51 PM	Helium valve closed
2/29/2012	1:45:51 PM	H2 valve closed
2/29/2012	1:45:51 PM	BCl3 valve closed
2/29/2012	1:45:51 PM	PH3 valve closed
2/29/2012	1:45:51 PM	SiCl4 pre valve closed
2/29/2012	1:45:51 PM	SiCl4 post valve closed
2/29/2012	1:45:51 PM	Bypass valve closed
2/29/2012	1:45:51 PM	Bubbler valve closed
2/29/2012	1:45:51 PM	Main Vac valve opened
2/29/2012	1:45:51 PM	Helium MFC set to  0.000000
2/29/2012	1:45:51 PM	H2 MFC set to  0.000000
2/29/2012	1:45:51 PM	BCl3 MFC set to  0.000000
2/29/2012	1:45:51 PM	PH3 MFC set to  0.000000
2/29/2012	1:45:51 PM	SiCl4 MFC set to  0.000000
2/29/2012	1:45:51 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	1:45:52 PM	Tube furnace set to 0
2/29/2012	1:46:22 PM	H2 valve closed
2/29/2012	1:46:22 PM	BCl3 valve closed
2/29/2012	1:46:22 PM	PH3 valve closed
2/29/2012	1:46:22 PM	SiCl4 pre valve closed
2/29/2012	1:46:22 PM	SiCl4 post valve closed
2/29/2012	1:46:22 PM	Bypass valve closed
2/29/2012	1:46:22 PM	Bubbler valve closed
2/29/2012	1:46:22 PM	Helium valve opened
2/29/2012	1:46:22 PM	Main Vac valve opened
2/29/2012	1:46:22 PM	Helium MFC set to  20.000000
2/29/2012	1:46:22 PM	H2 MFC set to  0.000000
2/29/2012	1:46:22 PM	BCl3 MFC set to  0.000000
2/29/2012	1:46:22 PM	PH3 MFC set to  0.000000
2/29/2012	1:46:22 PM	SiCl4 MFC set to  0.000000
2/29/2012	1:46:22 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	1:46:22 PM	Tube furnace set to 0
2/29/2012	1:46:52 PM	Helium valve closed
2/29/2012	1:46:52 PM	H2 valve closed
2/29/2012	1:46:52 PM	BCl3 valve closed
2/29/2012	1:46:52 PM	PH3 valve closed
2/29/2012	1:46:52 PM	SiCl4 pre valve closed
2/29/2012	1:46:52 PM	SiCl4 post valve closed
2/29/2012	1:46:52 PM	Bypass valve closed
2/29/2012	1:46:52 PM	Bubbler valve closed
2/29/2012	1:46:52 PM	Main Vac valve opened
2/29/2012	1:46:52 PM	Helium MFC set to  0.000000
2/29/2012	1:46:52 PM	H2 MFC set to  0.000000
2/29/2012	1:46:52 PM	BCl3 MFC set to  0.000000
2/29/2012	1:46:52 PM	PH3 MFC set to  0.000000
2/29/2012	1:46:52 PM	SiCl4 MFC set to  0.000000
2/29/2012	1:46:52 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	1:46:52 PM	Tube furnace set to 0
2/29/2012	1:47:22 PM	H2 valve closed
2/29/2012	1:47:22 PM	BCl3 valve closed
2/29/2012	1:47:22 PM	PH3 valve closed
2/29/2012	1:47:22 PM	SiCl4 pre valve closed
2/29/2012	1:47:22 PM	SiCl4 post valve closed
2/29/2012	1:47:22 PM	Bypass valve closed
2/29/2012	1:47:22 PM	Bubbler valve closed
2/29/2012	1:47:22 PM	Helium valve opened
2/29/2012	1:47:22 PM	Main Vac valve opened
2/29/2012	1:47:22 PM	Helium MFC set to  20.000000
2/29/2012	1:47:22 PM	H2 MFC set to  0.000000
2/29/2012	1:47:22 PM	BCl3 MFC set to  0.000000
2/29/2012	1:47:22 PM	PH3 MFC set to  0.000000
2/29/2012	1:47:22 PM	SiCl4 MFC set to  0.000000
2/29/2012	1:47:22 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	1:47:22 PM	Tube furnace set to 0
2/29/2012	1:47:52 PM	Helium valve closed
2/29/2012	1:47:52 PM	H2 valve closed
2/29/2012	1:47:52 PM	BCl3 valve closed
2/29/2012	1:47:52 PM	PH3 valve closed
2/29/2012	1:47:52 PM	SiCl4 pre valve closed
2/29/2012	1:47:52 PM	SiCl4 post valve closed
2/29/2012	1:47:52 PM	Bypass valve closed
2/29/2012	1:47:52 PM	Bubbler valve closed
2/29/2012	1:47:52 PM	Main Vac valve opened
2/29/2012	1:47:52 PM	Helium MFC set to  0.000000
2/29/2012	1:47:52 PM	H2 MFC set to  0.000000
2/29/2012	1:47:52 PM	BCl3 MFC set to  0.000000
2/29/2012	1:47:52 PM	PH3 MFC set to  0.000000
2/29/2012	1:47:52 PM	SiCl4 MFC set to  0.000000
2/29/2012	1:47:52 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	1:47:52 PM	Tube furnace set to 0
2/29/2012	1:48:22 PM	H2 valve closed
2/29/2012	1:48:22 PM	BCl3 valve closed
2/29/2012	1:48:22 PM	PH3 valve closed
2/29/2012	1:48:22 PM	SiCl4 pre valve closed
2/29/2012	1:48:22 PM	SiCl4 post valve closed
2/29/2012	1:48:22 PM	Bypass valve closed
2/29/2012	1:48:22 PM	Bubbler valve closed
2/29/2012	1:48:22 PM	Helium valve opened
2/29/2012	1:48:22 PM	Main Vac valve opened
2/29/2012	1:48:22 PM	Helium MFC set to  20.000000
2/29/2012	1:48:22 PM	H2 MFC set to  0.000000
2/29/2012	1:48:22 PM	BCl3 MFC set to  0.000000
2/29/2012	1:48:22 PM	PH3 MFC set to  0.000000
2/29/2012	1:48:22 PM	SiCl4 MFC set to  0.000000
2/29/2012	1:48:22 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	1:48:23 PM	Tube furnace set to 0
2/29/2012	1:48:53 PM	Helium valve closed
2/29/2012	1:48:53 PM	H2 valve closed
2/29/2012	1:48:53 PM	BCl3 valve closed
2/29/2012	1:48:53 PM	PH3 valve closed
2/29/2012	1:48:53 PM	SiCl4 pre valve closed
2/29/2012	1:48:53 PM	SiCl4 post valve closed
2/29/2012	1:48:53 PM	Bypass valve closed
2/29/2012	1:48:53 PM	Bubbler valve closed
2/29/2012	1:48:53 PM	Main Vac valve opened
2/29/2012	1:48:53 PM	Helium MFC set to  0.000000
2/29/2012	1:48:53 PM	H2 MFC set to  0.000000
2/29/2012	1:48:53 PM	BCl3 MFC set to  0.000000
2/29/2012	1:48:53 PM	PH3 MFC set to  0.000000
2/29/2012	1:48:53 PM	SiCl4 MFC set to  0.000000
2/29/2012	1:48:53 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	1:48:53 PM	Tube furnace set to 0
2/29/2012	1:49:23 PM	H2 valve closed
2/29/2012	1:49:23 PM	BCl3 valve closed
2/29/2012	1:49:23 PM	PH3 valve closed
2/29/2012	1:49:23 PM	SiCl4 pre valve closed
2/29/2012	1:49:23 PM	SiCl4 post valve closed
2/29/2012	1:49:23 PM	Bypass valve closed
2/29/2012	1:49:23 PM	Bubbler valve closed
2/29/2012	1:49:23 PM	Helium valve opened
2/29/2012	1:49:23 PM	Main Vac valve opened
2/29/2012	1:49:23 PM	Helium MFC set to  20.000000
2/29/2012	1:49:23 PM	H2 MFC set to  0.000000
2/29/2012	1:49:23 PM	BCl3 MFC set to  0.000000
2/29/2012	1:49:23 PM	PH3 MFC set to  0.000000
2/29/2012	1:49:23 PM	SiCl4 MFC set to  0.000000
2/29/2012	1:49:23 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	1:49:23 PM	Tube furnace set to 0
2/29/2012	1:49:53 PM	Helium valve closed
2/29/2012	1:49:53 PM	H2 valve closed
2/29/2012	1:49:53 PM	BCl3 valve closed
2/29/2012	1:49:53 PM	PH3 valve closed
2/29/2012	1:49:53 PM	SiCl4 pre valve closed
2/29/2012	1:49:53 PM	SiCl4 post valve closed
2/29/2012	1:49:53 PM	Bypass valve closed
2/29/2012	1:49:53 PM	Bubbler valve closed
2/29/2012	1:49:53 PM	Main Vac valve opened
2/29/2012	1:49:53 PM	Helium MFC set to  0.000000
2/29/2012	1:49:53 PM	H2 MFC set to  0.000000
2/29/2012	1:49:53 PM	BCl3 MFC set to  0.000000
2/29/2012	1:49:53 PM	PH3 MFC set to  0.000000
2/29/2012	1:49:53 PM	SiCl4 MFC set to  0.000000
2/29/2012	1:49:53 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	1:49:53 PM	Tube furnace set to 0
2/29/2012	1:50:23 PM	H2 valve closed
2/29/2012	1:50:23 PM	BCl3 valve closed
2/29/2012	1:50:23 PM	PH3 valve closed
2/29/2012	1:50:23 PM	SiCl4 pre valve closed
2/29/2012	1:50:23 PM	SiCl4 post valve closed
2/29/2012	1:50:23 PM	Bypass valve closed
2/29/2012	1:50:23 PM	Bubbler valve closed
2/29/2012	1:50:23 PM	Helium valve opened
2/29/2012	1:50:23 PM	Main Vac valve opened
2/29/2012	1:50:23 PM	Helium MFC set to  20.000000
2/29/2012	1:50:23 PM	H2 MFC set to  0.000000
2/29/2012	1:50:23 PM	BCl3 MFC set to  0.000000
2/29/2012	1:50:23 PM	PH3 MFC set to  0.000000
2/29/2012	1:50:23 PM	SiCl4 MFC set to  0.000000
2/29/2012	1:50:23 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	1:50:23 PM	Tube furnace set to 0
2/29/2012	1:50:53 PM	Helium valve closed
2/29/2012	1:50:53 PM	H2 valve closed
2/29/2012	1:50:53 PM	BCl3 valve closed
2/29/2012	1:50:53 PM	PH3 valve closed
2/29/2012	1:50:53 PM	SiCl4 pre valve closed
2/29/2012	1:50:53 PM	SiCl4 post valve closed
2/29/2012	1:50:53 PM	Bypass valve closed
2/29/2012	1:50:53 PM	Bubbler valve closed
2/29/2012	1:50:53 PM	Main Vac valve opened
2/29/2012	1:50:53 PM	Helium MFC set to  0.000000
2/29/2012	1:50:53 PM	H2 MFC set to  0.000000
2/29/2012	1:50:53 PM	BCl3 MFC set to  0.000000
2/29/2012	1:50:53 PM	PH3 MFC set to  0.000000
2/29/2012	1:50:53 PM	SiCl4 MFC set to  0.000000
2/29/2012	1:50:53 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	1:50:54 PM	Tube furnace set to 0
2/29/2012	1:51:24 PM	H2 valve closed
2/29/2012	1:51:24 PM	BCl3 valve closed
2/29/2012	1:51:24 PM	PH3 valve closed
2/29/2012	1:51:24 PM	SiCl4 pre valve closed
2/29/2012	1:51:24 PM	SiCl4 post valve closed
2/29/2012	1:51:24 PM	Bypass valve closed
2/29/2012	1:51:24 PM	Bubbler valve closed
2/29/2012	1:51:24 PM	Helium valve opened
2/29/2012	1:51:24 PM	Main Vac valve opened
2/29/2012	1:51:24 PM	Helium MFC set to  20.000000
2/29/2012	1:51:24 PM	H2 MFC set to  0.000000
2/29/2012	1:51:24 PM	BCl3 MFC set to  0.000000
2/29/2012	1:51:24 PM	PH3 MFC set to  0.000000
2/29/2012	1:51:24 PM	SiCl4 MFC set to  0.000000
2/29/2012	1:51:24 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	1:51:24 PM	Tube furnace set to 0
2/29/2012	1:51:54 PM	Helium valve closed
2/29/2012	1:51:54 PM	H2 valve closed
2/29/2012	1:51:54 PM	BCl3 valve closed
2/29/2012	1:51:54 PM	PH3 valve closed
2/29/2012	1:51:54 PM	SiCl4 pre valve closed
2/29/2012	1:51:54 PM	SiCl4 post valve closed
2/29/2012	1:51:54 PM	Bypass valve closed
2/29/2012	1:51:54 PM	Bubbler valve closed
2/29/2012	1:51:54 PM	Main Vac valve opened
2/29/2012	1:51:54 PM	Helium MFC set to  0.000000
2/29/2012	1:51:54 PM	H2 MFC set to  0.000000
2/29/2012	1:51:54 PM	BCl3 MFC set to  0.000000
2/29/2012	1:51:54 PM	PH3 MFC set to  0.000000
2/29/2012	1:51:54 PM	SiCl4 MFC set to  0.000000
2/29/2012	1:51:54 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	1:51:54 PM	Tube furnace set to 0
2/29/2012	1:52:24 PM	H2 valve closed
2/29/2012	1:52:24 PM	BCl3 valve closed
2/29/2012	1:52:24 PM	PH3 valve closed
2/29/2012	1:52:24 PM	SiCl4 pre valve closed
2/29/2012	1:52:24 PM	SiCl4 post valve closed
2/29/2012	1:52:24 PM	Bypass valve closed
2/29/2012	1:52:24 PM	Bubbler valve closed
2/29/2012	1:52:24 PM	Helium valve opened
2/29/2012	1:52:24 PM	Main Vac valve opened
2/29/2012	1:52:24 PM	Helium MFC set to  20.000000
2/29/2012	1:52:24 PM	H2 MFC set to  0.000000
2/29/2012	1:52:24 PM	BCl3 MFC set to  0.000000
2/29/2012	1:52:24 PM	PH3 MFC set to  0.000000
2/29/2012	1:52:24 PM	SiCl4 MFC set to  0.000000
2/29/2012	1:52:24 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	1:52:24 PM	Tube furnace set to 0
2/29/2012	1:52:54 PM	Helium valve closed
2/29/2012	1:52:54 PM	H2 valve closed
2/29/2012	1:52:54 PM	BCl3 valve closed
2/29/2012	1:52:54 PM	PH3 valve closed
2/29/2012	1:52:54 PM	SiCl4 pre valve closed
2/29/2012	1:52:54 PM	SiCl4 post valve closed
2/29/2012	1:52:54 PM	Bypass valve closed
2/29/2012	1:52:54 PM	Bubbler valve closed
2/29/2012	1:52:54 PM	Main Vac valve opened
2/29/2012	1:52:54 PM	Helium MFC set to  0.000000
2/29/2012	1:52:54 PM	H2 MFC set to  0.000000
2/29/2012	1:52:54 PM	BCl3 MFC set to  0.000000
2/29/2012	1:52:54 PM	PH3 MFC set to  0.000000
2/29/2012	1:52:54 PM	SiCl4 MFC set to  0.000000
2/29/2012	1:52:54 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	1:52:54 PM	Tube furnace set to 0
2/29/2012	1:53:25 PM	H2 valve closed
2/29/2012	1:53:25 PM	BCl3 valve closed
2/29/2012	1:53:25 PM	PH3 valve closed
2/29/2012	1:53:25 PM	SiCl4 pre valve closed
2/29/2012	1:53:25 PM	SiCl4 post valve closed
2/29/2012	1:53:25 PM	Bypass valve closed
2/29/2012	1:53:25 PM	Bubbler valve closed
2/29/2012	1:53:25 PM	Helium valve opened
2/29/2012	1:53:25 PM	Main Vac valve opened
2/29/2012	1:53:25 PM	Helium MFC set to  20.000000
2/29/2012	1:53:25 PM	H2 MFC set to  0.000000
2/29/2012	1:53:25 PM	BCl3 MFC set to  0.000000
2/29/2012	1:53:25 PM	PH3 MFC set to  0.000000
2/29/2012	1:53:25 PM	SiCl4 MFC set to  0.000000
2/29/2012	1:53:25 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	1:53:25 PM	Tube furnace set to 0
2/29/2012	1:53:55 PM	Helium valve closed
2/29/2012	1:53:55 PM	H2 valve closed
2/29/2012	1:53:55 PM	BCl3 valve closed
2/29/2012	1:53:55 PM	PH3 valve closed
2/29/2012	1:53:55 PM	SiCl4 pre valve closed
2/29/2012	1:53:55 PM	SiCl4 post valve closed
2/29/2012	1:53:55 PM	Bypass valve closed
2/29/2012	1:53:55 PM	Bubbler valve closed
2/29/2012	1:53:55 PM	Main Vac valve opened
2/29/2012	1:53:55 PM	Helium MFC set to  0.000000
2/29/2012	1:53:55 PM	H2 MFC set to  0.000000
2/29/2012	1:53:55 PM	BCl3 MFC set to  0.000000
2/29/2012	1:53:55 PM	PH3 MFC set to  0.000000
2/29/2012	1:53:55 PM	SiCl4 MFC set to  0.000000
2/29/2012	1:53:55 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	1:53:55 PM	Tube furnace set to 0
2/29/2012	1:54:25 PM	H2 valve closed
2/29/2012	1:54:25 PM	BCl3 valve closed
2/29/2012	1:54:25 PM	PH3 valve closed
2/29/2012	1:54:25 PM	SiCl4 pre valve closed
2/29/2012	1:54:25 PM	SiCl4 post valve closed
2/29/2012	1:54:25 PM	Bypass valve closed
2/29/2012	1:54:25 PM	Bubbler valve closed
2/29/2012	1:54:25 PM	Helium valve opened
2/29/2012	1:54:25 PM	Main Vac valve opened
2/29/2012	1:54:25 PM	Helium MFC set to  20.000000
2/29/2012	1:54:25 PM	H2 MFC set to  0.000000
2/29/2012	1:54:25 PM	BCl3 MFC set to  0.000000
2/29/2012	1:54:25 PM	PH3 MFC set to  0.000000
2/29/2012	1:54:25 PM	SiCl4 MFC set to  0.000000
2/29/2012	1:54:25 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	1:54:25 PM	Tube furnace set to 0
2/29/2012	1:54:55 PM	Helium valve closed
2/29/2012	1:54:55 PM	H2 valve closed
2/29/2012	1:54:55 PM	BCl3 valve closed
2/29/2012	1:54:55 PM	PH3 valve closed
2/29/2012	1:54:55 PM	SiCl4 pre valve closed
2/29/2012	1:54:55 PM	SiCl4 post valve closed
2/29/2012	1:54:55 PM	Bypass valve closed
2/29/2012	1:54:55 PM	Bubbler valve closed
2/29/2012	1:54:55 PM	Main Vac valve opened
2/29/2012	1:54:55 PM	Helium MFC set to  0.000000
2/29/2012	1:54:55 PM	H2 MFC set to  0.000000
2/29/2012	1:54:55 PM	BCl3 MFC set to  0.000000
2/29/2012	1:54:55 PM	PH3 MFC set to  0.000000
2/29/2012	1:54:55 PM	SiCl4 MFC set to  0.000000
2/29/2012	1:54:55 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	1:54:55 PM	Tube furnace set to 0
2/29/2012	1:55:25 PM	H2 valve closed
2/29/2012	1:55:25 PM	BCl3 valve closed
2/29/2012	1:55:25 PM	PH3 valve closed
2/29/2012	1:55:25 PM	SiCl4 pre valve closed
2/29/2012	1:55:25 PM	SiCl4 post valve closed
2/29/2012	1:55:25 PM	Bypass valve closed
2/29/2012	1:55:25 PM	Bubbler valve closed
2/29/2012	1:55:25 PM	Helium valve opened
2/29/2012	1:55:25 PM	Main Vac valve opened
2/29/2012	1:55:25 PM	Helium MFC set to  20.000000
2/29/2012	1:55:25 PM	H2 MFC set to  0.000000
2/29/2012	1:55:25 PM	BCl3 MFC set to  0.000000
2/29/2012	1:55:25 PM	PH3 MFC set to  0.000000
2/29/2012	1:55:25 PM	SiCl4 MFC set to  0.000000
2/29/2012	1:55:25 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	1:55:26 PM	Tube furnace set to 0
2/29/2012	1:55:56 PM	Helium valve closed
2/29/2012	1:55:56 PM	H2 valve closed
2/29/2012	1:55:56 PM	BCl3 valve closed
2/29/2012	1:55:56 PM	PH3 valve closed
2/29/2012	1:55:56 PM	SiCl4 pre valve closed
2/29/2012	1:55:56 PM	SiCl4 post valve closed
2/29/2012	1:55:56 PM	Bypass valve closed
2/29/2012	1:55:56 PM	Bubbler valve closed
2/29/2012	1:55:56 PM	Main Vac valve opened
2/29/2012	1:55:56 PM	Helium MFC set to  0.000000
2/29/2012	1:55:56 PM	H2 MFC set to  0.000000
2/29/2012	1:55:56 PM	BCl3 MFC set to  0.000000
2/29/2012	1:55:56 PM	PH3 MFC set to  0.000000
2/29/2012	1:55:56 PM	SiCl4 MFC set to  0.000000
2/29/2012	1:55:56 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	1:55:56 PM	Tube furnace set to 0
2/29/2012	1:55:57 PM	Run finished at 1:55 PM
2/29/2012	1:55:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/29/2012	1:56:46 PM	Main Vac valve closed
2/29/2012	1:56:59 PM	Main Vac valve opened
2/29/2012	1:57:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/29/2012	1:57:24 PM	Recipe started at 1:57 PM
2/29/2012	1:57:24 PM	Helium valve closed
2/29/2012	1:57:24 PM	H2 valve closed
2/29/2012	1:57:24 PM	BCl3 valve closed
2/29/2012	1:57:24 PM	PH3 valve closed
2/29/2012	1:57:24 PM	SiCl4 pre valve closed
2/29/2012	1:57:24 PM	SiCl4 post valve closed
2/29/2012	1:57:24 PM	Main Vac valve closed
2/29/2012	1:57:24 PM	Bubbler valve closed
2/29/2012	1:57:24 PM	Bypass valve opened
2/29/2012	1:57:24 PM	Helium MFC set to  0.000000
2/29/2012	1:57:25 PM	H2 MFC set to  0.000000
2/29/2012	1:57:25 PM	BCl3 MFC set to  0.000000
2/29/2012	1:57:25 PM	PH3 MFC set to  0.000000
2/29/2012	1:57:25 PM	SiCl4 MFC set to  0.000000
2/29/2012	1:57:25 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	1:57:25 PM	Tube furnace set to 0
2/29/2012	1:57:25 PM	Helium valve closed
2/29/2012	1:57:25 PM	H2 valve closed
2/29/2012	1:57:25 PM	BCl3 valve closed
2/29/2012	1:57:25 PM	PH3 valve closed
2/29/2012	1:57:25 PM	SiCl4 pre valve closed
2/29/2012	1:57:25 PM	SiCl4 post valve closed
2/29/2012	1:57:25 PM	Main Vac valve closed
2/29/2012	1:57:25 PM	Bubbler valve closed
2/29/2012	1:57:25 PM	Bypass valve opened
2/29/2012	1:57:25 PM	Helium MFC set to  0.000000
2/29/2012	1:57:25 PM	H2 MFC set to  0.000000
2/29/2012	1:57:25 PM	BCl3 MFC set to  0.000000
2/29/2012	1:57:25 PM	PH3 MFC set to  0.000000
2/29/2012	1:57:25 PM	SiCl4 MFC set to  0.000000
2/29/2012	1:57:25 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	1:57:25 PM	Tube furnace set to 0
2/29/2012	1:57:25 PM	Helium valve closed
2/29/2012	1:57:25 PM	H2 valve closed
2/29/2012	1:57:25 PM	BCl3 valve closed
2/29/2012	1:57:25 PM	PH3 valve closed
2/29/2012	1:57:25 PM	SiCl4 pre valve closed
2/29/2012	1:57:25 PM	SiCl4 post valve closed
2/29/2012	1:57:25 PM	Bypass valve closed
2/29/2012	1:57:25 PM	Bubbler valve closed
2/29/2012	1:57:25 PM	Main Vac valve opened
2/29/2012	1:57:25 PM	Helium MFC set to  0.000000
2/29/2012	1:57:25 PM	H2 MFC set to  0.000000
2/29/2012	1:57:25 PM	BCl3 MFC set to  0.000000
2/29/2012	1:57:25 PM	PH3 MFC set to  0.000000
2/29/2012	1:57:25 PM	SiCl4 MFC set to  0.000000
2/29/2012	1:57:25 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	1:57:26 PM	Tube furnace set to 0
2/29/2012	1:57:56 PM	H2 valve closed
2/29/2012	1:57:56 PM	BCl3 valve closed
2/29/2012	1:57:56 PM	PH3 valve closed
2/29/2012	1:57:56 PM	SiCl4 pre valve closed
2/29/2012	1:57:56 PM	SiCl4 post valve closed
2/29/2012	1:57:56 PM	Bypass valve closed
2/29/2012	1:57:56 PM	Bubbler valve closed
2/29/2012	1:57:56 PM	Helium valve opened
2/29/2012	1:57:56 PM	Main Vac valve opened
2/29/2012	1:57:56 PM	Helium MFC set to  20.000000
2/29/2012	1:57:56 PM	H2 MFC set to  0.000000
2/29/2012	1:57:56 PM	BCl3 MFC set to  0.000000
2/29/2012	1:57:56 PM	PH3 MFC set to  0.000000
2/29/2012	1:57:56 PM	SiCl4 MFC set to  0.000000
2/29/2012	1:57:56 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	1:57:56 PM	Tube furnace set to 0
2/29/2012	1:58:26 PM	Helium valve closed
2/29/2012	1:58:26 PM	H2 valve closed
2/29/2012	1:58:26 PM	BCl3 valve closed
2/29/2012	1:58:26 PM	PH3 valve closed
2/29/2012	1:58:26 PM	SiCl4 pre valve closed
2/29/2012	1:58:26 PM	SiCl4 post valve closed
2/29/2012	1:58:26 PM	Bypass valve closed
2/29/2012	1:58:26 PM	Bubbler valve closed
2/29/2012	1:58:26 PM	Main Vac valve opened
2/29/2012	1:58:26 PM	Helium MFC set to  0.000000
2/29/2012	1:58:26 PM	H2 MFC set to  0.000000
2/29/2012	1:58:26 PM	BCl3 MFC set to  0.000000
2/29/2012	1:58:26 PM	PH3 MFC set to  0.000000
2/29/2012	1:58:26 PM	SiCl4 MFC set to  0.000000
2/29/2012	1:58:26 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	1:58:26 PM	Tube furnace set to 0
2/29/2012	1:58:56 PM	H2 valve closed
2/29/2012	1:58:56 PM	BCl3 valve closed
2/29/2012	1:58:56 PM	PH3 valve closed
2/29/2012	1:58:56 PM	SiCl4 pre valve closed
2/29/2012	1:58:56 PM	SiCl4 post valve closed
2/29/2012	1:58:56 PM	Bypass valve closed
2/29/2012	1:58:56 PM	Bubbler valve closed
2/29/2012	1:58:56 PM	Helium valve opened
2/29/2012	1:58:56 PM	Main Vac valve opened
2/29/2012	1:58:56 PM	Helium MFC set to  20.000000
2/29/2012	1:58:56 PM	H2 MFC set to  0.000000
2/29/2012	1:58:56 PM	BCl3 MFC set to  0.000000
2/29/2012	1:58:56 PM	PH3 MFC set to  0.000000
2/29/2012	1:58:56 PM	SiCl4 MFC set to  0.000000
2/29/2012	1:58:56 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	1:58:56 PM	Tube furnace set to 0
2/29/2012	1:59:26 PM	Helium valve closed
2/29/2012	1:59:26 PM	H2 valve closed
2/29/2012	1:59:26 PM	BCl3 valve closed
2/29/2012	1:59:26 PM	PH3 valve closed
2/29/2012	1:59:26 PM	SiCl4 pre valve closed
2/29/2012	1:59:26 PM	SiCl4 post valve closed
2/29/2012	1:59:26 PM	Bypass valve closed
2/29/2012	1:59:26 PM	Bubbler valve closed
2/29/2012	1:59:26 PM	Main Vac valve opened
2/29/2012	1:59:26 PM	Helium MFC set to  0.000000
2/29/2012	1:59:26 PM	H2 MFC set to  0.000000
2/29/2012	1:59:26 PM	BCl3 MFC set to  0.000000
2/29/2012	1:59:26 PM	PH3 MFC set to  0.000000
2/29/2012	1:59:26 PM	SiCl4 MFC set to  0.000000
2/29/2012	1:59:26 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	1:59:26 PM	Tube furnace set to 0
2/29/2012	1:59:56 PM	H2 valve closed
2/29/2012	1:59:56 PM	BCl3 valve closed
2/29/2012	1:59:56 PM	PH3 valve closed
2/29/2012	1:59:56 PM	SiCl4 pre valve closed
2/29/2012	1:59:56 PM	SiCl4 post valve closed
2/29/2012	1:59:56 PM	Bypass valve closed
2/29/2012	1:59:56 PM	Bubbler valve closed
2/29/2012	1:59:56 PM	Helium valve opened
2/29/2012	1:59:56 PM	Main Vac valve opened
2/29/2012	1:59:56 PM	Helium MFC set to  20.000000
2/29/2012	1:59:56 PM	H2 MFC set to  0.000000
2/29/2012	1:59:56 PM	BCl3 MFC set to  0.000000
2/29/2012	1:59:56 PM	PH3 MFC set to  0.000000
2/29/2012	1:59:56 PM	SiCl4 MFC set to  0.000000
2/29/2012	1:59:56 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	1:59:57 PM	Tube furnace set to 0
2/29/2012	2:00:27 PM	Helium valve closed
2/29/2012	2:00:27 PM	H2 valve closed
2/29/2012	2:00:27 PM	BCl3 valve closed
2/29/2012	2:00:27 PM	PH3 valve closed
2/29/2012	2:00:27 PM	SiCl4 pre valve closed
2/29/2012	2:00:27 PM	SiCl4 post valve closed
2/29/2012	2:00:27 PM	Bypass valve closed
2/29/2012	2:00:27 PM	Bubbler valve closed
2/29/2012	2:00:27 PM	Main Vac valve opened
2/29/2012	2:00:27 PM	Helium MFC set to  0.000000
2/29/2012	2:00:27 PM	H2 MFC set to  0.000000
2/29/2012	2:00:27 PM	BCl3 MFC set to  0.000000
2/29/2012	2:00:27 PM	PH3 MFC set to  0.000000
2/29/2012	2:00:27 PM	SiCl4 MFC set to  0.000000
2/29/2012	2:00:27 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	2:00:27 PM	Tube furnace set to 0
2/29/2012	2:00:57 PM	H2 valve closed
2/29/2012	2:00:57 PM	BCl3 valve closed
2/29/2012	2:00:57 PM	PH3 valve closed
2/29/2012	2:00:57 PM	SiCl4 pre valve closed
2/29/2012	2:00:57 PM	SiCl4 post valve closed
2/29/2012	2:00:57 PM	Bypass valve closed
2/29/2012	2:00:57 PM	Bubbler valve closed
2/29/2012	2:00:57 PM	Helium valve opened
2/29/2012	2:00:57 PM	Main Vac valve opened
2/29/2012	2:00:57 PM	Helium MFC set to  20.000000
2/29/2012	2:00:57 PM	H2 MFC set to  0.000000
2/29/2012	2:00:57 PM	BCl3 MFC set to  0.000000
2/29/2012	2:00:57 PM	PH3 MFC set to  0.000000
2/29/2012	2:00:57 PM	SiCl4 MFC set to  0.000000
2/29/2012	2:00:57 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	2:00:57 PM	Tube furnace set to 0
2/29/2012	2:01:27 PM	Helium valve closed
2/29/2012	2:01:27 PM	H2 valve closed
2/29/2012	2:01:27 PM	BCl3 valve closed
2/29/2012	2:01:27 PM	PH3 valve closed
2/29/2012	2:01:27 PM	SiCl4 pre valve closed
2/29/2012	2:01:27 PM	SiCl4 post valve closed
2/29/2012	2:01:27 PM	Bypass valve closed
2/29/2012	2:01:27 PM	Bubbler valve closed
2/29/2012	2:01:27 PM	Main Vac valve opened
2/29/2012	2:01:27 PM	Helium MFC set to  0.000000
2/29/2012	2:01:27 PM	H2 MFC set to  0.000000
2/29/2012	2:01:27 PM	BCl3 MFC set to  0.000000
2/29/2012	2:01:27 PM	PH3 MFC set to  0.000000
2/29/2012	2:01:27 PM	SiCl4 MFC set to  0.000000
2/29/2012	2:01:27 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	2:01:27 PM	Tube furnace set to 0
2/29/2012	2:01:57 PM	H2 valve closed
2/29/2012	2:01:57 PM	BCl3 valve closed
2/29/2012	2:01:57 PM	PH3 valve closed
2/29/2012	2:01:57 PM	SiCl4 pre valve closed
2/29/2012	2:01:57 PM	SiCl4 post valve closed
2/29/2012	2:01:57 PM	Bypass valve closed
2/29/2012	2:01:57 PM	Bubbler valve closed
2/29/2012	2:01:57 PM	Helium valve opened
2/29/2012	2:01:57 PM	Main Vac valve opened
2/29/2012	2:01:57 PM	Helium MFC set to  20.000000
2/29/2012	2:01:57 PM	H2 MFC set to  0.000000
2/29/2012	2:01:57 PM	BCl3 MFC set to  0.000000
2/29/2012	2:01:57 PM	PH3 MFC set to  0.000000
2/29/2012	2:01:57 PM	SiCl4 MFC set to  0.000000
2/29/2012	2:01:57 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	2:01:57 PM	Tube furnace set to 0
2/29/2012	2:02:27 PM	Helium valve closed
2/29/2012	2:02:27 PM	H2 valve closed
2/29/2012	2:02:27 PM	BCl3 valve closed
2/29/2012	2:02:27 PM	PH3 valve closed
2/29/2012	2:02:27 PM	SiCl4 pre valve closed
2/29/2012	2:02:27 PM	SiCl4 post valve closed
2/29/2012	2:02:27 PM	Bypass valve closed
2/29/2012	2:02:27 PM	Bubbler valve closed
2/29/2012	2:02:27 PM	Main Vac valve opened
2/29/2012	2:02:27 PM	Helium MFC set to  0.000000
2/29/2012	2:02:27 PM	H2 MFC set to  0.000000
2/29/2012	2:02:27 PM	BCl3 MFC set to  0.000000
2/29/2012	2:02:27 PM	PH3 MFC set to  0.000000
2/29/2012	2:02:27 PM	SiCl4 MFC set to  0.000000
2/29/2012	2:02:27 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	2:02:28 PM	Tube furnace set to 0
2/29/2012	2:02:58 PM	H2 valve closed
2/29/2012	2:02:58 PM	BCl3 valve closed
2/29/2012	2:02:58 PM	PH3 valve closed
2/29/2012	2:02:58 PM	SiCl4 pre valve closed
2/29/2012	2:02:58 PM	SiCl4 post valve closed
2/29/2012	2:02:58 PM	Bypass valve closed
2/29/2012	2:02:58 PM	Bubbler valve closed
2/29/2012	2:02:58 PM	Helium valve opened
2/29/2012	2:02:58 PM	Main Vac valve opened
2/29/2012	2:02:58 PM	Helium MFC set to  20.000000
2/29/2012	2:02:58 PM	H2 MFC set to  0.000000
2/29/2012	2:02:58 PM	BCl3 MFC set to  0.000000
2/29/2012	2:02:58 PM	PH3 MFC set to  0.000000
2/29/2012	2:02:58 PM	SiCl4 MFC set to  0.000000
2/29/2012	2:02:58 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	2:02:58 PM	Tube furnace set to 0
2/29/2012	2:03:28 PM	Helium valve closed
2/29/2012	2:03:28 PM	H2 valve closed
2/29/2012	2:03:28 PM	BCl3 valve closed
2/29/2012	2:03:28 PM	PH3 valve closed
2/29/2012	2:03:28 PM	SiCl4 pre valve closed
2/29/2012	2:03:28 PM	SiCl4 post valve closed
2/29/2012	2:03:28 PM	Bypass valve closed
2/29/2012	2:03:28 PM	Bubbler valve closed
2/29/2012	2:03:28 PM	Main Vac valve opened
2/29/2012	2:03:28 PM	Helium MFC set to  0.000000
2/29/2012	2:03:28 PM	H2 MFC set to  0.000000
2/29/2012	2:03:28 PM	BCl3 MFC set to  0.000000
2/29/2012	2:03:28 PM	PH3 MFC set to  0.000000
2/29/2012	2:03:28 PM	SiCl4 MFC set to  0.000000
2/29/2012	2:03:28 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	2:03:28 PM	Tube furnace set to 0
2/29/2012	2:03:58 PM	H2 valve closed
2/29/2012	2:03:58 PM	BCl3 valve closed
2/29/2012	2:03:58 PM	PH3 valve closed
2/29/2012	2:03:58 PM	SiCl4 pre valve closed
2/29/2012	2:03:58 PM	SiCl4 post valve closed
2/29/2012	2:03:58 PM	Bypass valve closed
2/29/2012	2:03:58 PM	Bubbler valve closed
2/29/2012	2:03:58 PM	Helium valve opened
2/29/2012	2:03:58 PM	Main Vac valve opened
2/29/2012	2:03:58 PM	Helium MFC set to  20.000000
2/29/2012	2:03:58 PM	H2 MFC set to  0.000000
2/29/2012	2:03:58 PM	BCl3 MFC set to  0.000000
2/29/2012	2:03:58 PM	PH3 MFC set to  0.000000
2/29/2012	2:03:58 PM	SiCl4 MFC set to  0.000000
2/29/2012	2:03:58 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	2:03:58 PM	Tube furnace set to 0
2/29/2012	2:04:28 PM	Helium valve closed
2/29/2012	2:04:28 PM	H2 valve closed
2/29/2012	2:04:28 PM	BCl3 valve closed
2/29/2012	2:04:28 PM	PH3 valve closed
2/29/2012	2:04:28 PM	SiCl4 pre valve closed
2/29/2012	2:04:28 PM	SiCl4 post valve closed
2/29/2012	2:04:28 PM	Bypass valve closed
2/29/2012	2:04:28 PM	Bubbler valve closed
2/29/2012	2:04:28 PM	Main Vac valve opened
2/29/2012	2:04:28 PM	Helium MFC set to  0.000000
2/29/2012	2:04:28 PM	H2 MFC set to  0.000000
2/29/2012	2:04:28 PM	BCl3 MFC set to  0.000000
2/29/2012	2:04:28 PM	PH3 MFC set to  0.000000
2/29/2012	2:04:28 PM	SiCl4 MFC set to  0.000000
2/29/2012	2:04:28 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	2:04:28 PM	Tube furnace set to 0
2/29/2012	2:04:58 PM	H2 valve closed
2/29/2012	2:04:58 PM	BCl3 valve closed
2/29/2012	2:04:58 PM	PH3 valve closed
2/29/2012	2:04:58 PM	SiCl4 pre valve closed
2/29/2012	2:04:58 PM	SiCl4 post valve closed
2/29/2012	2:04:58 PM	Bypass valve closed
2/29/2012	2:04:58 PM	Bubbler valve closed
2/29/2012	2:04:58 PM	Helium valve opened
2/29/2012	2:04:58 PM	Main Vac valve opened
2/29/2012	2:04:58 PM	Helium MFC set to  20.000000
2/29/2012	2:04:59 PM	H2 MFC set to  0.000000
2/29/2012	2:04:59 PM	BCl3 MFC set to  0.000000
2/29/2012	2:04:59 PM	PH3 MFC set to  0.000000
2/29/2012	2:04:59 PM	SiCl4 MFC set to  0.000000
2/29/2012	2:04:59 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	2:04:59 PM	Tube furnace set to 0
2/29/2012	2:05:29 PM	Helium valve closed
2/29/2012	2:05:29 PM	H2 valve closed
2/29/2012	2:05:29 PM	BCl3 valve closed
2/29/2012	2:05:29 PM	PH3 valve closed
2/29/2012	2:05:29 PM	SiCl4 pre valve closed
2/29/2012	2:05:29 PM	SiCl4 post valve closed
2/29/2012	2:05:29 PM	Bypass valve closed
2/29/2012	2:05:29 PM	Bubbler valve closed
2/29/2012	2:05:29 PM	Main Vac valve opened
2/29/2012	2:05:29 PM	Helium MFC set to  0.000000
2/29/2012	2:05:29 PM	H2 MFC set to  0.000000
2/29/2012	2:05:29 PM	BCl3 MFC set to  0.000000
2/29/2012	2:05:29 PM	PH3 MFC set to  0.000000
2/29/2012	2:05:29 PM	SiCl4 MFC set to  0.000000
2/29/2012	2:05:29 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	2:05:29 PM	Tube furnace set to 0
2/29/2012	2:05:59 PM	H2 valve closed
2/29/2012	2:05:59 PM	BCl3 valve closed
2/29/2012	2:05:59 PM	PH3 valve closed
2/29/2012	2:05:59 PM	SiCl4 pre valve closed
2/29/2012	2:05:59 PM	SiCl4 post valve closed
2/29/2012	2:05:59 PM	Bypass valve closed
2/29/2012	2:05:59 PM	Bubbler valve closed
2/29/2012	2:05:59 PM	Helium valve opened
2/29/2012	2:05:59 PM	Main Vac valve opened
2/29/2012	2:05:59 PM	Helium MFC set to  20.000000
2/29/2012	2:05:59 PM	H2 MFC set to  0.000000
2/29/2012	2:05:59 PM	BCl3 MFC set to  0.000000
2/29/2012	2:05:59 PM	PH3 MFC set to  0.000000
2/29/2012	2:05:59 PM	SiCl4 MFC set to  0.000000
2/29/2012	2:05:59 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	2:05:59 PM	Tube furnace set to 0
2/29/2012	2:06:29 PM	Helium valve closed
2/29/2012	2:06:29 PM	H2 valve closed
2/29/2012	2:06:29 PM	BCl3 valve closed
2/29/2012	2:06:29 PM	PH3 valve closed
2/29/2012	2:06:29 PM	SiCl4 pre valve closed
2/29/2012	2:06:29 PM	SiCl4 post valve closed
2/29/2012	2:06:29 PM	Bypass valve closed
2/29/2012	2:06:29 PM	Bubbler valve closed
2/29/2012	2:06:29 PM	Main Vac valve opened
2/29/2012	2:06:29 PM	Helium MFC set to  0.000000
2/29/2012	2:06:29 PM	H2 MFC set to  0.000000
2/29/2012	2:06:29 PM	BCl3 MFC set to  0.000000
2/29/2012	2:06:29 PM	PH3 MFC set to  0.000000
2/29/2012	2:06:29 PM	SiCl4 MFC set to  0.000000
2/29/2012	2:06:29 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	2:06:29 PM	Tube furnace set to 0
2/29/2012	2:06:59 PM	H2 valve closed
2/29/2012	2:06:59 PM	BCl3 valve closed
2/29/2012	2:06:59 PM	PH3 valve closed
2/29/2012	2:06:59 PM	SiCl4 pre valve closed
2/29/2012	2:06:59 PM	SiCl4 post valve closed
2/29/2012	2:06:59 PM	Bypass valve closed
2/29/2012	2:06:59 PM	Bubbler valve closed
2/29/2012	2:06:59 PM	Helium valve opened
2/29/2012	2:06:59 PM	Main Vac valve opened
2/29/2012	2:06:59 PM	Helium MFC set to  20.000000
2/29/2012	2:06:59 PM	H2 MFC set to  0.000000
2/29/2012	2:06:59 PM	BCl3 MFC set to  0.000000
2/29/2012	2:06:59 PM	PH3 MFC set to  0.000000
2/29/2012	2:06:59 PM	SiCl4 MFC set to  0.000000
2/29/2012	2:06:59 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	2:06:59 PM	Tube furnace set to 0
2/29/2012	2:07:30 PM	Helium valve closed
2/29/2012	2:07:30 PM	H2 valve closed
2/29/2012	2:07:30 PM	BCl3 valve closed
2/29/2012	2:07:30 PM	PH3 valve closed
2/29/2012	2:07:30 PM	SiCl4 pre valve closed
2/29/2012	2:07:30 PM	SiCl4 post valve closed
2/29/2012	2:07:30 PM	Bypass valve closed
2/29/2012	2:07:30 PM	Bubbler valve closed
2/29/2012	2:07:30 PM	Main Vac valve opened
2/29/2012	2:07:30 PM	Helium MFC set to  0.000000
2/29/2012	2:07:30 PM	H2 MFC set to  0.000000
2/29/2012	2:07:30 PM	BCl3 MFC set to  0.000000
2/29/2012	2:07:30 PM	PH3 MFC set to  0.000000
2/29/2012	2:07:30 PM	SiCl4 MFC set to  0.000000
2/29/2012	2:07:30 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	2:07:30 PM	Tube furnace set to 0
2/29/2012	2:07:31 PM	Run finished at 2:07 PM
2/29/2012	2:07:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/29/2012	2:14:06 PM	Main Vac valve closed
2/29/2012	2:14:06 PM	Main Vac valve opened
2/29/2012	2:14:12 PM	Main Vac valve closed
2/29/2012	2:14:25 PM	Main Vac valve opened
2/29/2012	2:19:18 PM	Recipe started at 2:19 PM
2/29/2012	2:19:18 PM	Helium valve closed
2/29/2012	2:19:18 PM	H2 valve closed
2/29/2012	2:19:18 PM	BCl3 valve closed
2/29/2012	2:19:18 PM	PH3 valve closed
2/29/2012	2:19:18 PM	SiCl4 pre valve closed
2/29/2012	2:19:18 PM	SiCl4 post valve closed
2/29/2012	2:19:18 PM	Main Vac valve closed
2/29/2012	2:19:18 PM	Bypass valve closed
2/29/2012	2:19:18 PM	Bubbler valve closed
2/29/2012	2:19:18 PM	Helium MFC set to  0.000000
2/29/2012	2:19:18 PM	H2 MFC set to  0.000000
2/29/2012	2:19:18 PM	BCl3 MFC set to  0.000000
2/29/2012	2:19:18 PM	PH3 MFC set to  0.000000
2/29/2012	2:19:18 PM	SiCl4 MFC set to  0.000000
2/29/2012	2:19:18 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	2:19:18 PM	Tube furnace set to 0
2/29/2012	2:19:21 PM	Helium valve closed
2/29/2012	2:19:21 PM	BCl3 valve closed
2/29/2012	2:19:21 PM	PH3 valve closed
2/29/2012	2:19:21 PM	SiCl4 pre valve closed
2/29/2012	2:19:21 PM	SiCl4 post valve closed
2/29/2012	2:19:21 PM	Main Vac valve closed
2/29/2012	2:19:21 PM	Bypass valve closed
2/29/2012	2:19:21 PM	Bubbler valve closed
2/29/2012	2:19:21 PM	H2 valve opened
2/29/2012	2:19:21 PM	Helium MFC set to  0.000000
2/29/2012	2:19:21 PM	H2 MFC set to  500.000000
2/29/2012	2:19:21 PM	BCl3 MFC set to  0.000000
2/29/2012	2:19:21 PM	PH3 MFC set to  0.000000
2/29/2012	2:19:21 PM	SiCl4 MFC set to  0.000000
2/29/2012	2:19:21 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	2:19:21 PM	Tube furnace set to 0
2/29/2012	2:20:26 PM	Helium valve closed
2/29/2012	2:20:26 PM	BCl3 valve closed
2/29/2012	2:20:26 PM	PH3 valve closed
2/29/2012	2:20:26 PM	SiCl4 pre valve closed
2/29/2012	2:20:26 PM	SiCl4 post valve closed
2/29/2012	2:20:26 PM	Main Vac valve closed
2/29/2012	2:20:26 PM	Bypass valve closed
2/29/2012	2:20:26 PM	H2 valve opened
2/29/2012	2:20:26 PM	Bubbler valve opened
2/29/2012	2:20:26 PM	Helium MFC set to  0.000000
2/29/2012	2:20:26 PM	H2 MFC set to  500.000000
2/29/2012	2:20:26 PM	BCl3 MFC set to  0.000000
2/29/2012	2:20:26 PM	PH3 MFC set to  0.000000
2/29/2012	2:20:26 PM	SiCl4 MFC set to  0.000000
2/29/2012	2:20:26 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	2:20:26 PM	Tube furnace set to 0
2/29/2012	2:20:27 PM	Helium valve closed
2/29/2012	2:20:27 PM	BCl3 valve closed
2/29/2012	2:20:27 PM	PH3 valve closed
2/29/2012	2:20:27 PM	SiCl4 pre valve closed
2/29/2012	2:20:27 PM	SiCl4 post valve closed
2/29/2012	2:20:27 PM	Main Vac valve closed
2/29/2012	2:20:27 PM	Bypass valve closed
2/29/2012	2:20:27 PM	H2 valve opened
2/29/2012	2:20:27 PM	Bubbler valve opened
2/29/2012	2:20:27 PM	Helium MFC set to  0.000000
2/29/2012	2:20:27 PM	H2 MFC set to  500.000000
2/29/2012	2:20:27 PM	BCl3 MFC set to  0.000000
2/29/2012	2:20:27 PM	PH3 MFC set to  0.000000
2/29/2012	2:20:27 PM	SiCl4 MFC set to  0.000000
2/29/2012	2:20:27 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	2:20:27 PM	Tube furnace set to 1000
2/29/2012	3:00:27 PM	Helium valve closed
2/29/2012	3:00:27 PM	PH3 valve closed
2/29/2012	3:00:27 PM	Main Vac valve closed
2/29/2012	3:00:27 PM	Bypass valve closed
2/29/2012	3:00:27 PM	H2 valve opened
2/29/2012	3:00:27 PM	BCl3 valve opened
2/29/2012	3:00:27 PM	SiCl4 pre valve opened
2/29/2012	3:00:27 PM	SiCl4 post valve opened
2/29/2012	3:00:27 PM	Bubbler valve opened
2/29/2012	3:00:27 PM	Helium MFC set to  0.000000
2/29/2012	3:00:27 PM	H2 MFC set to  500.000000
2/29/2012	3:00:27 PM	BCl3 MFC set to  1.500000
2/29/2012	3:00:27 PM	PH3 MFC set to  0.000000
2/29/2012	3:00:27 PM	SiCl4 MFC set to  50.000000
2/29/2012	3:00:27 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	3:00:27 PM	Tube furnace set to 1000
2/29/2012	3:13:27 PM	Helium valve closed
2/29/2012	3:13:27 PM	BCl3 valve closed
2/29/2012	3:13:27 PM	PH3 valve closed
2/29/2012	3:13:27 PM	SiCl4 pre valve closed
2/29/2012	3:13:27 PM	SiCl4 post valve closed
2/29/2012	3:13:27 PM	Main Vac valve closed
2/29/2012	3:13:27 PM	Bypass valve closed
2/29/2012	3:13:27 PM	H2 valve opened
2/29/2012	3:13:27 PM	Bubbler valve opened
2/29/2012	3:13:27 PM	Helium MFC set to  0.000000
2/29/2012	3:13:27 PM	H2 MFC set to  500.000000
2/29/2012	3:13:27 PM	BCl3 MFC set to  0.000000
2/29/2012	3:13:27 PM	PH3 MFC set to  0.000000
2/29/2012	3:13:27 PM	SiCl4 MFC set to  0.000000
2/29/2012	3:13:27 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	3:13:27 PM	Tube furnace set to 750
2/29/2012	3:18:27 PM	H2 valve closed
2/29/2012	3:18:27 PM	BCl3 valve closed
2/29/2012	3:18:27 PM	PH3 valve closed
2/29/2012	3:18:27 PM	SiCl4 pre valve closed
2/29/2012	3:18:27 PM	SiCl4 post valve closed
2/29/2012	3:18:27 PM	Main Vac valve closed
2/29/2012	3:18:27 PM	Bypass valve closed
2/29/2012	3:18:27 PM	Helium valve opened
2/29/2012	3:18:27 PM	Bubbler valve opened
2/29/2012	3:18:27 PM	Helium MFC set to  500.000000
2/29/2012	3:18:27 PM	H2 MFC set to  0.000000
2/29/2012	3:18:27 PM	BCl3 MFC set to  0.000000
2/29/2012	3:18:27 PM	PH3 MFC set to  0.000000
2/29/2012	3:18:27 PM	SiCl4 MFC set to  0.000000
2/29/2012	3:18:27 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	3:18:28 PM	Tube furnace set to 0
2/29/2012	3:38:27 PM	Helium valve closed
2/29/2012	3:38:27 PM	H2 valve closed
2/29/2012	3:38:27 PM	BCl3 valve closed
2/29/2012	3:38:27 PM	PH3 valve closed
2/29/2012	3:38:27 PM	SiCl4 pre valve closed
2/29/2012	3:38:27 PM	SiCl4 post valve closed
2/29/2012	3:38:27 PM	Main Vac valve closed
2/29/2012	3:38:28 PM	Bypass valve closed
2/29/2012	3:38:28 PM	Bubbler valve closed
2/29/2012	3:38:28 PM	Helium MFC set to  0.000000
2/29/2012	3:38:28 PM	H2 MFC set to  0.000000
2/29/2012	3:38:28 PM	BCl3 MFC set to  0.000000
2/29/2012	3:38:28 PM	PH3 MFC set to  0.000000
2/29/2012	3:38:28 PM	SiCl4 MFC set to  0.000000
2/29/2012	3:38:28 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	3:38:28 PM	Tube furnace set to 0
2/29/2012	3:38:29 PM	Run finished at 3:38 PM
2/29/2012	3:46:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/29/2012	3:46:52 PM	Recipe started at 3:46 PM
2/29/2012	3:46:52 PM	Helium valve closed
2/29/2012	3:46:52 PM	H2 valve closed
2/29/2012	3:46:52 PM	BCl3 valve closed
2/29/2012	3:46:52 PM	PH3 valve closed
2/29/2012	3:46:52 PM	SiCl4 pre valve closed
2/29/2012	3:46:52 PM	SiCl4 post valve closed
2/29/2012	3:46:52 PM	Main Vac valve closed
2/29/2012	3:46:52 PM	Bypass valve closed
2/29/2012	3:46:52 PM	Bubbler valve closed
2/29/2012	3:46:52 PM	Helium MFC set to  0.000000
2/29/2012	3:46:52 PM	H2 MFC set to  0.000000
2/29/2012	3:46:52 PM	BCl3 MFC set to  0.000000
2/29/2012	3:46:52 PM	PH3 MFC set to  0.000000
2/29/2012	3:46:52 PM	SiCl4 MFC set to  0.000000
2/29/2012	3:46:52 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	3:46:52 PM	Tube furnace set to 0
2/29/2012	3:46:55 PM	H2 valve closed
2/29/2012	3:46:55 PM	BCl3 valve closed
2/29/2012	3:46:55 PM	PH3 valve closed
2/29/2012	3:46:55 PM	SiCl4 pre valve closed
2/29/2012	3:46:55 PM	SiCl4 post valve closed
2/29/2012	3:46:55 PM	Main Vac valve closed
2/29/2012	3:46:55 PM	Bypass valve closed
2/29/2012	3:46:55 PM	Bubbler valve closed
2/29/2012	3:46:55 PM	Helium valve opened
2/29/2012	3:46:55 PM	Helium MFC set to  500.000000
2/29/2012	3:46:55 PM	H2 MFC set to  0.000000
2/29/2012	3:46:55 PM	BCl3 MFC set to  0.000000
2/29/2012	3:46:55 PM	PH3 MFC set to  0.000000
2/29/2012	3:46:55 PM	SiCl4 MFC set to  0.000000
2/29/2012	3:46:55 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	3:46:55 PM	Tube furnace set to 0
2/29/2012	3:46:59 PM	Helium valve closed
2/29/2012	3:46:59 PM	H2 valve closed
2/29/2012	3:46:59 PM	BCl3 valve closed
2/29/2012	3:46:59 PM	PH3 valve closed
2/29/2012	3:46:59 PM	SiCl4 pre valve closed
2/29/2012	3:46:59 PM	SiCl4 post valve closed
2/29/2012	3:46:59 PM	Main Vac valve closed
2/29/2012	3:46:59 PM	Bypass valve closed
2/29/2012	3:46:59 PM	Bubbler valve closed
2/29/2012	3:46:59 PM	Helium MFC set to  0.000000
2/29/2012	3:46:59 PM	H2 MFC set to  0.000000
2/29/2012	3:46:59 PM	BCl3 MFC set to  0.000000
2/29/2012	3:46:59 PM	PH3 MFC set to  0.000000
2/29/2012	3:46:59 PM	SiCl4 MFC set to  0.000000
2/29/2012	3:46:59 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	3:46:59 PM	Tube furnace set to 0
2/29/2012	3:47:00 PM	Run finished at 3:47 PM
2/29/2012	3:47:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/29/2012	3:49:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/29/2012	3:49:57 PM	Recipe started at 3:49 PM
2/29/2012	3:49:57 PM	Helium valve closed
2/29/2012	3:49:57 PM	H2 valve closed
2/29/2012	3:49:57 PM	BCl3 valve closed
2/29/2012	3:49:57 PM	PH3 valve closed
2/29/2012	3:49:57 PM	SiCl4 pre valve closed
2/29/2012	3:49:57 PM	SiCl4 post valve closed
2/29/2012	3:49:57 PM	Main Vac valve closed
2/29/2012	3:49:57 PM	Bubbler valve closed
2/29/2012	3:49:57 PM	Bypass valve opened
2/29/2012	3:49:57 PM	Helium MFC set to  0.000000
2/29/2012	3:49:57 PM	H2 MFC set to  0.000000
2/29/2012	3:49:57 PM	BCl3 MFC set to  0.000000
2/29/2012	3:49:57 PM	PH3 MFC set to  0.000000
2/29/2012	3:49:57 PM	SiCl4 MFC set to  0.000000
2/29/2012	3:49:57 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	3:49:57 PM	Tube furnace set to 0
2/29/2012	3:50:56 PM	Helium valve closed
2/29/2012	3:50:56 PM	H2 valve closed
2/29/2012	3:50:56 PM	BCl3 valve closed
2/29/2012	3:50:56 PM	PH3 valve closed
2/29/2012	3:50:56 PM	SiCl4 pre valve closed
2/29/2012	3:50:56 PM	SiCl4 post valve closed
2/29/2012	3:50:56 PM	Main Vac valve closed
2/29/2012	3:50:56 PM	Bubbler valve closed
2/29/2012	3:50:56 PM	Bypass valve opened
2/29/2012	3:50:56 PM	Helium MFC set to  0.000000
2/29/2012	3:50:56 PM	H2 MFC set to  0.000000
2/29/2012	3:50:56 PM	BCl3 MFC set to  0.000000
2/29/2012	3:50:56 PM	PH3 MFC set to  0.000000
2/29/2012	3:50:56 PM	SiCl4 MFC set to  0.000000
2/29/2012	3:50:56 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	3:50:56 PM	Tube furnace set to 0
2/29/2012	3:51:56 PM	Helium valve closed
2/29/2012	3:51:56 PM	H2 valve closed
2/29/2012	3:51:56 PM	BCl3 valve closed
2/29/2012	3:51:56 PM	PH3 valve closed
2/29/2012	3:51:56 PM	SiCl4 pre valve closed
2/29/2012	3:51:56 PM	SiCl4 post valve closed
2/29/2012	3:51:56 PM	Bypass valve closed
2/29/2012	3:51:56 PM	Bubbler valve closed
2/29/2012	3:51:56 PM	Main Vac valve opened
2/29/2012	3:51:56 PM	Helium MFC set to  0.000000
2/29/2012	3:51:56 PM	H2 MFC set to  0.000000
2/29/2012	3:51:56 PM	BCl3 MFC set to  0.000000
2/29/2012	3:51:56 PM	PH3 MFC set to  0.000000
2/29/2012	3:51:56 PM	SiCl4 MFC set to  0.000000
2/29/2012	3:51:56 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	3:51:56 PM	Tube furnace set to 0
2/29/2012	3:51:57 PM	Run finished at 3:51 PM
2/29/2012	3:51:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/29/2012	3:59:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/29/2012	4:00:00 PM	Recipe started at 3:59 PM
2/29/2012	4:00:00 PM	Helium valve closed
2/29/2012	4:00:01 PM	H2 valve closed
2/29/2012	4:00:01 PM	BCl3 valve closed
2/29/2012	4:00:01 PM	PH3 valve closed
2/29/2012	4:00:01 PM	SiCl4 pre valve closed
2/29/2012	4:00:01 PM	SiCl4 post valve closed
2/29/2012	4:00:01 PM	Main Vac valve closed
2/29/2012	4:00:01 PM	Bubbler valve closed
2/29/2012	4:00:01 PM	Bypass valve opened
2/29/2012	4:00:01 PM	Helium MFC set to  0.000000
2/29/2012	4:00:01 PM	H2 MFC set to  0.000000
2/29/2012	4:00:01 PM	BCl3 MFC set to  0.000000
2/29/2012	4:00:01 PM	PH3 MFC set to  0.000000
2/29/2012	4:00:01 PM	SiCl4 MFC set to  0.000000
2/29/2012	4:00:01 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	4:00:01 PM	Tube furnace set to 0
2/29/2012	4:00:01 PM	Helium valve closed
2/29/2012	4:00:01 PM	H2 valve closed
2/29/2012	4:00:01 PM	BCl3 valve closed
2/29/2012	4:00:01 PM	PH3 valve closed
2/29/2012	4:00:01 PM	SiCl4 pre valve closed
2/29/2012	4:00:01 PM	SiCl4 post valve closed
2/29/2012	4:00:01 PM	Main Vac valve closed
2/29/2012	4:00:01 PM	Bubbler valve closed
2/29/2012	4:00:01 PM	Bypass valve opened
2/29/2012	4:00:01 PM	Helium MFC set to  0.000000
2/29/2012	4:00:01 PM	H2 MFC set to  0.000000
2/29/2012	4:00:01 PM	BCl3 MFC set to  0.000000
2/29/2012	4:00:01 PM	PH3 MFC set to  0.000000
2/29/2012	4:00:01 PM	SiCl4 MFC set to  0.000000
2/29/2012	4:00:01 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	4:00:01 PM	Tube furnace set to 0
2/29/2012	4:00:01 PM	Helium valve closed
2/29/2012	4:00:01 PM	H2 valve closed
2/29/2012	4:00:01 PM	BCl3 valve closed
2/29/2012	4:00:01 PM	PH3 valve closed
2/29/2012	4:00:01 PM	SiCl4 pre valve closed
2/29/2012	4:00:01 PM	SiCl4 post valve closed
2/29/2012	4:00:01 PM	Bypass valve closed
2/29/2012	4:00:01 PM	Bubbler valve closed
2/29/2012	4:00:01 PM	Main Vac valve opened
2/29/2012	4:00:01 PM	Helium MFC set to  0.000000
2/29/2012	4:00:01 PM	H2 MFC set to  0.000000
2/29/2012	4:00:01 PM	BCl3 MFC set to  0.000000
2/29/2012	4:00:01 PM	PH3 MFC set to  0.000000
2/29/2012	4:00:01 PM	SiCl4 MFC set to  0.000000
2/29/2012	4:00:01 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	4:00:02 PM	Tube furnace set to 0
2/29/2012	4:00:32 PM	H2 valve closed
2/29/2012	4:00:32 PM	BCl3 valve closed
2/29/2012	4:00:32 PM	PH3 valve closed
2/29/2012	4:00:32 PM	SiCl4 pre valve closed
2/29/2012	4:00:32 PM	SiCl4 post valve closed
2/29/2012	4:00:32 PM	Bypass valve closed
2/29/2012	4:00:32 PM	Bubbler valve closed
2/29/2012	4:00:32 PM	Helium valve opened
2/29/2012	4:00:32 PM	Main Vac valve opened
2/29/2012	4:00:32 PM	Helium MFC set to  20.000000
2/29/2012	4:00:32 PM	H2 MFC set to  0.000000
2/29/2012	4:00:32 PM	BCl3 MFC set to  0.000000
2/29/2012	4:00:32 PM	PH3 MFC set to  0.000000
2/29/2012	4:00:32 PM	SiCl4 MFC set to  0.000000
2/29/2012	4:00:32 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	4:00:32 PM	Tube furnace set to 0
2/29/2012	4:01:02 PM	Helium valve closed
2/29/2012	4:01:02 PM	H2 valve closed
2/29/2012	4:01:02 PM	BCl3 valve closed
2/29/2012	4:01:02 PM	PH3 valve closed
2/29/2012	4:01:02 PM	SiCl4 pre valve closed
2/29/2012	4:01:02 PM	SiCl4 post valve closed
2/29/2012	4:01:02 PM	Bypass valve closed
2/29/2012	4:01:02 PM	Bubbler valve closed
2/29/2012	4:01:02 PM	Main Vac valve opened
2/29/2012	4:01:02 PM	Helium MFC set to  0.000000
2/29/2012	4:01:02 PM	H2 MFC set to  0.000000
2/29/2012	4:01:02 PM	BCl3 MFC set to  0.000000
2/29/2012	4:01:02 PM	PH3 MFC set to  0.000000
2/29/2012	4:01:02 PM	SiCl4 MFC set to  0.000000
2/29/2012	4:01:02 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	4:01:02 PM	Tube furnace set to 0
2/29/2012	4:01:32 PM	H2 valve closed
2/29/2012	4:01:32 PM	BCl3 valve closed
2/29/2012	4:01:32 PM	PH3 valve closed
2/29/2012	4:01:32 PM	SiCl4 pre valve closed
2/29/2012	4:01:32 PM	SiCl4 post valve closed
2/29/2012	4:01:32 PM	Bypass valve closed
2/29/2012	4:01:32 PM	Bubbler valve closed
2/29/2012	4:01:32 PM	Helium valve opened
2/29/2012	4:01:32 PM	Main Vac valve opened
2/29/2012	4:01:32 PM	Helium MFC set to  20.000000
2/29/2012	4:01:32 PM	H2 MFC set to  0.000000
2/29/2012	4:01:32 PM	BCl3 MFC set to  0.000000
2/29/2012	4:01:32 PM	PH3 MFC set to  0.000000
2/29/2012	4:01:32 PM	SiCl4 MFC set to  0.000000
2/29/2012	4:01:32 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	4:01:32 PM	Tube furnace set to 0
2/29/2012	4:02:02 PM	Helium valve closed
2/29/2012	4:02:02 PM	H2 valve closed
2/29/2012	4:02:02 PM	BCl3 valve closed
2/29/2012	4:02:02 PM	PH3 valve closed
2/29/2012	4:02:02 PM	SiCl4 pre valve closed
2/29/2012	4:02:02 PM	SiCl4 post valve closed
2/29/2012	4:02:02 PM	Bypass valve closed
2/29/2012	4:02:02 PM	Bubbler valve closed
2/29/2012	4:02:02 PM	Main Vac valve opened
2/29/2012	4:02:02 PM	Helium MFC set to  0.000000
2/29/2012	4:02:02 PM	H2 MFC set to  0.000000
2/29/2012	4:02:02 PM	BCl3 MFC set to  0.000000
2/29/2012	4:02:02 PM	PH3 MFC set to  0.000000
2/29/2012	4:02:02 PM	SiCl4 MFC set to  0.000000
2/29/2012	4:02:02 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	4:02:02 PM	Tube furnace set to 0
2/29/2012	4:02:32 PM	H2 valve closed
2/29/2012	4:02:32 PM	BCl3 valve closed
2/29/2012	4:02:32 PM	PH3 valve closed
2/29/2012	4:02:32 PM	SiCl4 pre valve closed
2/29/2012	4:02:32 PM	SiCl4 post valve closed
2/29/2012	4:02:32 PM	Bypass valve closed
2/29/2012	4:02:32 PM	Bubbler valve closed
2/29/2012	4:02:32 PM	Helium valve opened
2/29/2012	4:02:32 PM	Main Vac valve opened
2/29/2012	4:02:32 PM	Helium MFC set to  20.000000
2/29/2012	4:02:32 PM	H2 MFC set to  0.000000
2/29/2012	4:02:32 PM	BCl3 MFC set to  0.000000
2/29/2012	4:02:32 PM	PH3 MFC set to  0.000000
2/29/2012	4:02:32 PM	SiCl4 MFC set to  0.000000
2/29/2012	4:02:32 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	4:02:33 PM	Tube furnace set to 0
2/29/2012	4:03:03 PM	Helium valve closed
2/29/2012	4:03:03 PM	H2 valve closed
2/29/2012	4:03:03 PM	BCl3 valve closed
2/29/2012	4:03:03 PM	PH3 valve closed
2/29/2012	4:03:03 PM	SiCl4 pre valve closed
2/29/2012	4:03:03 PM	SiCl4 post valve closed
2/29/2012	4:03:03 PM	Bypass valve closed
2/29/2012	4:03:03 PM	Bubbler valve closed
2/29/2012	4:03:03 PM	Main Vac valve opened
2/29/2012	4:03:03 PM	Helium MFC set to  0.000000
2/29/2012	4:03:03 PM	H2 MFC set to  0.000000
2/29/2012	4:03:03 PM	BCl3 MFC set to  0.000000
2/29/2012	4:03:03 PM	PH3 MFC set to  0.000000
2/29/2012	4:03:03 PM	SiCl4 MFC set to  0.000000
2/29/2012	4:03:03 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	4:03:03 PM	Tube furnace set to 0
2/29/2012	4:03:33 PM	H2 valve closed
2/29/2012	4:03:33 PM	BCl3 valve closed
2/29/2012	4:03:33 PM	PH3 valve closed
2/29/2012	4:03:33 PM	SiCl4 pre valve closed
2/29/2012	4:03:33 PM	SiCl4 post valve closed
2/29/2012	4:03:33 PM	Bypass valve closed
2/29/2012	4:03:33 PM	Bubbler valve closed
2/29/2012	4:03:33 PM	Helium valve opened
2/29/2012	4:03:33 PM	Main Vac valve opened
2/29/2012	4:03:33 PM	Helium MFC set to  20.000000
2/29/2012	4:03:33 PM	H2 MFC set to  0.000000
2/29/2012	4:03:33 PM	BCl3 MFC set to  0.000000
2/29/2012	4:03:33 PM	PH3 MFC set to  0.000000
2/29/2012	4:03:33 PM	SiCl4 MFC set to  0.000000
2/29/2012	4:03:33 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	4:03:33 PM	Tube furnace set to 0
2/29/2012	4:04:03 PM	Helium valve closed
2/29/2012	4:04:03 PM	H2 valve closed
2/29/2012	4:04:03 PM	BCl3 valve closed
2/29/2012	4:04:03 PM	PH3 valve closed
2/29/2012	4:04:03 PM	SiCl4 pre valve closed
2/29/2012	4:04:03 PM	SiCl4 post valve closed
2/29/2012	4:04:03 PM	Bypass valve closed
2/29/2012	4:04:03 PM	Bubbler valve closed
2/29/2012	4:04:03 PM	Main Vac valve opened
2/29/2012	4:04:03 PM	Helium MFC set to  0.000000
2/29/2012	4:04:03 PM	H2 MFC set to  0.000000
2/29/2012	4:04:03 PM	BCl3 MFC set to  0.000000
2/29/2012	4:04:03 PM	PH3 MFC set to  0.000000
2/29/2012	4:04:03 PM	SiCl4 MFC set to  0.000000
2/29/2012	4:04:03 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	4:04:03 PM	Tube furnace set to 0
2/29/2012	4:04:33 PM	H2 valve closed
2/29/2012	4:04:33 PM	BCl3 valve closed
2/29/2012	4:04:33 PM	PH3 valve closed
2/29/2012	4:04:33 PM	SiCl4 pre valve closed
2/29/2012	4:04:33 PM	SiCl4 post valve closed
2/29/2012	4:04:33 PM	Bypass valve closed
2/29/2012	4:04:33 PM	Bubbler valve closed
2/29/2012	4:04:33 PM	Helium valve opened
2/29/2012	4:04:33 PM	Main Vac valve opened
2/29/2012	4:04:33 PM	Helium MFC set to  20.000000
2/29/2012	4:04:33 PM	H2 MFC set to  0.000000
2/29/2012	4:04:33 PM	BCl3 MFC set to  0.000000
2/29/2012	4:04:33 PM	PH3 MFC set to  0.000000
2/29/2012	4:04:33 PM	SiCl4 MFC set to  0.000000
2/29/2012	4:04:33 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	4:04:33 PM	Tube furnace set to 0
2/29/2012	4:05:03 PM	Helium valve closed
2/29/2012	4:05:03 PM	H2 valve closed
2/29/2012	4:05:03 PM	BCl3 valve closed
2/29/2012	4:05:03 PM	PH3 valve closed
2/29/2012	4:05:03 PM	SiCl4 pre valve closed
2/29/2012	4:05:03 PM	SiCl4 post valve closed
2/29/2012	4:05:03 PM	Bypass valve closed
2/29/2012	4:05:03 PM	Bubbler valve closed
2/29/2012	4:05:03 PM	Main Vac valve opened
2/29/2012	4:05:03 PM	Helium MFC set to  0.000000
2/29/2012	4:05:03 PM	H2 MFC set to  0.000000
2/29/2012	4:05:03 PM	BCl3 MFC set to  0.000000
2/29/2012	4:05:03 PM	PH3 MFC set to  0.000000
2/29/2012	4:05:03 PM	SiCl4 MFC set to  0.000000
2/29/2012	4:05:03 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	4:05:04 PM	Tube furnace set to 0
2/29/2012	4:05:34 PM	H2 valve closed
2/29/2012	4:05:34 PM	BCl3 valve closed
2/29/2012	4:05:34 PM	PH3 valve closed
2/29/2012	4:05:34 PM	SiCl4 pre valve closed
2/29/2012	4:05:34 PM	SiCl4 post valve closed
2/29/2012	4:05:34 PM	Bypass valve closed
2/29/2012	4:05:34 PM	Bubbler valve closed
2/29/2012	4:05:34 PM	Helium valve opened
2/29/2012	4:05:34 PM	Main Vac valve opened
2/29/2012	4:05:34 PM	Helium MFC set to  20.000000
2/29/2012	4:05:34 PM	H2 MFC set to  0.000000
2/29/2012	4:05:34 PM	BCl3 MFC set to  0.000000
2/29/2012	4:05:34 PM	PH3 MFC set to  0.000000
2/29/2012	4:05:34 PM	SiCl4 MFC set to  0.000000
2/29/2012	4:05:34 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	4:05:34 PM	Tube furnace set to 0
2/29/2012	4:06:04 PM	Helium valve closed
2/29/2012	4:06:04 PM	H2 valve closed
2/29/2012	4:06:04 PM	BCl3 valve closed
2/29/2012	4:06:04 PM	PH3 valve closed
2/29/2012	4:06:04 PM	SiCl4 pre valve closed
2/29/2012	4:06:04 PM	SiCl4 post valve closed
2/29/2012	4:06:04 PM	Bypass valve closed
2/29/2012	4:06:04 PM	Bubbler valve closed
2/29/2012	4:06:04 PM	Main Vac valve opened
2/29/2012	4:06:04 PM	Helium MFC set to  0.000000
2/29/2012	4:06:04 PM	H2 MFC set to  0.000000
2/29/2012	4:06:04 PM	BCl3 MFC set to  0.000000
2/29/2012	4:06:04 PM	PH3 MFC set to  0.000000
2/29/2012	4:06:04 PM	SiCl4 MFC set to  0.000000
2/29/2012	4:06:04 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	4:06:04 PM	Tube furnace set to 0
2/29/2012	4:06:34 PM	H2 valve closed
2/29/2012	4:06:34 PM	BCl3 valve closed
2/29/2012	4:06:34 PM	PH3 valve closed
2/29/2012	4:06:34 PM	SiCl4 pre valve closed
2/29/2012	4:06:34 PM	SiCl4 post valve closed
2/29/2012	4:06:34 PM	Bypass valve closed
2/29/2012	4:06:34 PM	Bubbler valve closed
2/29/2012	4:06:34 PM	Helium valve opened
2/29/2012	4:06:34 PM	Main Vac valve opened
2/29/2012	4:06:34 PM	Helium MFC set to  20.000000
2/29/2012	4:06:34 PM	H2 MFC set to  0.000000
2/29/2012	4:06:34 PM	BCl3 MFC set to  0.000000
2/29/2012	4:06:34 PM	PH3 MFC set to  0.000000
2/29/2012	4:06:34 PM	SiCl4 MFC set to  0.000000
2/29/2012	4:06:34 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	4:06:34 PM	Tube furnace set to 0
2/29/2012	4:07:04 PM	Helium valve closed
2/29/2012	4:07:04 PM	H2 valve closed
2/29/2012	4:07:04 PM	BCl3 valve closed
2/29/2012	4:07:04 PM	PH3 valve closed
2/29/2012	4:07:04 PM	SiCl4 pre valve closed
2/29/2012	4:07:04 PM	SiCl4 post valve closed
2/29/2012	4:07:04 PM	Bypass valve closed
2/29/2012	4:07:04 PM	Bubbler valve closed
2/29/2012	4:07:04 PM	Main Vac valve opened
2/29/2012	4:07:04 PM	Helium MFC set to  0.000000
2/29/2012	4:07:04 PM	H2 MFC set to  0.000000
2/29/2012	4:07:04 PM	BCl3 MFC set to  0.000000
2/29/2012	4:07:04 PM	PH3 MFC set to  0.000000
2/29/2012	4:07:04 PM	SiCl4 MFC set to  0.000000
2/29/2012	4:07:04 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	4:07:04 PM	Tube furnace set to 0
2/29/2012	4:07:34 PM	H2 valve closed
2/29/2012	4:07:34 PM	BCl3 valve closed
2/29/2012	4:07:34 PM	PH3 valve closed
2/29/2012	4:07:34 PM	SiCl4 pre valve closed
2/29/2012	4:07:34 PM	SiCl4 post valve closed
2/29/2012	4:07:34 PM	Bypass valve closed
2/29/2012	4:07:34 PM	Bubbler valve closed
2/29/2012	4:07:34 PM	Helium valve opened
2/29/2012	4:07:34 PM	Main Vac valve opened
2/29/2012	4:07:34 PM	Helium MFC set to  20.000000
2/29/2012	4:07:34 PM	H2 MFC set to  0.000000
2/29/2012	4:07:35 PM	BCl3 MFC set to  0.000000
2/29/2012	4:07:35 PM	PH3 MFC set to  0.000000
2/29/2012	4:07:35 PM	SiCl4 MFC set to  0.000000
2/29/2012	4:07:35 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	4:07:35 PM	Tube furnace set to 0
2/29/2012	4:08:05 PM	Helium valve closed
2/29/2012	4:08:05 PM	H2 valve closed
2/29/2012	4:08:05 PM	BCl3 valve closed
2/29/2012	4:08:05 PM	PH3 valve closed
2/29/2012	4:08:05 PM	SiCl4 pre valve closed
2/29/2012	4:08:05 PM	SiCl4 post valve closed
2/29/2012	4:08:05 PM	Bypass valve closed
2/29/2012	4:08:05 PM	Bubbler valve closed
2/29/2012	4:08:05 PM	Main Vac valve opened
2/29/2012	4:08:05 PM	Helium MFC set to  0.000000
2/29/2012	4:08:05 PM	H2 MFC set to  0.000000
2/29/2012	4:08:05 PM	BCl3 MFC set to  0.000000
2/29/2012	4:08:05 PM	PH3 MFC set to  0.000000
2/29/2012	4:08:05 PM	SiCl4 MFC set to  0.000000
2/29/2012	4:08:05 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	4:08:05 PM	Tube furnace set to 0
2/29/2012	4:08:35 PM	H2 valve closed
2/29/2012	4:08:35 PM	BCl3 valve closed
2/29/2012	4:08:35 PM	PH3 valve closed
2/29/2012	4:08:35 PM	SiCl4 pre valve closed
2/29/2012	4:08:35 PM	SiCl4 post valve closed
2/29/2012	4:08:35 PM	Bypass valve closed
2/29/2012	4:08:35 PM	Bubbler valve closed
2/29/2012	4:08:35 PM	Helium valve opened
2/29/2012	4:08:35 PM	Main Vac valve opened
2/29/2012	4:08:35 PM	Helium MFC set to  20.000000
2/29/2012	4:08:35 PM	H2 MFC set to  0.000000
2/29/2012	4:08:35 PM	BCl3 MFC set to  0.000000
2/29/2012	4:08:35 PM	PH3 MFC set to  0.000000
2/29/2012	4:08:35 PM	SiCl4 MFC set to  0.000000
2/29/2012	4:08:35 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	4:08:35 PM	Tube furnace set to 0
2/29/2012	4:09:05 PM	Helium valve closed
2/29/2012	4:09:05 PM	H2 valve closed
2/29/2012	4:09:05 PM	BCl3 valve closed
2/29/2012	4:09:05 PM	PH3 valve closed
2/29/2012	4:09:05 PM	SiCl4 pre valve closed
2/29/2012	4:09:05 PM	SiCl4 post valve closed
2/29/2012	4:09:05 PM	Bypass valve closed
2/29/2012	4:09:05 PM	Bubbler valve closed
2/29/2012	4:09:05 PM	Main Vac valve opened
2/29/2012	4:09:05 PM	Helium MFC set to  0.000000
2/29/2012	4:09:05 PM	H2 MFC set to  0.000000
2/29/2012	4:09:05 PM	BCl3 MFC set to  0.000000
2/29/2012	4:09:05 PM	PH3 MFC set to  0.000000
2/29/2012	4:09:05 PM	SiCl4 MFC set to  0.000000
2/29/2012	4:09:05 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	4:09:05 PM	Tube furnace set to 0
2/29/2012	4:09:35 PM	H2 valve closed
2/29/2012	4:09:35 PM	BCl3 valve closed
2/29/2012	4:09:35 PM	PH3 valve closed
2/29/2012	4:09:35 PM	SiCl4 pre valve closed
2/29/2012	4:09:35 PM	SiCl4 post valve closed
2/29/2012	4:09:35 PM	Bypass valve closed
2/29/2012	4:09:35 PM	Bubbler valve closed
2/29/2012	4:09:35 PM	Helium valve opened
2/29/2012	4:09:35 PM	Main Vac valve opened
2/29/2012	4:09:35 PM	Helium MFC set to  20.000000
2/29/2012	4:09:35 PM	H2 MFC set to  0.000000
2/29/2012	4:09:35 PM	BCl3 MFC set to  0.000000
2/29/2012	4:09:35 PM	PH3 MFC set to  0.000000
2/29/2012	4:09:35 PM	SiCl4 MFC set to  0.000000
2/29/2012	4:09:35 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	4:09:35 PM	Tube furnace set to 0
2/29/2012	4:10:05 PM	Helium valve closed
2/29/2012	4:10:05 PM	H2 valve closed
2/29/2012	4:10:05 PM	BCl3 valve closed
2/29/2012	4:10:06 PM	PH3 valve closed
2/29/2012	4:10:06 PM	SiCl4 pre valve closed
2/29/2012	4:10:06 PM	SiCl4 post valve closed
2/29/2012	4:10:06 PM	Bypass valve closed
2/29/2012	4:10:06 PM	Bubbler valve closed
2/29/2012	4:10:06 PM	Main Vac valve opened
2/29/2012	4:10:06 PM	Helium MFC set to  0.000000
2/29/2012	4:10:06 PM	H2 MFC set to  0.000000
2/29/2012	4:10:06 PM	BCl3 MFC set to  0.000000
2/29/2012	4:10:06 PM	PH3 MFC set to  0.000000
2/29/2012	4:10:06 PM	SiCl4 MFC set to  0.000000
2/29/2012	4:10:06 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	4:10:06 PM	Tube furnace set to 0
2/29/2012	4:10:07 PM	Run finished at 4:10 PM
2/29/2012	4:10:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/29/2012	4:22:01 PM	Main Vac valve closed
2/29/2012	4:22:16 PM	Main Vac valve opened
2/29/2012	4:22:46 PM	Recipe started at 4:22 PM
2/29/2012	4:22:46 PM	Helium valve closed
2/29/2012	4:22:46 PM	H2 valve closed
2/29/2012	4:22:46 PM	BCl3 valve closed
2/29/2012	4:22:46 PM	PH3 valve closed
2/29/2012	4:22:46 PM	SiCl4 pre valve closed
2/29/2012	4:22:47 PM	SiCl4 post valve closed
2/29/2012	4:22:47 PM	Main Vac valve closed
2/29/2012	4:22:47 PM	Bypass valve closed
2/29/2012	4:22:47 PM	Bubbler valve closed
2/29/2012	4:22:47 PM	Helium MFC set to  0.000000
2/29/2012	4:22:47 PM	H2 MFC set to  0.000000
2/29/2012	4:22:47 PM	BCl3 MFC set to  0.000000
2/29/2012	4:22:47 PM	PH3 MFC set to  0.000000
2/29/2012	4:22:47 PM	SiCl4 MFC set to  0.000000
2/29/2012	4:22:47 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	4:22:47 PM	Tube furnace set to 0
2/29/2012	4:22:50 PM	Helium valve closed
2/29/2012	4:22:50 PM	BCl3 valve closed
2/29/2012	4:22:50 PM	PH3 valve closed
2/29/2012	4:22:50 PM	SiCl4 pre valve closed
2/29/2012	4:22:50 PM	SiCl4 post valve closed
2/29/2012	4:22:50 PM	Main Vac valve closed
2/29/2012	4:22:50 PM	Bypass valve closed
2/29/2012	4:22:50 PM	Bubbler valve closed
2/29/2012	4:22:50 PM	H2 valve opened
2/29/2012	4:22:50 PM	Helium MFC set to  0.000000
2/29/2012	4:22:50 PM	H2 MFC set to  500.000000
2/29/2012	4:22:50 PM	BCl3 MFC set to  0.000000
2/29/2012	4:22:50 PM	PH3 MFC set to  0.000000
2/29/2012	4:22:50 PM	SiCl4 MFC set to  0.000000
2/29/2012	4:22:50 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	4:22:50 PM	Tube furnace set to 0
2/29/2012	4:23:54 PM	Helium valve closed
2/29/2012	4:23:54 PM	BCl3 valve closed
2/29/2012	4:23:54 PM	PH3 valve closed
2/29/2012	4:23:54 PM	SiCl4 pre valve closed
2/29/2012	4:23:54 PM	SiCl4 post valve closed
2/29/2012	4:23:54 PM	Main Vac valve closed
2/29/2012	4:23:54 PM	Bypass valve closed
2/29/2012	4:23:54 PM	H2 valve opened
2/29/2012	4:23:54 PM	Bubbler valve opened
2/29/2012	4:23:54 PM	Helium MFC set to  0.000000
2/29/2012	4:23:54 PM	H2 MFC set to  500.000000
2/29/2012	4:23:54 PM	BCl3 MFC set to  0.000000
2/29/2012	4:23:54 PM	PH3 MFC set to  0.000000
2/29/2012	4:23:54 PM	SiCl4 MFC set to  0.000000
2/29/2012	4:23:54 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	4:23:54 PM	Tube furnace set to 0
2/29/2012	4:23:55 PM	Helium valve closed
2/29/2012	4:23:55 PM	BCl3 valve closed
2/29/2012	4:23:55 PM	PH3 valve closed
2/29/2012	4:23:55 PM	SiCl4 pre valve closed
2/29/2012	4:23:55 PM	SiCl4 post valve closed
2/29/2012	4:23:55 PM	Main Vac valve closed
2/29/2012	4:23:55 PM	Bypass valve closed
2/29/2012	4:23:55 PM	H2 valve opened
2/29/2012	4:23:55 PM	Bubbler valve opened
2/29/2012	4:23:55 PM	Helium MFC set to  0.000000
2/29/2012	4:23:55 PM	H2 MFC set to  450.000000
2/29/2012	4:23:55 PM	BCl3 MFC set to  0.000000
2/29/2012	4:23:55 PM	PH3 MFC set to  0.000000
2/29/2012	4:23:55 PM	SiCl4 MFC set to  0.000000
2/29/2012	4:23:55 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	4:23:55 PM	Tube furnace set to 1000
2/29/2012	5:08:55 PM	Helium valve closed
2/29/2012	5:08:55 PM	PH3 valve closed
2/29/2012	5:08:55 PM	Main Vac valve closed
2/29/2012	5:08:55 PM	Bypass valve closed
2/29/2012	5:08:55 PM	H2 valve opened
2/29/2012	5:08:55 PM	BCl3 valve opened
2/29/2012	5:08:55 PM	SiCl4 pre valve opened
2/29/2012	5:08:55 PM	SiCl4 post valve opened
2/29/2012	5:08:55 PM	Bubbler valve opened
2/29/2012	5:08:55 PM	Helium MFC set to  0.000000
2/29/2012	5:08:55 PM	H2 MFC set to  450.000000
2/29/2012	5:08:55 PM	BCl3 MFC set to  1.500000
2/29/2012	5:08:55 PM	PH3 MFC set to  0.000000
2/29/2012	5:08:55 PM	SiCl4 MFC set to  50.000000
2/29/2012	5:08:55 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	5:08:55 PM	Tube furnace set to 1000
2/29/2012	5:14:55 PM	Helium valve closed
2/29/2012	5:14:55 PM	BCl3 valve closed
2/29/2012	5:14:55 PM	PH3 valve closed
2/29/2012	5:14:55 PM	SiCl4 pre valve closed
2/29/2012	5:14:55 PM	SiCl4 post valve closed
2/29/2012	5:14:55 PM	Main Vac valve closed
2/29/2012	5:14:55 PM	Bypass valve closed
2/29/2012	5:14:55 PM	H2 valve opened
2/29/2012	5:14:55 PM	Bubbler valve opened
2/29/2012	5:14:55 PM	Helium MFC set to  0.000000
2/29/2012	5:14:55 PM	H2 MFC set to  500.000000
2/29/2012	5:14:55 PM	BCl3 MFC set to  0.000000
2/29/2012	5:14:55 PM	PH3 MFC set to  0.000000
2/29/2012	5:14:55 PM	SiCl4 MFC set to  0.000000
2/29/2012	5:14:55 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	5:14:55 PM	Tube furnace set to 750
2/29/2012	5:19:55 PM	H2 valve closed
2/29/2012	5:19:55 PM	BCl3 valve closed
2/29/2012	5:19:55 PM	PH3 valve closed
2/29/2012	5:19:55 PM	SiCl4 pre valve closed
2/29/2012	5:19:55 PM	SiCl4 post valve closed
2/29/2012	5:19:55 PM	Main Vac valve closed
2/29/2012	5:19:55 PM	Bypass valve closed
2/29/2012	5:19:55 PM	Helium valve opened
2/29/2012	5:19:55 PM	Bubbler valve opened
2/29/2012	5:19:55 PM	Helium MFC set to  500.000000
2/29/2012	5:19:55 PM	H2 MFC set to  0.000000
2/29/2012	5:19:55 PM	BCl3 MFC set to  0.000000
2/29/2012	5:19:55 PM	PH3 MFC set to  0.000000
2/29/2012	5:19:55 PM	SiCl4 MFC set to  0.000000
2/29/2012	5:19:55 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	5:19:56 PM	Tube furnace set to 0
2/29/2012	5:39:56 PM	Helium valve closed
2/29/2012	5:39:56 PM	H2 valve closed
2/29/2012	5:39:56 PM	BCl3 valve closed
2/29/2012	5:39:56 PM	PH3 valve closed
2/29/2012	5:39:56 PM	SiCl4 pre valve closed
2/29/2012	5:39:56 PM	SiCl4 post valve closed
2/29/2012	5:39:56 PM	Main Vac valve closed
2/29/2012	5:39:56 PM	Bypass valve closed
2/29/2012	5:39:56 PM	Bubbler valve closed
2/29/2012	5:39:56 PM	Helium MFC set to  0.000000
2/29/2012	5:39:56 PM	H2 MFC set to  0.000000
2/29/2012	5:39:56 PM	BCl3 MFC set to  0.000000
2/29/2012	5:39:56 PM	PH3 MFC set to  0.000000
2/29/2012	5:39:56 PM	SiCl4 MFC set to  0.000000
2/29/2012	5:39:56 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	5:39:56 PM	Tube furnace set to 0
2/29/2012	5:39:57 PM	Run finished at 5:39 PM
2/29/2012	6:05:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/29/2012	6:05:37 PM	Recipe started at 6:05 PM
2/29/2012	6:05:37 PM	Helium valve closed
2/29/2012	6:05:37 PM	H2 valve closed
2/29/2012	6:05:37 PM	BCl3 valve closed
2/29/2012	6:05:37 PM	PH3 valve closed
2/29/2012	6:05:37 PM	SiCl4 pre valve closed
2/29/2012	6:05:37 PM	SiCl4 post valve closed
2/29/2012	6:05:37 PM	Main Vac valve closed
2/29/2012	6:05:37 PM	Bypass valve closed
2/29/2012	6:05:37 PM	Bubbler valve closed
2/29/2012	6:05:37 PM	Helium MFC set to  0.000000
2/29/2012	6:05:37 PM	H2 MFC set to  0.000000
2/29/2012	6:05:37 PM	BCl3 MFC set to  0.000000
2/29/2012	6:05:37 PM	PH3 MFC set to  0.000000
2/29/2012	6:05:37 PM	SiCl4 MFC set to  0.000000
2/29/2012	6:05:37 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	6:05:38 PM	Tube furnace set to 0
2/29/2012	6:05:41 PM	H2 valve closed
2/29/2012	6:05:41 PM	BCl3 valve closed
2/29/2012	6:05:41 PM	PH3 valve closed
2/29/2012	6:05:41 PM	SiCl4 pre valve closed
2/29/2012	6:05:41 PM	SiCl4 post valve closed
2/29/2012	6:05:41 PM	Main Vac valve closed
2/29/2012	6:05:41 PM	Bypass valve closed
2/29/2012	6:05:41 PM	Bubbler valve closed
2/29/2012	6:05:41 PM	Helium valve opened
2/29/2012	6:05:41 PM	Helium MFC set to  500.000000
2/29/2012	6:05:41 PM	H2 MFC set to  0.000000
2/29/2012	6:05:41 PM	BCl3 MFC set to  0.000000
2/29/2012	6:05:41 PM	PH3 MFC set to  0.000000
2/29/2012	6:05:41 PM	SiCl4 MFC set to  0.000000
2/29/2012	6:05:41 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	6:05:41 PM	Tube furnace set to 0
2/29/2012	6:05:44 PM	Helium valve closed
2/29/2012	6:05:44 PM	H2 valve closed
2/29/2012	6:05:44 PM	BCl3 valve closed
2/29/2012	6:05:44 PM	PH3 valve closed
2/29/2012	6:05:44 PM	SiCl4 pre valve closed
2/29/2012	6:05:44 PM	SiCl4 post valve closed
2/29/2012	6:05:44 PM	Main Vac valve closed
2/29/2012	6:05:44 PM	Bypass valve closed
2/29/2012	6:05:44 PM	Bubbler valve closed
2/29/2012	6:05:44 PM	Helium MFC set to  0.000000
2/29/2012	6:05:44 PM	H2 MFC set to  0.000000
2/29/2012	6:05:44 PM	BCl3 MFC set to  0.000000
2/29/2012	6:05:44 PM	PH3 MFC set to  0.000000
2/29/2012	6:05:44 PM	SiCl4 MFC set to  0.000000
2/29/2012	6:05:44 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	6:05:44 PM	Tube furnace set to 0
2/29/2012	6:05:45 PM	Run finished at 6:05 PM
2/29/2012	6:05:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/29/2012	6:09:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/29/2012	6:09:02 PM	Recipe started at 6:09 PM
2/29/2012	6:09:02 PM	Helium valve closed
2/29/2012	6:09:02 PM	H2 valve closed
2/29/2012	6:09:02 PM	BCl3 valve closed
2/29/2012	6:09:02 PM	PH3 valve closed
2/29/2012	6:09:02 PM	SiCl4 pre valve closed
2/29/2012	6:09:02 PM	SiCl4 post valve closed
2/29/2012	6:09:02 PM	Main Vac valve closed
2/29/2012	6:09:02 PM	Bubbler valve closed
2/29/2012	6:09:02 PM	Bypass valve opened
2/29/2012	6:09:02 PM	Helium MFC set to  0.000000
2/29/2012	6:09:02 PM	H2 MFC set to  0.000000
2/29/2012	6:09:02 PM	BCl3 MFC set to  0.000000
2/29/2012	6:09:02 PM	PH3 MFC set to  0.000000
2/29/2012	6:09:02 PM	SiCl4 MFC set to  0.000000
2/29/2012	6:09:02 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	6:09:02 PM	Tube furnace set to 0
2/29/2012	6:10:02 PM	Helium valve closed
2/29/2012	6:10:02 PM	H2 valve closed
2/29/2012	6:10:02 PM	BCl3 valve closed
2/29/2012	6:10:02 PM	PH3 valve closed
2/29/2012	6:10:02 PM	SiCl4 pre valve closed
2/29/2012	6:10:02 PM	SiCl4 post valve closed
2/29/2012	6:10:02 PM	Main Vac valve closed
2/29/2012	6:10:02 PM	Bubbler valve closed
2/29/2012	6:10:02 PM	Bypass valve opened
2/29/2012	6:10:02 PM	Helium MFC set to  0.000000
2/29/2012	6:10:02 PM	H2 MFC set to  0.000000
2/29/2012	6:10:02 PM	BCl3 MFC set to  0.000000
2/29/2012	6:10:02 PM	PH3 MFC set to  0.000000
2/29/2012	6:10:02 PM	SiCl4 MFC set to  0.000000
2/29/2012	6:10:02 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	6:10:02 PM	Tube furnace set to 0
2/29/2012	6:11:02 PM	Helium valve closed
2/29/2012	6:11:02 PM	H2 valve closed
2/29/2012	6:11:02 PM	BCl3 valve closed
2/29/2012	6:11:02 PM	PH3 valve closed
2/29/2012	6:11:02 PM	SiCl4 pre valve closed
2/29/2012	6:11:02 PM	SiCl4 post valve closed
2/29/2012	6:11:02 PM	Bypass valve closed
2/29/2012	6:11:02 PM	Bubbler valve closed
2/29/2012	6:11:02 PM	Main Vac valve opened
2/29/2012	6:11:02 PM	Helium MFC set to  0.000000
2/29/2012	6:11:02 PM	H2 MFC set to  0.000000
2/29/2012	6:11:02 PM	BCl3 MFC set to  0.000000
2/29/2012	6:11:02 PM	PH3 MFC set to  0.000000
2/29/2012	6:11:02 PM	SiCl4 MFC set to  0.000000
2/29/2012	6:11:02 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	6:11:03 PM	Tube furnace set to 0
2/29/2012	6:11:04 PM	Run finished at 6:11 PM
2/29/2012	6:11:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/29/2012	7:15:20 PM	Main Vac valve closed
2/29/2012	7:15:41 PM	Main Vac valve opened
2/29/2012	7:16:10 PM	Main Vac valve closed
2/29/2012	7:16:23 PM	Main Vac valve opened
2/29/2012	7:25:03 PM	Recipe started at 7:25 PM
2/29/2012	7:25:04 PM	Helium valve closed
2/29/2012	7:25:04 PM	H2 valve closed
2/29/2012	7:25:04 PM	BCl3 valve closed
2/29/2012	7:25:04 PM	PH3 valve closed
2/29/2012	7:25:04 PM	SiCl4 pre valve closed
2/29/2012	7:25:04 PM	SiCl4 post valve closed
2/29/2012	7:25:04 PM	Main Vac valve closed
2/29/2012	7:25:04 PM	Bypass valve closed
2/29/2012	7:25:04 PM	Bubbler valve closed
2/29/2012	7:25:04 PM	Helium MFC set to  0.000000
2/29/2012	7:25:04 PM	H2 MFC set to  0.000000
2/29/2012	7:25:04 PM	BCl3 MFC set to  0.000000
2/29/2012	7:25:04 PM	PH3 MFC set to  0.000000
2/29/2012	7:25:04 PM	SiCl4 MFC set to  0.000000
2/29/2012	7:25:04 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	7:25:04 PM	Tube furnace set to 0
2/29/2012	7:25:07 PM	Helium valve closed
2/29/2012	7:25:07 PM	BCl3 valve closed
2/29/2012	7:25:07 PM	PH3 valve closed
2/29/2012	7:25:07 PM	SiCl4 pre valve closed
2/29/2012	7:25:07 PM	SiCl4 post valve closed
2/29/2012	7:25:07 PM	Main Vac valve closed
2/29/2012	7:25:07 PM	Bypass valve closed
2/29/2012	7:25:07 PM	Bubbler valve closed
2/29/2012	7:25:07 PM	H2 valve opened
2/29/2012	7:25:07 PM	Helium MFC set to  0.000000
2/29/2012	7:25:07 PM	H2 MFC set to  500.000000
2/29/2012	7:25:07 PM	BCl3 MFC set to  0.000000
2/29/2012	7:25:07 PM	PH3 MFC set to  0.000000
2/29/2012	7:25:07 PM	SiCl4 MFC set to  0.000000
2/29/2012	7:25:07 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	7:25:07 PM	Tube furnace set to 0
2/29/2012	7:26:11 PM	Helium valve closed
2/29/2012	7:26:11 PM	BCl3 valve closed
2/29/2012	7:26:11 PM	PH3 valve closed
2/29/2012	7:26:11 PM	SiCl4 pre valve closed
2/29/2012	7:26:11 PM	SiCl4 post valve closed
2/29/2012	7:26:11 PM	Main Vac valve closed
2/29/2012	7:26:11 PM	Bypass valve closed
2/29/2012	7:26:11 PM	H2 valve opened
2/29/2012	7:26:11 PM	Bubbler valve opened
2/29/2012	7:26:11 PM	Helium MFC set to  0.000000
2/29/2012	7:26:11 PM	H2 MFC set to  500.000000
2/29/2012	7:26:11 PM	BCl3 MFC set to  0.000000
2/29/2012	7:26:11 PM	PH3 MFC set to  0.000000
2/29/2012	7:26:11 PM	SiCl4 MFC set to  0.000000
2/29/2012	7:26:11 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	7:26:11 PM	Tube furnace set to 0
2/29/2012	7:26:12 PM	Helium valve closed
2/29/2012	7:26:12 PM	BCl3 valve closed
2/29/2012	7:26:12 PM	PH3 valve closed
2/29/2012	7:26:12 PM	SiCl4 pre valve closed
2/29/2012	7:26:12 PM	SiCl4 post valve closed
2/29/2012	7:26:12 PM	Main Vac valve closed
2/29/2012	7:26:12 PM	Bypass valve closed
2/29/2012	7:26:12 PM	H2 valve opened
2/29/2012	7:26:12 PM	Bubbler valve opened
2/29/2012	7:26:12 PM	Helium MFC set to  0.000000
2/29/2012	7:26:12 PM	H2 MFC set to  450.000000
2/29/2012	7:26:12 PM	BCl3 MFC set to  0.000000
2/29/2012	7:26:12 PM	PH3 MFC set to  0.000000
2/29/2012	7:26:12 PM	SiCl4 MFC set to  0.000000
2/29/2012	7:26:12 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	7:26:13 PM	Tube furnace set to 1000
2/29/2012	8:11:13 PM	Helium valve closed
2/29/2012	8:11:13 PM	PH3 valve closed
2/29/2012	8:11:13 PM	Main Vac valve closed
2/29/2012	8:11:13 PM	Bypass valve closed
2/29/2012	8:11:13 PM	H2 valve opened
2/29/2012	8:11:13 PM	BCl3 valve opened
2/29/2012	8:11:13 PM	SiCl4 pre valve opened
2/29/2012	8:11:13 PM	SiCl4 post valve opened
2/29/2012	8:11:13 PM	Bubbler valve opened
2/29/2012	8:11:13 PM	Helium MFC set to  0.000000
2/29/2012	8:11:13 PM	H2 MFC set to  450.000000
2/29/2012	8:11:13 PM	BCl3 MFC set to  1.500000
2/29/2012	8:11:13 PM	PH3 MFC set to  0.000000
2/29/2012	8:11:13 PM	SiCl4 MFC set to  50.000000
2/29/2012	8:11:13 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:11:13 PM	Tube furnace set to 1000
2/29/2012	8:19:13 PM	Helium valve closed
2/29/2012	8:19:13 PM	BCl3 valve closed
2/29/2012	8:19:13 PM	PH3 valve closed
2/29/2012	8:19:13 PM	SiCl4 pre valve closed
2/29/2012	8:19:13 PM	SiCl4 post valve closed
2/29/2012	8:19:13 PM	Main Vac valve closed
2/29/2012	8:19:13 PM	Bypass valve closed
2/29/2012	8:19:13 PM	H2 valve opened
2/29/2012	8:19:13 PM	Bubbler valve opened
2/29/2012	8:19:13 PM	Helium MFC set to  0.000000
2/29/2012	8:19:13 PM	H2 MFC set to  500.000000
2/29/2012	8:19:13 PM	BCl3 MFC set to  0.000000
2/29/2012	8:19:13 PM	PH3 MFC set to  0.000000
2/29/2012	8:19:13 PM	SiCl4 MFC set to  0.000000
2/29/2012	8:19:13 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:19:13 PM	Tube furnace set to 750
2/29/2012	8:24:13 PM	H2 valve closed
2/29/2012	8:24:13 PM	BCl3 valve closed
2/29/2012	8:24:13 PM	PH3 valve closed
2/29/2012	8:24:13 PM	SiCl4 pre valve closed
2/29/2012	8:24:13 PM	SiCl4 post valve closed
2/29/2012	8:24:13 PM	Main Vac valve closed
2/29/2012	8:24:13 PM	Bypass valve closed
2/29/2012	8:24:13 PM	Helium valve opened
2/29/2012	8:24:13 PM	Bubbler valve opened
2/29/2012	8:24:13 PM	Helium MFC set to  500.000000
2/29/2012	8:24:13 PM	H2 MFC set to  0.000000
2/29/2012	8:24:13 PM	BCl3 MFC set to  0.000000
2/29/2012	8:24:13 PM	PH3 MFC set to  0.000000
2/29/2012	8:24:13 PM	SiCl4 MFC set to  0.000000
2/29/2012	8:24:13 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:24:13 PM	Tube furnace set to 0
2/29/2012	8:44:13 PM	Helium valve closed
2/29/2012	8:44:13 PM	H2 valve closed
2/29/2012	8:44:13 PM	BCl3 valve closed
2/29/2012	8:44:13 PM	PH3 valve closed
2/29/2012	8:44:13 PM	SiCl4 pre valve closed
2/29/2012	8:44:13 PM	SiCl4 post valve closed
2/29/2012	8:44:13 PM	Main Vac valve closed
2/29/2012	8:44:13 PM	Bypass valve closed
2/29/2012	8:44:13 PM	Bubbler valve closed
2/29/2012	8:44:13 PM	Helium MFC set to  0.000000
2/29/2012	8:44:13 PM	H2 MFC set to  0.000000
2/29/2012	8:44:13 PM	BCl3 MFC set to  0.000000
2/29/2012	8:44:13 PM	PH3 MFC set to  0.000000
2/29/2012	8:44:13 PM	SiCl4 MFC set to  0.000000
2/29/2012	8:44:13 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	8:44:13 PM	Tube furnace set to 0
2/29/2012	8:44:14 PM	Run finished at 8:44 PM
2/29/2012	9:49:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/29/2012	9:49:46 PM	Recipe started at 9:49 PM
2/29/2012	9:49:46 PM	Helium valve closed
2/29/2012	9:49:46 PM	H2 valve closed
2/29/2012	9:49:46 PM	BCl3 valve closed
2/29/2012	9:49:46 PM	PH3 valve closed
2/29/2012	9:49:46 PM	SiCl4 pre valve closed
2/29/2012	9:49:46 PM	SiCl4 post valve closed
2/29/2012	9:49:46 PM	Main Vac valve closed
2/29/2012	9:49:46 PM	Bypass valve closed
2/29/2012	9:49:46 PM	Bubbler valve closed
2/29/2012	9:49:46 PM	Helium MFC set to  0.000000
2/29/2012	9:49:46 PM	H2 MFC set to  0.000000
2/29/2012	9:49:46 PM	BCl3 MFC set to  0.000000
2/29/2012	9:49:46 PM	PH3 MFC set to  0.000000
2/29/2012	9:49:46 PM	SiCl4 MFC set to  0.000000
2/29/2012	9:49:46 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	9:49:46 PM	Tube furnace set to 0
2/29/2012	9:49:49 PM	H2 valve closed
2/29/2012	9:49:49 PM	BCl3 valve closed
2/29/2012	9:49:49 PM	PH3 valve closed
2/29/2012	9:49:49 PM	SiCl4 pre valve closed
2/29/2012	9:49:49 PM	SiCl4 post valve closed
2/29/2012	9:49:49 PM	Main Vac valve closed
2/29/2012	9:49:49 PM	Bypass valve closed
2/29/2012	9:49:49 PM	Bubbler valve closed
2/29/2012	9:49:49 PM	Helium valve opened
2/29/2012	9:49:49 PM	Helium MFC set to  500.000000
2/29/2012	9:49:49 PM	H2 MFC set to  0.000000
2/29/2012	9:49:49 PM	BCl3 MFC set to  0.000000
2/29/2012	9:49:49 PM	PH3 MFC set to  0.000000
2/29/2012	9:49:49 PM	SiCl4 MFC set to  0.000000
2/29/2012	9:49:49 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	9:49:50 PM	Tube furnace set to 0
2/29/2012	9:49:52 PM	Helium valve closed
2/29/2012	9:49:52 PM	H2 valve closed
2/29/2012	9:49:52 PM	BCl3 valve closed
2/29/2012	9:49:52 PM	PH3 valve closed
2/29/2012	9:49:52 PM	SiCl4 pre valve closed
2/29/2012	9:49:52 PM	SiCl4 post valve closed
2/29/2012	9:49:52 PM	Main Vac valve closed
2/29/2012	9:49:52 PM	Bypass valve closed
2/29/2012	9:49:52 PM	Bubbler valve closed
2/29/2012	9:49:52 PM	Helium MFC set to  0.000000
2/29/2012	9:49:52 PM	H2 MFC set to  0.000000
2/29/2012	9:49:52 PM	BCl3 MFC set to  0.000000
2/29/2012	9:49:52 PM	PH3 MFC set to  0.000000
2/29/2012	9:49:52 PM	SiCl4 MFC set to  0.000000
2/29/2012	9:49:52 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	9:49:52 PM	Tube furnace set to 0
2/29/2012	9:49:53 PM	Run finished at 9:49 PM
2/29/2012	9:49:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/29/2012	9:55:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/29/2012	9:55:52 PM	Recipe started at 9:55 PM
2/29/2012	9:55:52 PM	Helium valve closed
2/29/2012	9:55:52 PM	H2 valve closed
2/29/2012	9:55:52 PM	BCl3 valve closed
2/29/2012	9:55:52 PM	PH3 valve closed
2/29/2012	9:55:52 PM	SiCl4 pre valve closed
2/29/2012	9:55:52 PM	SiCl4 post valve closed
2/29/2012	9:55:52 PM	Main Vac valve closed
2/29/2012	9:55:52 PM	Bubbler valve closed
2/29/2012	9:55:52 PM	Bypass valve opened
2/29/2012	9:55:52 PM	Helium MFC set to  0.000000
2/29/2012	9:55:52 PM	H2 MFC set to  0.000000
2/29/2012	9:55:52 PM	BCl3 MFC set to  0.000000
2/29/2012	9:55:52 PM	PH3 MFC set to  0.000000
2/29/2012	9:55:52 PM	SiCl4 MFC set to  0.000000
2/29/2012	9:55:52 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	9:55:52 PM	Tube furnace set to 0
2/29/2012	9:56:55 PM	Helium valve closed
2/29/2012	9:56:55 PM	H2 valve closed
2/29/2012	9:56:55 PM	BCl3 valve closed
2/29/2012	9:56:55 PM	PH3 valve closed
2/29/2012	9:56:55 PM	SiCl4 pre valve closed
2/29/2012	9:56:55 PM	SiCl4 post valve closed
2/29/2012	9:56:55 PM	Main Vac valve closed
2/29/2012	9:56:55 PM	Bubbler valve closed
2/29/2012	9:56:55 PM	Bypass valve opened
2/29/2012	9:56:55 PM	Helium MFC set to  0.000000
2/29/2012	9:56:55 PM	H2 MFC set to  0.000000
2/29/2012	9:56:55 PM	BCl3 MFC set to  0.000000
2/29/2012	9:56:55 PM	PH3 MFC set to  0.000000
2/29/2012	9:56:55 PM	SiCl4 MFC set to  0.000000
2/29/2012	9:56:55 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	9:56:55 PM	Tube furnace set to 0
2/29/2012	9:57:55 PM	Helium valve closed
2/29/2012	9:57:55 PM	H2 valve closed
2/29/2012	9:57:55 PM	BCl3 valve closed
2/29/2012	9:57:55 PM	PH3 valve closed
2/29/2012	9:57:55 PM	SiCl4 pre valve closed
2/29/2012	9:57:55 PM	SiCl4 post valve closed
2/29/2012	9:57:55 PM	Bypass valve closed
2/29/2012	9:57:55 PM	Bubbler valve closed
2/29/2012	9:57:55 PM	Main Vac valve opened
2/29/2012	9:57:55 PM	Helium MFC set to  0.000000
2/29/2012	9:57:55 PM	H2 MFC set to  0.000000
2/29/2012	9:57:55 PM	BCl3 MFC set to  0.000000
2/29/2012	9:57:55 PM	PH3 MFC set to  0.000000
2/29/2012	9:57:55 PM	SiCl4 MFC set to  0.000000
2/29/2012	9:57:55 PM	Bypass solenoid MFC set to  0.000000
2/29/2012	9:57:55 PM	Tube furnace set to 0
2/29/2012	9:57:56 PM	Run finished at 9:57 PM
2/29/2012	9:57:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
